TURBOVAC Molecular Pump Maintenance Guide
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作者:FAN
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发布时间 :2026-04-15
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84 次浏览:
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Turbomolecular pumps are the core equipment for generating high and ultra-high vacuum in semiconductors, analytical instruments, vacuum coating, and research laboratories. The TURBOVAC series (35 LS, 50, 151, 361, 600 C, 1000 C, etc.) of Oerlikon Leybold Vacuum (now part of the Leybold brand) uses grease lubricated bearings and is widely used in leak detection, surface analysis, electron microscopy, and industrial coating due to its high compression ratio, clean oil-free operation, and reliable performance. However, as the running time increases (usually bearing replacement is recommended after 15000 hours), engineers often face faults such as pump failure to start, increased noise, failure to meet maximum pressure standards, overheating shutdown, etc. It is crucial to master fast diagnosis and correct maintenance methods when the original factory maintenance cycle is long or spare parts are discontinued.
Bleeding through the front-end pipeline: It is necessary to ensure that no oil or particles are carried into the pump by the airflow.
Blowing gas/venting valve for venting: For C-version pumps, this method is recommended. When releasing air, first open the purge gas valve to make the pressure in the bearing area higher than the rest of the vacuum area, to prevent particles or corrosive gases from being pressed into the bearing.
8.3 Pressure rise speed limit
All TURBOVAC can release air at full speed, but the pressure rise rate cannot exceed the pressure rise curve given in the manual. Usually, the deflation time should be long enough (several seconds to tens of seconds) to allow the pressure to slowly rise. When there is a risk of particles, the venting must be slower and maintain laminar flow. The slower the pressure rise, the longer the bearing life.
