Zygo MicroLUPI Micro Hole Diameter Laser Unequal Path Interferometer

Start measuring with F1, and the system automatically collects "cat's eye" and "confocal" data to calculate the curvature radius; Batch measurement can create rectangular/circular measurement paths through the "Pattern Editor" (setting parameters such as row and column count, spacing, etc.)

Maintenance and after-sales service

1. Daily maintenance

Cleaning of optical components:

Dust: Blow off with compressed air, and wipe the remaining dust in one direction with lens paper dipped in isopropanol/methanol

Fingerprints/oil stains: Dip in 1% neutral soap solution to wipe, then use distilled water to remove residue, and finally finish with alcohol (do not reuse wiping materials)

Mechanical and electronic components: Use a soft cloth dipped in mild cleaner to wipe the external surface, and do not disassemble components such as motor drivers and controllers (no user repairable parts)

2. Malfunctions and after-sales service

Warranty Policy: The equipment comes with a 1-year warranty from the date of shipment (for material/process defects), standard support is provided for 5 years after discontinuation, and "best effort" support is provided thereafter; The warranty service includes free repair/replacement (with transportation, cleaning, and calibration fees to be borne), a 90 day warranty for replacement parts, or the remaining warranty period of the original warranty (whichever is longer)

Return requirement: Unused and well packaged products can be returned within 30 days, with a 20% restocking fee charged; Customized products cannot be returned, and returns must first obtain a Return Authorization (RA) number

Technical Support: In North America, you can call (800) 994-6669 (Monday to Friday 8:00-17:00 EST). In other regions, you need to provide the device model, serial number, and software version to contact the local agent

Safety and Compliance

1. Laser safety operation

Do not stare directly at the laser beam or its strong light reflection. When the device is turned on, ensure that the laser exit is unobstructed

Laser emission control: The key switch on the laser power supply is the main control (no radiation after turning off), and the "Emission Indicator" light is on to indicate that there may be laser output

Safety signs: The equipment is labeled with Class II laser warning signs ("CAUTION LASER RADATION DO NOT STARE IN BEAM"), exit port signs, non interlocking protective shell signs, etc., which must be kept clear and visible

2. Compliance certification

Compliant with the EU EMC Directive and Low Voltage Directive, meeting standards such as EN 55011 (ISM equipment RF interference), EN 61010-1 (safety of measuring equipment), EN 60825-1 (laser safety), etc

Having CE certification and JISO 9001 certification, the relevant conformity declaration is archived at Zygo's US headquarters