Welcome to the Industrial Automation website!

Product
Article
NameDescriptionContent
HONG  KANG
E-mail  
Password  
  
Forgot password?
  Register
HOME ⊙ ZYGO ⊙ Zygo Device Standard Operating Procedure (SOP)
当前位置：

Zygo Device Standard Operating Procedure (SOP)

来源: | 作者:FAN | 发布时间 :2025-10-28 | 254 次浏览: | Share:

Zygo Device Standard Operating Procedure (SOP)

Start up

To The right is the motion controller/joystick Check the controller to make sure the z-stop is set (light above z stop button is solid green or solid red).
This is done as a  safety precaution as you prepare your sample.
The z-stop must be set before any measurement steps.
Along with the z-stop there are several other functionalities including:
1) Move objective in Z by twisting joystick  
• Adjust Z-speed using +/- (lower speeds recommended when closer to part and higher mag)
2) Move stage in XY by tilting joystick in corresponding direction
• XY button must be selected (green light above button)
3) Move stage in PR by tilting joystick in corresponding direction
• PR button must be selected (green light above button)
• P=pitch, R=roll (max +/-2 degree)
• Rotate stage, 𝜃, is not functional on our instrument
4) Emergency Off button to cancel the actions taken (Stage will need homed afterwards)  

Loading Application  
To begin load the software from the desktop. Click Mx, file menu, load application and load Micro.appx application
After the application is loaded there will be a pop up for F-stop and A-stop). Make sure the F-Stop and A-Stop is open (push knobs in) and the filter is set to F1 (measure) as shown on above. Select ok.
Select Objective  
Use the software to select the objective you wish to use. The options are 2.5x, 20x, and 50x. There is an internal zoom lens (0.5X, 1X, 2X) to reach finer magnification steps. It’s recommended that you start with the 2.5x objective, 0.5X zoom, and increase in smaller increments. You must always raise the objective high in z before switching objectives to prevent collision.
Load Sample  
Ensure objective is sufficiently high. Place sample on stage and align XY rotation by eye since no θ rotation is available. Adjust X and Y on joystick until light from objective is projected onto sample.

Set Z-stop

The Z-Stop has 3 settings noted by the indicator light:
• Blinking red: the z-position is not set (you will also hear an audible beeping sound when trying to move the objective)
• Solid red: the z-position is at the user-set limit
• Solid green: your current position in the z axis is higher than the set z-stop
Procedure:
1) Drive the objective down slowly in Z from a high position (speed can be adjusted on the Motion Controller). Select Auto Light Level (F9).
2) Drive until a surface on sample comes roughly into focus. Slowly drive below that surface and below any features of interest, being careful not to collide with any part of the sample or stage. Look at the bottom computer monitor and part on the stage to do this.
3) Set Z-stop (button on Motion Controller from  blinking red to red)
Optimize Pitch/Roll  
1) Drive in XY to cleanest, flattest area on your surface.
2) Focus the sample and find the fringes.
3) Select lowest internal zoom possible (0.5X).
4) Select PR. Drive in direction that adjusts fringes, so they are perpendicular on monitor (like shown in figure right). Hint: probe joystick lightly in several directions, trying 45-degree angles first as shown.
5) Lightly adjust Z (rotate joystick) to move fringes left and right to center of screen. (Can decrease z-speed).
6) Drive joystick perpendicular to fringes (left or right), such that they expand. Expand until there is only one fringe (doesn’t matter which).
7) Auto Light Level (F9) to get rid of red saturation on sensor.

8) Your surface is now normal to the objective, and you are ready to take a measurement.

Measure  
In the measurement Setup panel on the left
1)  Z resolution is High (there is a fine and coarse z-motor that moves the objectives while recording measurements. High uses fine, piezo motor)  
2) In the measurement range drop box, select a range <145µm to keep high Z resolution. Above this will be coarse.  
3) Ensure that “Enable stich” box is unchecked. Select Measure noted by the blue circle on Mx Pro (F12).  
If software begins to do anything you don’t expect, hit red button on the motion icon controller (takes only 2 min to reset.  


Set Analyze Controls  
Navigate to the “Analyze” tab in MxPro software. The measurement you just took shows in 3D in the main window, 2D in the top right window, and brightfield in bottom right. You can load prior measurements by selecting Load and then loading a .datx file saved earlier. You will likely need to further level your data with post processing.


