AMAT 0190-37519 DC Power Supply
The AMAT 0190-37519 is a precision DC power supply module designed for Applied Materials semiconductor processing systems. It delivers multiple regulated DC voltages to critical subsystems such as electrostatic chucks (ESC), heaters, bias electrodes, and control electronics, ensuring stable and reliable tool operation.
Key Features
Multiple isolated outputs: +24 V, +48 V, +12 V, +5 V (typical configuration)
High output accuracy: ±1% over line and load
Overcurrent and short‑circuit protection with auto‑recovery
Low ripple and noise: < 50 mVpp
Remote sense for precise voltage regulation at load
Compatible with AMAT Centura, Endura, and Producer platforms
LED status indicators for each output
Technical Specifications
Input voltage: 200‑240 V AC, 50/60 Hz, single phase
Total output power: 600 W (max)
Outputs: 24 V @ 10 A, 48 V @ 5 A, 12 V @ 5 A, 5 V @ 10 A
Efficiency: >88% at full load
Hold‑up time: 20 ms at nominal input
Operating temperature: 0°C to +50°C
Cooling: integrated fan with speed control
Applications
The 0190-37519 is used to power electrostatic chucks (providing clamping voltage), heater elements for temperature control, and DC bias supplies for plasma processing. It also supplies auxiliary circuits such as sensors, valves, and communication interfaces within the tool.
Reliability and Compliance
Manufactured to meet SEMI S2 safety guidelines and CE marked, this power supply ensures safe operation in cleanroom environments. Its robust design includes protection against input transients and output faults. The module is hot‑swappable in some configurations, reducing maintenance time.
With its stable output and rugged construction, the AMAT 0190-37519 DC power supply is essential for maintaining high uptime in semiconductor manufacturing.
