Welcome to the Industrial Automation website!

Product
Article
NameDescriptionContent
XING-Automation
E-mail  
Password  
  
Forgot password?
  Register
HOME ⊙ ZYGO ⊙ Zygo’s ZMI 2000 System Displacement Measuring Interferometer Systems
当前位置：

Zygo’s ZMI 2000 System Displacement Measuring Interferometer Systems

F: | Au:FAN | DA:2025-10-28 | 563 Br: | 🔊 点击朗读正文 ❚❚ ▶ | Share:

Zygo’s ZMI 2000 System Displacement Measuring Interferometer Systems

Displacement Measuring Interferometry improves positioning accuracy.  Zygo’s ZMI 2000 is the industry’s top performing Displacement Measuring Interferometer (DMI) System offering the highest resolution, the highest velocity, and lowest data age uncertainty for real time position control.  Zygo, a world-class interfero metric metrology company, supports you at all levels of design, engineering and manufacturing.  Zygo works as an extension of your research, engineering and  manufacturing teams in providing metrology solutions.

Performance Benefits of the ZMI 2000

• Positioning accuracy – Velocity and time dependent errors are eliminated.  All axes of motion are synchronized to an uncertainty of ≤1.7 ns.
•Overlay accuracy – λ/2048 resolution(0.31 nm) with 2 pass interferometers for excellent overlay and alignment capability.
• System throughput – Slew rates of 2.1 m/s with 2 pass interferometers enabled by the 20 MHz heterodyne split frequency.ZMI 2000 Systems are found in the most demanding feedback control applications:
• Lithography tools: optical steppers and scanners,e-beam and laser mask writers.
•Mask, wafer and LCD inspection and measurement tools, CD-SEM’s.
• Process equipment, memory repair tools.Integration Benefits of the ZMI 2000 for real-time position control

•Reduce heat, cost and ESD sensitivity, improved electrical isolation, and minimal package size 

Fiber optic cables are used on both the reference and measurement legs.

•Reduce cost in backplane space requirements
The ZMI 2002 offers two axes of interferometry on a single 6U VME board.

•Reduced design costs with simplified integration time 

The measurement boards are fully programmable through the interface bus (VME or ISA), or the P2 interface.

•Reduced cost of integration – Standard hardware interfaces for up to 7.7 MHz P2 data rates for up to 16 axes.  

Easily expanded to accommodate more axes at the same rates.

The ZMI 2000 as a Metrology System Unparalleled performance and flexibility.  

All of the performance benefits of the ZMI 2000 with the following integration options:

• ZMI Systems Chassis with PCI-VME for processor speed real-time data,
• ZMI Systems Chassis with serial or GPIB interface for more cost effective solutions,

• ZMI PC for integration into an ISA slot.ZMI 2000 Systems are in use in Standards Labs worldwide for applications in measurement and calibration of high resolution and high frequency mechanical motions:

• Piezo transducer calibration,
• Linear Scale calibration,
• Rotary Scale calibration,
• AFM stage calibration.

The ZMI 2000 System Laser Head

The laser source may be the single most critical component of the Displacement Measuring Interferometer.  

To control and assure laser head quality, Zygo manufactures our own laser tubes.

The proprietary tube design, combined with a state-of-the-art assembly and test facility, provides for a highly reliable laser head with:
• > 50,000 hour lifetime,
• Longest basic warranty at 18 months,
• Extended warranties of up to 5 years,
• Up to 8 axes of interferometry on a single head,
• Multiple head synchronization.


ZMI 2000 System Integration Features

• Optical power monitor for the laser head output,and measurement board input.
• Built in laser head diagnostics.
• Position, time, and velocity, all available independently on the P2, or VMEbus.
• Programmable synchronization signal.
• Measurement boards can be used in any standard 6U VME or ISA backplane.
The ZMI 2000 System technology combined with our world-class opto-mechanical design and manufacturing center in Middlefield, CT makes Zygo Corporation a key partner in the successful design, manufacture, and integration of your real-time position control systems.


ZMI 2000 System Performance

4 Pass PMI*、 2 Pass PMI、1 Pass LI**
Position Resolution： λ/4096 (0.15 nm)、 λ/2048 (0.31 nm)、 λ/1024 (0.62 nm)
Position Range： ± 5.3 m、 ±10.6 m、± 21.2 m
Velocity Limit： 1.05 m/s、 2.1 m/s、 4.2 m/s
Maximum Acceleration：980 m/s2, (100 g)
Data Age: 335 ns
Data Age Uncertainty
Two Axes: Uncompensated, ±15 ns (ZMI 2001) / ±12 ns (ZMI 2002) / ± 16 ns (ZMI PC)
Compensated, ±1.2 ns (ZMI 2001, ZMI 2002)
Compensated, ±1.5 ns (ZMI PC)
Three Axes: Uncompensated, ±19 ns (ZMI PC)
Compensated, ±1.7 ns (ZMI PC)
Eight Axes: Uncompensated, ±36 ns (ZMI 2001) / 22 ns (ZMI 2002)
Compensated, ±1.4 ns (ZMI 2001, ZMI 2002)
ZMI 2000 System Laser Head
Type:HeNe, cw, two frequency
Power Minimum / Typical： 425 µW / 600 µW Will support up to 8 axes
Lifetime: >50,000 hrs, 18 month warranty
Frequency split:20 MHz ± 1600 Hz
Vacuum Wavelength Accuracy:±0.1 ppm (lifetime)
Vacuum Wavelength Stability: ±0.01 ppm (24 hrs)
Reference Signal: Fiber Optic


