Asyst Gasonics R94-1163 Controller with Sysmac C40H PLC (112671)
The Asyst Gasonics R94-1163 (part number 112671) is a complete control enclosure designed for semiconductor wafer cleaning equipment. The assembly integrates an Omron SYSMAC C40H programmable logic controller, a micro stepping motor driver, power supplies, and terminal blocks. It was originally used in the Gasonics Apex or LPCVD systems for automated wafer transfer and process control.
Main Components
The enclosure contains: Omron C40H-CPU (40 I/O points: 24 inputs, 16 outputs, relay type). The CPU has 3.2K steps of program memory and a real-time clock. Micro step driver: likely an Applied Motion model (with dip switches for 8-microstep resolution, 4 A phase). Power supplies: one 24 V DC / 2 A (Omron S82K) for PLC and sensors, one 5 V DC / 5 A for driver logic. Also includes a 12 V DC cooling fan. All I/O is wired to screw terminal blocks (Phoenix Contact).
Input and Output Mapping
The C40H inputs are wired to wafer sensing photoelectric sensors (e.g., opto-interrupters, slot sensors), limit switches for the transfer arm, and interlock contacts from the process chamber. Outputs control M24 solenoid valves for N2 purge, a vacuum pump contactor, indicator lamps, and the step-direction signals to the micro driver (via a 5 V line driver). The driver’s output connects to a two-phase stepper motor (typically 1.8°, NEMA 23) for wafer fork rotation.
Communication and Programming
The C40H has a built-in RS-232C port (upper port) for programming via the Omron SYSMAC support software (SSS) or a hand-held programming console (C200H-PRO27-E). The PLC logic includes a state machine for wafer indexing, timeout monitoring, and alarm handling. A backup EPROM (28C256) stores the master program. A potentiometer on the driver allows motor current adjustment.
Mechanical and Environmental
The controller is housed in a ventilated steel enclosure (19-inch rack mount, 4U height, depth 250 mm). Weight: 7 kg. The enclosure has a transparent polycarbonate front door with a key lock. Operating environment: Class 1000 cleanroom, temperature 20°C-30°C, humidity < 60%. The unit connects to 120 V AC mains (via IEC inlet with fuse) and an external emergency stop button.
Replacement and Service
The R94-1163 is obsolete; replacement requires restoring the ladder logic from an uploaded file or manually re-entering. Spare parts: the micro step driver can be replaced with a generic model (e.g., Leadshine DM542) by reconfiguring the dip switches (8 microstep, 3 A RMS). The Omron C40H CPU can be replaced with a CJ2M-CPU31 after adapting the wiring. Asyst Gasonics R94-1163 is often found in refurbished semiconductor fabs.
