Novellus IPEC SpeedFam 2805-11407 PLC Rack Assembly

The Novellus IPEC SpeedFam 2805-11407 is a PLC rack assembly designed for use in semiconductor wafer polishing and planarization equipment. Manufactured by Novellus Systems (now Lam Research), this chassis provides the mechanical and electrical backplane for housing PLC modules, I/O cards, and communication controllers. It is a critical component in legacy IPEC SpeedFam polishing tools used for chemical mechanical planarization (CMP).

Technical Specifications

The 2805-11407 rack is a 19-inch rack-mountable chassis with a height of 6U (265 mm) and depth of approximately 300 mm. It features a passive backplane with 10 card slots arranged in a single row. The backplane supports a parallel bus architecture (custom Novellus protocol) with 24V DC and 5V DC power distribution. Each slot provides a 96-pin DIN 41612 connector for card interconnection. Power input is 110-240 V AC (via rear IEC inlet) or 24 V DC (via terminal block). The rack includes a cooling fan assembly (two 80 mm fans) with filter. Status LEDs on the front indicate power good, fan fault, and bus activity. The chassis is constructed from sheet steel with a black powder coat finish. Operating temperature 0-50°C. Weight approx. 6.5 kg.

Key Features

• 19-inch rack mount, 6U height

• 10 slots for Novellus PLC cards

• Passive backplane with custom bus

• Integrated power supply and cooling fans

• Supports 24V DC and 5V DC logic

• Front panel with card guides and ejector handles

• Status LEDs and fault indicators

• Compatible with IPEC SpeedFam CMP tool series

Compatible Modules

The 2805-11407 rack accepts a range of Novellus-specific PLC cards, including digital input modules (e.g., 2805-108xx), digital output modules, analog input modules, CPU cards (e.g., 2805-110xx), and communication cards (e.g., RS232 or Ethernet bridge). Many of these modules are manufactured by third-party OEMs (such as Pro-face or Omron) but are customized for Novellus. The rack is not compatible with generic PLC standards (e.g., Allen-Bradley, Siemens) without an adapter.

Power Distribution

The rack includes a built-in power supply unit (PSU) that converts AC input to 5V DC (for logic) and 24V DC (for field I/O). The PSU is rated at 150W continuous. A backup battery connection is available for CPU memory retention. The backplane distributes power via dedicated pins; each slot has overcurrent protection (resettable fuse). The front panel has a main power switch and a circuit breaker. For redundant operation, a second rack can be connected via a ribbon cable.

Applications

This rack assembly is specifically used in Novellus IPEC SpeedFam CMP systems (models Avanti, Obsidian, etc.) for wafer planarization. It houses the PLC that controls polishing head pressure, platen rotation speed, slurry delivery, and conditioning arm positioning. Due to the age of these machines, the 2805-11407 is primarily sought for maintenance and refurbishment of existing semiconductor fabs.

Installation and Maintenance

Install the rack in a standard 19-inch equipment cabinet using four front mounting screws. Ensure proper grounding via the rear ground stud. Connect AC power to the IEC inlet. Insert modules into the card guides, aligning with the DIN connector; secure with front screws. The cooling fan filter should be cleaned every 3 months. If a slot fails, the entire backplane may need replacement; individual slots are not repairable. The rack is not hot-swappable; power must be off before inserting or removing cards.

Environmental and Certifications

The 2805-11407 meets CE and SEMI S2 (safety guidelines for semiconductor equipment). It is designed for cleanroom use (Class 1000 or better) with positive pressure cooling. Ambient temperature 15-35°C, humidity 30-60% non-condensing.

Conclusion

The Novellus IPEC SpeedFam 2805-11407 PLC rack assembly is a specialized component for legacy semiconductor polishing tools. Its robust construction and modular design allow continued operation of CMP equipment in mature fabs.