ZMI 2000 System Measurement Boards

# of Axes per Board: 1 (ZMI 2001, ZMI PC) / 2 (ZMI 2002)
Power Requirement:+5V ± 5% @ 3.5A (ZMI 2001, ZMI 2002, ZMI PC)+12V ± 10% @ 0.1A (ZMI PC)
Position Format: 36 bit - 2’s complement
Velocity Format: 32 bit - 2’s complement
Time Range: 107.4 seconds
Time Format:32 bit - 2’s complement
Time Resolution: 25 ns
Fiber Optic Signals: Reference and Measurement
  • Valmet BIU4 M851221 Binary Input Module
  • Valmet PMB 1S CPU SCU Rack Module
  • Valmet A413248 Controller Module
  • Valmet PDP601 Distributed Processing Unit
  • VALMET M851004 M2 CPU Printed Circuit Board Module
  • Metso Valmet A413045 Ver.05 CPU Module
  • Valmet A413181 Ver.05 PLU1 Board
  • Lyngso Valmet ATB16 Controller Board
  • VALMET AIU 16 Analog Input Unit 545100-3A/3B
  • VALMET PUD 10 B Power Supply PCB Rack Module
  • Valmet MS-50V/120V Bearing Unit
  • Valmet PDP603 Distributed Processing Unit – DPU Module
  • Valmet A413110 TIU Board – Terminal Interface Unit
  • Valmet S420154 I/O Backplane PCB – Printed Circuit Board
  • Valmet A413173 Industrial Control Module
  • Valmet A413044 CPU Module
  • Valmet A4IU1 Analog I/O Module
  • Valmet A413325 IPU Power Unit – PLC Module
  • Valmet M851002 CPU Module – Central Processing Unit
  • Valmet PUD10B Power Supply Board
  • Valmet K00990 Master CPU Electronic Assy
  • Valmet Metso IOP345 Input Module
  • Metso Automation T545215 Board
  • Valmet Metso IOP304 Input Module
  • Valmet 542844-6A SCU Module
  • Metso A413043 Ver.11 Valmet CPU Module
  • Valmet Automation BIU 8A Input Module
  • Metso A413044 Ver05 Valmet CPU Module
  • VALMET 542821-5A Control System Rack Module
  • Metso A413005 Ver.04 Valmet CPU Module
  • Valmet M851207 AIU16 Card
  • Valmet BIU8 Binary Input Unit
  • VALMET 547070-2B CPU Printed Circuit Board Module
  • Valmet Automation A413325 Power Module
  • VALMET AUTOMATION A413135 AOU4 Module
  • VALMET ACU A413165 Model 9 Analog Controller
  • VALMET AUTOMATION A413511-02 Slot Rack with I/O Backplane
  • Valmet A413148 BIE 4 Rev 08 Board
  • Valmet ATB16-4 Controller Board
  • Neles Automation BOR82 A413292 Processor Module
  • Valmet A413015 NCU Module – Network Control Unit
  • Valmet AIU 16 Analog Input Unit – M8512071
  • Metso Valmet A413091 GDU Board
  • Valmet M851565 Damatic Main Keyboard
  • Metso A413082 CPU Module
  • Valmet A403037 GDC – Graphics Display Controller
  • Valmet A413076 FBC Board
  • Valmet A413015 NCU Module – Network Control Unit
  • Valmet A413082 CPU Module
  • VALMET AUTOMATION A413620 Fieldbus Repeater
  • Valmet Metso IOP341R Positioner Module
  • Metso A413082 Ver.04 CPU Module
  • Valmet Metso MCA FT250/10 10 Inch Sensor
  • Valmet N0542 ABMB Printed Circuit Board
  • Valmet A413000 Ver.07 CPU Module
  • Valmet A413061 Ver.05 DMU Module
  • Valmet M851241 M1 BCU Binary Input Module
  • Valmet Automation NCU A413015 Circuit Board
  • Valmet A413046 Ver.06 CPU Module
  • Valmet A651B001 Panel Mount Keyboard
  • Valmet IQ Scanner A418080R Basis Weight Detector Head
  • Metso Valmet A413370 ESU Ethernet SCSI Unit
  • Valmet A413340 FPU Power Supply Unit
  • Valmet SKF GE 400/600 Spherical Plain Bearing
  • Valmet SCU PCB Card 542844-7B – System Control Unit
  • Valmet A413075 FBU Fieldbus Controller Module
  • Valmet A413171 PIC Card Binary Output
  • Valmet A413002 Ver.05 CPU
  • Valmet ABMB PCB Card – Industrial Control Board
  • Valmet PMB 2R 542821-4A PCB Card
  • Metso Valmet A413001 CPU Module
  • Metso Valmet A413050 RSU 6 Serial Controller Unit
  • Valmet ABMB MT241 Input Mother Board
