ZYGO MetroPro 9.0 Reference Guide (OMP-0347M)

Eliminate interference areas (such as edge diffraction and low reflectivity areas) during the data acquisition phase of the Acquisition mask to reduce data volume and improve speed

Test/Reference Mask Area Comparison Measurement defines "test area" and "reference area", used for analyzing differences in different areas of the same part (such as surface flatness comparison)

(2) Mask creation and editing

Basic operation: Click the "Mask Data" button to open the editor, which supports drawing shapes such as circles, rectangles, polygons, etc. Use "Fill/Fill" to control whether the area is included in the analysis (the filled area is the valid area);

Advanced features:

Auto Aperture: Automatically generate circular/rectangular masks based on data, and can set the center position (such as data centroid, fixed coordinates) and the ratio of inner and outer diameters;

Fiducials: Define reference marker points for aligning parts (such as position calibration when assembling multiple data sets), and support saving as. gid files for reuse.

3. Pattern Editor

For instruments with programmable motor stages, used to define automatic measurement position sequences, supporting 3 types of pattern types:

(1) Pattern type and parameters

Pattern type applicable scenario core parameters

Rectangular regular array measurement (such as multiple chips on a wafer) includes row/column count, row/column spacing, and motion sequence (snake/grating)

Circular area measurement (such as lens surface) includes the number of circles, the number of radial points, and the radius range (Radius 1/Radius 2)

Free Rect irregular position measurement manual addition/editing of position coordinates, supports online (capturing position after stage movement)/offline (directly inputting coordinates) creation

(2) Pattern operation and control

Run settings: Specify the operation (measurement/run script), pause time (Pre Pause/Post Pause), and error handling (retry/skip/terminate) for each location;

Position management: Edit the position (including/excluding specific points) through the "Position Editor", and view the measurement status of each position through the "Position Status" (identified by code: P=qualified, F=failed,?)? =Unmeasured).

4. Drawing function (Filled Plot&Profile Plot)

Drawing is the core of data visualization, and the most commonly used "Filled Plot" and "Profile Plot" are used in conjunction to cover 3D surfaces and 2D contour analysis

(1) Filled Plot

Functional positioning: Display 3D surface morphology and distinguish height differences by color (such as spectral colors representing different height ranges);

Controller function:

Color settings: Supports 16 color bands, grayscale, CMYK, and other color schemes. "Color Fit" optimizes the display of data with a high proportion of a single color;

Slice tool: Draw linear/radial/circular slices, define the analysis path of the cross-sectional view;

Show PV: Mark the highest (Peak) and lowest (Valley) points on the surface to display the PV value;

Limit display: Combined with the upper and lower limits of PV results, it is highlighted in red when exceeding the limit.

(2) Profile Plot

Function positioning: Display the 2D height contour on the slicing path, support precise numerical analysis;

Core operation:

Axis scaling: Fixed X/Y axis range (such as Y-axis set to 0-100nm), or automatically adapted to data range;

Inspection tool: Move the crosshair to read the coordinates of any point (X=distance, Y=height), calculate the distance between two points (xDst) and the height difference (yDst);

Result export: Export profile data as text (CSV/Tab separated) or images (BMP/CIF).

5. Instrument Control

Covering key operations such as equipment calibration, error correction, and light intensity adjustment to ensure measurement accuracy:

(1) Automatic function

Auto Focus: Suitable for devices with a Z-axis motor, set the focus range through "Focus Max Adjust" and the minimum modulation threshold through "Focus Min Mod" to ensure focus accuracy;

Auto Tilt: For platforms with pitch/roll motors, adjust the angle of the parts to reduce stripe tilt, and set the "Auto Tilt Iterations" adjustment frequency (recommended 2-3 times to ensure convergence);

Auto null: Used for measuring spherical parts, adjusting the X/Y/Z axes to minimize interference fringes, requires inputting the nominal radius of curvature (RadCrv) of the spherical surface.

(2) Calibration and Error Correction

Lateral Calibration:

Purpose: To establish a correspondence between camera pixels and actual length (e.g. 1 pixel=2.5 μ m), Zygo standard calibration parts are required;

Process: Draw a calibration line in the "Lateral Calibrator" window, enter the actual length (such as 1mm), and save the calibration parameters;

System Error Correction:

Method: Measure high-precision standard components (such as reference planes with ≤ 2 Å RMS), save them as a system error file (. dat), and enable error subtraction through the "Abstract Sys Err" control;

Applicable scenarios: Eliminate the inherent aberrations of the instrument (such as optical system errors in interferometers) and improve measurement accuracy.