TURBOVAC Molecular Pump Maintenance Guide

Chapter 6 of the manual provides a detailed fault diagnosis table. The following is an interpretation of common faults and countermeasures.

6.1 Pump does not start

Possible causes and corrective measures

Check if the motor connection cable is not connected, loose or damaged, and connect it correctly. Replace it if necessary

Pump stuck and replaced (requiring factory repair)

On site inspection: Firstly, confirm whether TURBOTRONIK has output and measure whether the motor winding resistance is normal. If there is significant resistance or abnormal noise when turning the pump port, it may indicate that the rotor is stuck.

6.2 High operating noise and obvious vibration

Possible causes and corrective measures

Unbalanced rotor needs to be returned to the factory for balancing (OLV service department only)

Bearing damage requires replacement (OLV service department only)

The pump operates at the natural frequency of the system, causing resonance and changing the system mass or installing shock absorbers

Experience tip: Sudden sharp noise usually indicates bearing failure and should be stopped immediately to avoid secondary damage.

6.3 Unable to reach maximum pressure

Possible causes and corrective measures

Measurement equipment malfunction or regulatory contamination inspection or replacement of regulations

System, pipeline or pump body leakage detection and repair

Slight contamination inside the baking pump (see section 5.3)

Oil pollution in the pump is returned to the factory for cleaning

Replace the front-end pump with a higher pumping speed if the pumping speed is insufficient or the maximum pressure is too high

Leakage at the power cord inlet and return to the factory for repair

Check the connection line for incorrect pump rotation direction and exchange phase sequence

Special note: For TURBOVAC 50, if CF flange is used, the sealing requirements are extremely high. Any slight leakage will lead to an increase in the ultimate pressure.

6.4 Pump Overheating (TURBOTRONIK Alarm)

Possible causes and corrective measures

If the pressure in the front stage is too high, check the front stage pump and replace it with a higher pumping speed if necessary

Excessive air load or system leakage, sealing off leakage points, or increasing the size of the front stage pump

Cooling fan blockage cleaning vent

If the ambient temperature is too high, use air cooling or water cooling instead

Check the water circuit for insufficient or interrupted cooling water to ensure flow rate

Bearing damage, return to factory for repair

Preventive measures: Regularly check the cooling fan filter, cooling water flow switch, and temperature sensor.

6.5 Pump or vacuum chamber contaminated with oil

Possible causes and corrective measures

Repair or replace the anti backflow valve of the front stage pump if it fails

Failure to properly release air during shutdown. Check the release valve and release air according to regulations

System configuration error: Installation of pre extraction pipeline or adsorption trap for oil vapor backflow during the operation of the front-end pump

Saturation regeneration or replacement of adsorption trap

Maintenance and Bearing Replacement: The Key to Extending Pump Life

7.1 Standard Maintenance Interval

TURBOVAC 35 to 361 C: It is recommended to replace the bearings after 15000 operating hours at the latest.

TURBOVAC 600 C and 1000 C: Bearings must be replaced after 10000 operating hours at the latest.

Rotor replacement: Based on the degree of thermal stress, it is recommended to replace the rotor components after 45000 to 100000 hours (only completed by Oerlikon Leybold Vacuum service).

7.2 Maintenance of Blowing Gas Filters

If blowing gas is used, the filter will gradually clog. Experience has shown that filters need to be replaced every 1-6 months.

7.3 Maintenance of adsorption trap

Regularly regenerate or replace the adsorbent, refer to the operating instructions of the adsorption trap.

7.4 Precautions for returning to the manufacturer for repair

The Declaration of Pollution must be filled out, detailing whether the pump has been in contact with harmful substances. Devices without this form will be returned.

When packaging, it is necessary to ensure that the pump is not damaged during transportation and that pollutants do not leak. Use the original packaging set to seal the flange, cooling water interface, and cable entry.

Shutdown and deflation: key steps to prevent bearing damage

8.1 Correct shutdown sequence

Turn off TURBOVAC on TURBOTRONIK.

Close the front stage pump (if there is no anti backflow valve, close the front stage pipeline valve).

Immediately turn off the cooling water or fan to prevent condensation from forming inside the pump.

If the pump has been used to handle corrosive gases, it needs to be purged with dry nitrogen for 1 hour before shutdown.

8.2 Bleeding method

The turbo molecular pump must be vented before completely stopping, otherwise the atmospheric pressure will reverse and impact the rotor, causing bearing damage or rotor deformation. The manual provides three ways to release air:

Through high vacuum side venting: the smoothest and least bearing force on the shaft. But it is necessary to avoid direct impact of gas jets on the rotor.