Edwards CTI Kryogenics On Board 8F Enhanced Cryopump Explanation

Cross venting volume of 150 Torr-l

Nominal regeneration time (cold to cold) for the first and second stages, 2.5 hours

Only second level regeneration (fast regeneration mode)<1 hour

Note: The fast regeneration mode is suitable for sputtering processes and requires cooperation with the FastRegen control module.

4.2 Regeneration time optimization

Standard regeneration (cold to cold) takes 2.5 hours, but if only the second stage (mainly adsorbing argon and nitrogen) needs to be regenerated and equipped with a FastRegen control module, the time can be compressed to less than 1 hour. This provides greater flexibility for production scheduling.

Full compatibility with existing equipment

The enhanced On Board 8F is designed to remain fully compatible with all installed On Board 8F or Cryo Torr 8F process tools:

New equipment: can be directly integrated through factory installation.

Installed equipment: In fab retrofit can be carried out on-site in the wafer fab without the need to modify existing cavity interfaces, cooling water connections, or electrical control circuits.

This compatibility eliminates the need for users to replace existing valves, controllers, or pipelines, minimizing upgrade costs and time.

Reliability guarantee: GUTS global support network

All Edwards CTI Kryogenics products are covered by the GUTS (Guaranteed Uptime Support) program, a global rapid response service network that guarantees equipment uptime

24/7 technical support.

There are service centers in major regions around the world (Europe, America, Asia Pacific).

Promise immediate and professional response and action.

For semiconductor factories, rapid response is crucial in the event of pump failure or performance issues, and GUTS can ensure the shortest downtime for repair.

Engineering Integration and Selection Suggestions

7.1 When to Choose Enhanced On Board 8F

High load sputtering process: applications with frequent deposition of aluminum, titanium, titanium nitride, etc. have high regeneration frequency and significant upgrade benefits.

Pursuing maximum production capacity: Any manufacturer looking to improve tool utilization and reduce the cost per wafer.

Used On Board 8F or Cryo Torr 8F: can be seamlessly replaced without modifying existing facilities.

7.2 Replacement and Upgrade Process

Evaluate the current regeneration frequency and vacuum recovery curve to confirm the expected benefits of enhanced 8F.

Contact Edwards' local representative to obtain a retrofit kit or new pump order.

Complete pump replacement or modification within the scheduled maintenance window (usually within 1-2 hours, excluding regeneration time).

Restart the process, as there is no change in pumping speed, there is no need to re evaluate and production can be resumed immediately.

7.3 Maintenance Plan Optimization

By reducing the number of regenerations, regeneration operations can be scheduled on fixed maintenance days each month (such as target material replacement days) to avoid unplanned downtime. At the same time, consider adopting FastRegen mode to reduce downtime to within 1 hour when only the second level regeneration is required, further enhancing flexibility.

Quantitative analysis of actual returns

Assuming that an existing On Board 8F sputtering production line regenerates 6 times a month for 2.5 hours each time, it will shut down for 15 hours per month. If the enhanced 8F is used, the regeneration frequency is reduced to 2.5 times (reduced by 60%), and the downtime is about 6.25 hours, saving 8.75 hours per month. Based on the output of 20 wafers per machine per hour, an additional 175 wafers are produced per month. A factory with 10 devices can increase the production of thousands of wafers per month while reducing waste of target materials and energy.

Troubleshooting and Common Problems

The recovery time is still too long: check if the pump has reached saturation capacity, confirm if the process gas composition has changed, and perform complete regeneration if necessary.

Poor vacuum degree after regeneration: Ensure sufficient regeneration heating and release of all adsorbed gases; Check the sealing of the connection.

Incompatible with old controllers: The enhanced 8F uses standard interfaces, but if the controller firmware is too outdated, it may need to be upgraded; Suggest consulting Edwards support.

Fast regeneration failure: Confirm that the FastRegen control module has been correctly installed and activated, and is only applicable to the second level regeneration.