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HOME ⊙ ZYGO ⊙ Zygo Verify Laser Interferometer Product Highlights
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Zygo Verify Laser Interferometer Product Highlights

来源: | 作者:FAN | 发布时间 :2025-10-28 | 20 次浏览: | Share:


Annotations on Core Terminology

QPSI ™： Zygo's patented fast phase shifting interferometry technology has the core advantage of a 5ms shutter speed, strong anti vibration ability, and no need for complex vibration isolation environments.

PSI 13 bucket algorithm: The traditional 13 bucket phase shifting algorithm has high measurement accuracy, but is sensitive to environmental vibrations and needs to be used in a stable environment.

λ (wavelength): This specifically refers to the wavelength of the laser source at 633nm. "λ/XXX" in the performance indicators is a precise expression that is easy to understand (such as λ/10000, which is 633nm ÷ 10000 ≈ 0.063nm, consistent with RMS simple repeatability<0.06nm).

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