2D leveling  
1) Right-click on main window 3D figure and select 2D.  
2) Select “Linear” above window.
3)  A slice with arrows will appear. Click in two positions on your image to select the measurement of interest. Note graph below will automatically plot the profile.  
4) Right click on graph, add inspector 1. Right click again and add inspector 2.
5)  Slide around to your baseline surface. Right click, Level.
3D leveling
1)  In the left panel you are in the “Surface” section. Select “Surface Processing” (pop up window appears)  
2) Check “Immediate Update” in bottom left. Check “Use Fit Mask.” Select Mask Editor. A window will pop up.  
  • Alstom CPRM1 SINGLE-PHASE POWER REGULATION BOARD
  • Alstom ESVI1 INPUT/OUTPUT BOARD FOR CURRENT AND VOLTAGE SIGNALS
  • Alstom RDSP1 BOARD FOR ADJUSTING DIGITAL SIGNAL PROCESSES
  • Alstom MDEX1 microprocessor control board
  • Alstom IRVI20 - REGULATION INTERFACE BOARD
  • Alstom AMS42 POWER SUPPLY BOARD
  • ABB VACUUM CONTACTOR VSC7 SCO IEC 60470 400A 3POLE 220-250V 50/60Hz
  • ABB DRIVEMONITOR VERSION 4000 DRIVE MODULE RBOX316-ABB-00
  • YASKAWA JACP-317802 AC servo drive
  • YASKAWA JACP-317801 Advanced Process Controller
  • YASKAWA JACP-317120 Power Supply Unit
  • YASKAWA CP-9200SH/SVA servo controller
  • YASKAWA CP-9200SH/CPU Programmable Controller
  • YASKAWA CP-317/DO-01 Digital Output Module
  • YASKAWA CP-317/218IF high-speed communication interface module
  • YASKAWA CP-317/217 IF Communication Interface Module
  • YASKAWA CIMR-M5D2018 High Performance Inverter
  • YASKAWA CACR-HR10BB servo drive
  • YASKAWA 218IF machine controller
  • YOKOGAWA YS1700-100/A06/A31 Programmable Indicator Controller
  • YOKOGAWA KS9-5 * A signal cable
  • YOKOGAWA KS8-5 * A signal cable
  • YOKOGAWA KS2-5 * A DSC signal cable
  • YOKOGAWA PW482-10 power module
  • YOKOGAWA SCP451-11 processor module
  • YOKOGAWA SR1030B62-3MN * 1C High Frequency Signal Processor
  • YOKOGAWA SR1030B62 Analog Input Module
  • YOKOGAWA CP451-10 processor module
  • YOKOGAWA CP451-50 processor module
  • YOKOGAWA AAI143-H50 Analog Input Module
  • YOKOGAWA 22.5 × 17.4 × 10 Compact Industrial Control Module
  • YOKOGAWA AMM42 multiplexer input module
  • YOKOGAWA SDV144-S63 Digital Input Module
  • YOKOGAWA AIP830-111 single player keyboard
  • YOKOGAWA S9361DH-00 Terminal Board Module
  • YOKOGAWA ATK4A-00 S1 KS Cable Interface Adapter
  • YOKOGAWA PW701 power module
  • YOKOGAWA AVR10D-A22010 Duplex V-net Router
  • YOKOGAWA PW441-10 power module
  • YOKOGAWA VI451-10 Communication Interface Module
  • YOKOGAWA VC401-10 Coupling Module
  • YOKOGAWA ALP121 Communication Module
  • YOKOGAWA NFAI841-S00 Analog Input Module
  • YOKOGAWA AIP591 Process Control Module
  • YOKOGAWA AIP578 optical link transceiver
  • YOKOGAWA PW501 power module
  • YOKOGAWA YNT511D fiber optic bus repeater
  • YOKOGAWA AIP171 transceiver control module
  • YOKOGAWA VI702 Vnet/IP Interface Card
  • YOKOGAWA 2302-32-VLE-2 electronic mixer
  • YOKOGAWA ATK4A-00 Cable Interface Adapter
  • YOKOGAWA ALR121-S00 Communication Module
  • YOKOGAWA CP461-50 processor module
  • YOKOGAWA AIP121-S00 Control Module
  • YOKOGAWA UR1800 Recorder
  • YOKOGAWA LC82 * A Industrial Controller
  • YOKOGAWA ANR10D bus node unit
  • YOKOGAWA SDV144-S13 Digital Input Module
  • YOKOGAWA NFAI143-H00 Analog Input Module
