ZYGO MetroPro 9.0 Reference Guide (OMP-0347M)

ZYGO MetroPro 9.0 Reference Guide (OMP-0347M)

Software Fundamentals and Core Architecture

1. Basic Information and Document System

Software positioning: Suitable for Zygo precision optical measurement equipment, providing data acquisition, analysis, visualization, and automation functions, supporting custom application configuration to adapt to different measurement scenarios (such as surface morphology, roughness, wavefront analysis).

Version history: From version 4.0 in 1993 to version 9.0 in 2011, the manual revision records cover functional updates in each version (such as the addition of FDA high-resolution analysis in version 7.10 and optimized pattern editor in version 8.0).

2. Software architecture and hierarchical logic

MetroPro adopts a nested window structure, with each component nested in a hierarchical order of "MetroPro main window → application window → function window (control/data/drawing, etc.)". The core components are defined as follows:

Component Type Core Function Example

The top-level interface of MetroPro main window software after startup, which can load/create multiple application windows and display loaded application icons (such as Micro. app)

Application Window is a set of configurations for specific measurement tasks, including sub windows for surface morphology measurement applications such as control and data (including objective control and data display windows)

Control Window manages measurement parameters (such as laser power, scanning mode), triggering operations (measurement/calibration), including the "MEASURE" button and laser intensity control slider

The Data Window displays measurement data, supports plotting (3D/profile), and displays numerical results including filled plots and profile result tables

Plot Window data visualization tools, such as fill plots (surface morphology), profile plots (2D contour), 3D model plots, power spectral density plots (PSD)

Controls/Buttons control parameter adjustment (such as filter type, unit selection), trigger specific function "Auto Focus" button, "Filter Type" dropdown control

3. Basic operating standards

Keyboard and Mouse Operations:

Shortcut keys: F1 triggers measurement, F5 automatically adjusts light intensity, Ctrl+Alt+Delete exits software;

Mouse functions: right-click to bring up menus, middle click to move windows, left click to select/trigger (such as button clicking, text input).

File Management

Supports 10 core file formats, including application configuration (. app), measurement data (. dat), mask (. mas), script (. scr), etc;

File naming convention: The first character is a letter/number, supporting underscores and periods, with a maximum length of 20 characters (after version 7.4). It is recommended to add an extension (such as "Sample01. dat");

Directory operation: Create/switch directories through the "File Handler" dialog box, supporting cross drive file access.

Window Control: Supports window movement, scaling, cascading, and closing (converted to icons), and can be hidden, renamed, deleted, and other operations through the "Window Control" menu.

Detailed explanation of core functional modules

1. Working with Applications

The application is the core task unit of MetroPro, which can be customized to meet different measurement needs. The core operations include:

(1) Application type and loading

Type classification:

Standard application: Pre installed software (such as "Micro. app" for microscopic measurement), write protected, needs to be copied and modified through the user directory;

Custom application: Modify based on existing applications (such as adjusting control positions, adding new drawings) or create from scratch.

Loading process: Right click on the MetroPro main window menu ->"Load Application", select the. app file in the file browser, and support loading multiple applications simultaneously (up to 3 can be opened at the same time).

(2) Application configuration and saving

Core component configuration:

Control window: Add measurement parameter controls (such as objective lens selection, scan length), function buttons (such as "Calibrate" calibration);

Data window: Add plots (such as fill plots, profile plots), result value boxes (such as PV values, RMS values);

Other windows: Report window (generate measurement report), Video monitoring window (real-time display of measurement area).

Save rules:

Save Application ": Specify a name and path when saving for the first time (such as" Customs Surface. app ");

Re save Application ": Overwrite the current application configuration without the need to reselect the path;

Lock application: Press Ctrl+Shift+L to lock the application (to prevent accidental changes), supports password protection (4-13 letters/numbers).

2. Mask Editor

Masks are used to define measurement areas (including/excluding specific areas), supporting 4 types of masks and adapting to different measurement scenarios:

(1) Mask type and function

The core role of mask types in application scenarios

Default (default mask) takes effect by default when no other masks are defined for regular measurements, covering the entire camera field of view