Novellus IPEC SpeedFam 2805-11407 PLC Rack Assembly

The Novellus IPEC SpeedFam 2805-11407 is a high-density PLC rack assembly used in semiconductor wafer processing systems. This rack serves as the mechanical backplane and interconnect chassis for programmable logic controllers (PLCs) and distributed I/O modules. Manufactured for Novellus Systems (now part of Lam Research), this assembly is typically found in CMP (Chemical Mechanical Planarization) and wafer cleaning equipment. The rack provides a standardized form factor for inserting CPU modules, power supplies, and I/O cards. It features a rugged steel chassis, DIN rail mounting provisions, and a multi-layer backplane with power and communication buses. The 2805-11407 ensures reliable signal integrity and power distribution in cleanroom environments.

General Specifications

Mechanical and Electrical Features

The rack is constructed from cold‑rolled steel with a corrosion‑resistant finish suitable for semiconductor fabs. The backplane is a multi‑layer printed circuit board with copper power planes for low impedance. Each slot is keyed to prevent incorrect module insertion. The rack includes integrated termination resistors for the backplane bus. Power is supplied via a terminal block or a plug‑in power supply module. The backplane distributes 5V and 24V DC to all slots, with overcurrent protection per slot. The rack also provides a dedicated grounding point for ESD compliance.

Functional Description

The 2805-11407 acts as the central interconnect for a PLC system within Novellus IPEC SpeedFam processing tools. It hosts the CPU module, power supply, and various I/O modules (digital, analog, motion control). The backplane bus carries address, data, and control signals between the CPU and I/O modules. The rack’s mechanical design ensures proper alignment of high‑density connectors, reducing the risk of bent pins. The rack also provides cable management features such as wire ducts and tie points. It is typically mounted inside a control cabinet or equipment chassis.

Compatible Modules

This rack is compatible with Novellus‑branded PLC modules and certain third‑party modules (e.g., Allen‑Bradley 1746 series with adapter). Typical modules include:

• Power Supply: Corcom 20VK1 filter (line filter unit)

• CPU Modules: 32‑bit RISC processors for real‑time control

• Digital I/O: 16‑channel 24V DC input/output modules

• Analog I/O: 4‑channel 4‑20mA or 0‑10V modules

• Motion Control: Stepper/servo axis interface modules

Applications

The 2805-11407 is used in Novellus SpeedFam wafer polishing systems, cleaning stations, and transfer modules. It also serves as a spare part for maintaining legacy semiconductor equipment. The rack is suitable for upgrading older control systems to modern PLCs while preserving existing field wiring.

Installation Guidelines

Mount the rack horizontally using four M6 screws through the chassis flanges. Ensure the rack is grounded to the cabinet earth busbar. Insert modules from left to right, starting with the power supply. Secure each module with its retaining screws. Connect external field wiring to the I/O modules’ terminal blocks. After installation, verify backplane continuity with a multimeter before applying power.

Conclusion

The Novellus IPEC SpeedFam 2805-11407 PLC rack assembly provides a robust, scalable foundation for semiconductor equipment control, offering reliable backplane connectivity and modular expansion.