ZYGO MetroPro 9.0 Reference Guide (OMP-0347M)

(3) Light intensity control

Manual adjustment: Press F4 to open the light intensity window, use the+/- (fine) and */(coarse) keys to adjust, ensuring that the saturation pixels are below the threshold (default ≤ 4);

Automatic adjustment: Press F5 to start AGC (automatic gain control), automatically adapt the reflectivity of the parts, optimize the signal-to-noise ratio, and set the "Target Range" with a safety margin for light intensity saturation (default 0.1).

Data processing and result output

1. Data format and conversion

Support import/export of multiple data formats, suitable for different analysis scenarios:

Binary format:. dat (raw measurement data, including phase/intensity matrix),. app (application configuration),. mas (mask);

Text formats:. csv (comma separated, used for Excel analysis),. rep (report file),. zfr (Zernike polynomial, CODE V format);

Universal format: Supports interaction with optical design software, such as CODE V (. wfr/. sur), ZEMAX (grid height data), OSLO compatible files.

2. Results and Reports

Result types: covering surface morphology (PV, RMS, Ra), wavefront analysis (Zernike coefficient, Seidel coefficient), geometric parameters (curvature radius, tilt angle), etc., supporting custom result units (imperial/metric/optical units such as wavelength);

Report generation:

Report Window: Add result values, attributes (such as measurement time, operator ID), and comment text, and save them as. rp files;

Q-DAS report: compatible with Q-DAS quality analysis system, supporting Gage Type 1/3 studies (measurement system repeatability analysis), outputting. dfq (merged files) or. dfd/. dfx (split header/data files).

Key Terminology Annotations

QPSI ™： Zygo's patented fast phase-shift interferometry technology, with a shutter speed of 5ms, strong anti vibration ability, and no need for complex isolation;

FDA (Frequency Domain Analysis): Frequency domain analysis technology used in white light scanning interferometers to extract multi wavelength phase information through Fourier transform and solve the 2 π phase ambiguity problem;

Zernike Polynomials: Used for fitting wavefront errors, MetroPro supports 37 terms (Coef 0-Coef 36) and can be exported in CODE V format;

BRDF（Bidirectional Reflectance Distribution Function）： Bi directional reflection distribution function, used to analyze surface reflection characteristics, requires input of incident angle and scattering angle.