  • YOKOGAWA EB501 Bus Interface Module
  • YOKOGAWA CP451-10 Process Control Module
  • YOKOGAWA V0/E1/TCAM/L08 Advanced Process Control Module
  • YOKOGAWA VO/E2/TCDM24/L8 high-precision temperature control module
  • YOKOGAWA 16137-119 high-precision digital input module
  • YOKOGAWA 16114-500 module rack
  • YOKOGAWA PSCDM024DCBAN Key Discrete Module
  • YOKOGAWA 16137-151 Process Control Module
  • YOKOGAWA 16137-188 Process Control Module
  • YOKOGAWA 16137-222 Process Controller
  • YOKOGAWA 16137-223 high-precision temperature transmitter
  • YOKOGAWA 16137-153 Digital Input Module
  • YOKOGAWA 866257000 high-precision temperature controller
  • YOKOGAWA 8596020000 Digital I/O Module
  • YOKOGAWA 866256000 high-precision process control module
  • ABB AFS670 19" Ruggedized Switch AFS670-EREEDDDSSEEEEEEEPZYX05.1.0
  • NI VXIpc-871B Controller
  • YOKOGAWA PSCAMAAN Process Control Analog Input Module
  • YOKOGAWA DR1030B60 servo actuator
  • YOKOGAWA ADV551 Digital Output Module
  • YOKOGAWA AAI543 proposed output module
  • YOKOGAWA LR 4220E Level Transmitter
  • YOKOGAWA SR1008B62 External Wiring Module
  • YOKOGAWA SC200S Control Valve Positioner
  • YOKOGAWA PW301 power module
  • YOKOGAWA NP53 * C Precision Control Module
  • YOKOGAWA F3YD64-1A transistor output module
  • YOKOGAWA F3XD64-3N Industrial Module Controller
  • YOKOGAWA F3WD64-3N High Performance Module Controller
  • YOKOGAWA F3SP21-0N CPU module
  • YOKOGAWA F3PU10-0N AC power module
  • YOKOGAWA F3PU06-0N power module
  • YOKOGAWA F3NC02-0N positioning module
  • YOKOGAWA F3NC01-0N positioning module
  • YOKOGAWA F3LC21-1N Multi Link Module
  • YOKOGAWA F3BU06-0N Base Module
  • FORCE PMC234 control module
  • FORCE CPU-2CE/16 Industrial Control CPU Module
  • Foxboro PBCO-D8-010 FBM I/O cards
  • FOXBORO PBCO-D8-009 Digital Output Module
  • FOXBORO FBM207C RH917GY High Density Contact Induction Input Module
  • FOXBORO AD916AE Digital Control System Module
  • FOXBORO FBM217 discrete input module
  • FOXBORO RH926GH processor module
  • FOXBORO H90 H90C9AA0117S Differential Pressure Transmitter
  • FOXBORO P0926GJ high-precision differential pressure transmitter
  • FOXBORO RH928AW control module
  • FOXBORO N-2AX+DIO signal distribution module
  • FOXBORO RH924WA Fiber Optic Network Adapter
  • FOXBORO P0924JH Control System Module
  • FOXBORO H92 Process Automation System
  • FOXBORO PP0926KN control module
  • FOXBORO P0916FH controller
  • FOXBORO E69F-T-I2-JRS on-site installation signal converter
  • FOXBORO P0926JM Standard 200 Series Baseplates
  • FOXBORO E69F-BI2-S Current Pneumatic Signal Converter
  • FOXBORO P0926GU FBM230 Field Equipment System Integration Module
  • FOXBORO RH931RQ cable terminal
  • FOXBORO H92A049E0700 server module
  • FOXBORO H90C9AA0117S Differential Pressure Transmitter
  • FOXBORO RH101AA High Performance Pressure Transmitter
  • FOXBORO FPS400-24 P0922YU power module
  • FOXBORO P0973LN differential pressure transmitter
  • FOXBORO P0926GV FBM231 Field Equipment System Integration Module
  • Foxboro FBM202 P0926EQ thermocouple/mV input module
  • FOXBORO FBMSVL Safety Valve Logic Solver
  • FOXBORO P0926PA Industrial Control Module
  • FOXBORO L0130AD L0130AE-0H Digital Input Module
  • FOXBORO 0399085B 0303440C+0303458A combination control module