  • Valmet DAMATIC M851565 Keyboard
  • Valmet A413075 Ver05 FBC Board
  • VALMET K14891 FLEXI-U Operating Terminal
  • VALMET AUTOMATION MKB2 DAMATIC Keyboard
  • Valmet Metso Consistency Transmitter Smart Pulp M1 RL Blade
  • VALMET AUTOMATION A413230 ECU Module
  • Beckhoff EP9224-0037 - 4-Channel Power Distribution Box EtherCAT
  • Beckhoff CX2900-0026 - Solid State Flash Memory Card 20GB CFast
  • Beckhoff BK7500 - SERCOS Interface Fieldbus Bus Coupler Terminal
  • Beckhoff Ep2328-0002 - 4-Channel Input 4-Channel Output EtherCAT Box IP67
  • Beckhoff CX1020-0111 - Controller Kit Combo Interface Modules
  • B&R X20AI2237 - X20 System Analog Input Interface Module
  • Beckhoff CP2221-0010 - Multi-Touch Built-In Panel PC Touchscreen
  • Beckhoff CX1500-M310 - Fieldbus Master Interface Module 24V
  • Beckhoff CX2100-0904 - Power Charging Module Smart UPS Extension
  • Beckhoff CP3918-0000 - Multi-Touch Control Panel 18.5-Inch Monitor
  • Beckhoff CP2915-0000 - 15-Inch Multi-Touch Built-In Control Panel
  • Beckhoff CP7037-1027 - HMI Industrial Control Panel Built-In PC
  • Beckhoff EL3152 - 2-Channel Analog Input Terminal 4-20mA EtherCAT
  • Beckhoff CP6607-0000-0020 - 5.7-Inch Built-In Panel PC HMI Touch
  • Beckhoff EJ1809-0000 - 16-Channel Digital Input Pluggable Signal Level Terminal
  • Beckhoff AM8563-0N10-0000 - Synchronous Servo Motor
  • Beckhoff AX2006-S60600-520 - Compact Servo Drive Inverter
  • Beckhoff AM8053-0K20-0000 - Servo Motor with Planetary Gearbox AG3210
  • Beckhoff AM8042-0FH1-0000 - Synchronous Servo Motor
  • Rexroth R911338600 - IndraControl V HMI Terminal Beckhoff PCI Card FC9002
  • Beckhoff AX5125-0000 - 3 Phase Industrial Servo Drive 1000Hz
  • Beckhoff EP2328-0002 - 4-Channel Digital Input 4-Channel Output EtherCAT Box
  • B&R 7CP476-02 - System 2005 RTD CPU Module 3IF681.86 Interface
  • Beckhoff AX8620-0000-0000 - Power Supply Module Axis Drive System
  • Beckhoff CX1010-0111 - PLC Module CPU Controller 24V
  • Beckhoff AM8043-0H10-0000 - Synchronous Servo Motor
  • Beckhoff C6240-1009 - Control Cabinet Industrial PC Mainframe
  • Beckhoff BX8000-0000 - Bus Terminal Controller HW 4.4 Standalone
  • Beckhoff CP7721-1089-0020 - 12.1-Inch Touch Screen HMI Panel PC
  • Beckhoff CP7132-0001 - Industrial Built-In Panel PC Screen
  • Beckhoff CP2912-0010 - Multi-Touch Built-In Control Panel Display
  • Beckhoff CP2915-0000 - 15-Inch Multi-Touch Built-In Control Panel
  • Beckhoff AM8532-1EN0-0000 - Synchronous Servo Motor
  • Beckhoff AX5203-0000 - 2-Channel Digital Compact Servo Drive
  • Beckhoff CX2020-0141 - Embedded PC Core CPU Module
  • Beckhoff CP6832-0002-0010 - Built-In Industrial Control Panel Display
  • Beckhoff CX5020-0112 - Embedded PC CPU Control Module
  • Beckhoff CX5140-0175 - 4GB Embedded PC CPU Unit 24V
  • Beckhoff EL3681-0030 - Digital Multimeter Calibration Terminal EtherCAT
  • Beckhoff CP7201-1000-0000 - Industrial PC Touch Screen HMI Monitor
  • Beckhoff CP7232-1001-0000 - Industrial Panel PC Touch Screen
  • Beckhoff C6930-1032-0040 - Control Cabinet Industrial PC System
  • Beckhoff AX5125-0000 - 3 Phase Industrial Servo Drive 1000Hz
  • Beckhoff CP3916-1424-0000 - Multi-Touch Built-In Control Panel
  • B&R 1900071142 - Lemoine Fieldbus Communication Interface Module
  • Beckhoff EL2872 - 16-Channel Ribbon Cable Digital Output Terminal
  • Beckhoff CX2030-0120 - Embedded PC CPU Base Module Controller
  • Beckhoff CP3919-0000 - 19-Inch Multi-Touch Control Panel Touchscreen
  • Beckhoff AX5101-0000-0202 - Servo Driver Compact Intelligent Drive 180V