ETEL Short‑Stroke Actuator (ID809786‑03)

The ETEL Short‑Stroke Actuator ID809786‑03 is a compact, high‑precision linear actuator designed for applications requiring small displacements with exceptional accuracy and repeatability. This actuator is ideal for micro‑positioning tasks in semiconductor manufacturing, optical alignment, and precision metrology.

It features a direct‑drive linear motor with zero backlash and no mechanical transmission, ensuring smooth and precise motion. The actuator includes an integrated high‑resolution position sensor and a built‑in thermal compensation system for stable performance over a wide temperature range.

Key Features

• Stroke length: 10 mm (customizable)

• Resolution: < 10 nm

• Maximum force: 5 N continuous, 15 N peak

• Direct‑drive ironless linear motor

• Integrated linear encoder (sub‑micron resolution)

• Thermal compensation

• Compact package: 60 x 30 x 20 mm

Technical Specifications

Supply voltage: 24–48 VDC; power consumption: < 10 W; maximum velocity: 200 mm/s; repeatability: ±0.1 µm; operating temperature: 0°C to +50°C; mass: 0.15 kg.

Applications

Used in wafer alignment, fiber‑optic positioning, laser beam steering, and nano‑indentation.

Installation and Integration

Mount the actuator using the provided screw holes. Connect the motor and encoder cables to a compatible servo drive. The actuator includes a built‑in homing sensor for reference positioning.

Reliability and Maintenance

Maintenance‑free operation with a long‑life design. The actuator is sealed against dust and particles.

Why Choose This Actuator?

This short‑stroke actuator offers sub‑micron precision in a miniature package, with ETEL's quality ensuring reliable operation.

In summary, the ETEL Short‑Stroke Actuator ID809786‑03 provides ultra‑precise positioning for demanding micro‑motion applications.