Welcome to the Industrial Automation website!

Product
Article
NameDescriptionContent
HONG  KANG
E-mail  
Password  
  
Forgot password?
  Register
HOME ⊙ ZYGO ⊙ Zygo Device Standard Operating Procedure (SOP)
当前位置：

Zygo Device Standard Operating Procedure (SOP)

来源: | 作者:FAN | 发布时间 :2025-10-28 | 533 次浏览: | 🔊 Click to read aloud ❚❚ ▶ | Share:

Zygo Device Standard Operating Procedure (SOP)

Start up

To The right is the motion controller/joystick Check the controller to make sure the z-stop is set (light above z stop button is solid green or solid red).
This is done as a  safety precaution as you prepare your sample.
The z-stop must be set before any measurement steps.
Along with the z-stop there are several other functionalities including:
1) Move objective in Z by twisting joystick  
• Adjust Z-speed using +/- (lower speeds recommended when closer to part and higher mag)
2) Move stage in XY by tilting joystick in corresponding direction
• XY button must be selected (green light above button)
3) Move stage in PR by tilting joystick in corresponding direction
• PR button must be selected (green light above button)
• P=pitch, R=roll (max +/-2 degree)
• Rotate stage, 𝜃, is not functional on our instrument
4) Emergency Off button to cancel the actions taken (Stage will need homed afterwards)  

Loading Application  
To begin load the software from the desktop. Click Mx, file menu, load application and load Micro.appx application
After the application is loaded there will be a pop up for F-stop and A-stop). Make sure the F-Stop and A-Stop is open (push knobs in) and the filter is set to F1 (measure) as shown on above. Select ok.
Select Objective  
Use the software to select the objective you wish to use. The options are 2.5x, 20x, and 50x. There is an internal zoom lens (0.5X, 1X, 2X) to reach finer magnification steps. It’s recommended that you start with the 2.5x objective, 0.5X zoom, and increase in smaller increments. You must always raise the objective high in z before switching objectives to prevent collision.
Load Sample  
Ensure objective is sufficiently high. Place sample on stage and align XY rotation by eye since no θ rotation is available. Adjust X and Y on joystick until light from objective is projected onto sample.

Set Z-stop

The Z-Stop has 3 settings noted by the indicator light:
• Blinking red: the z-position is not set (you will also hear an audible beeping sound when trying to move the objective)
• Solid red: the z-position is at the user-set limit
• Solid green: your current position in the z axis is higher than the set z-stop
Procedure:
1) Drive the objective down slowly in Z from a high position (speed can be adjusted on the Motion Controller). Select Auto Light Level (F9).
2) Drive until a surface on sample comes roughly into focus. Slowly drive below that surface and below any features of interest, being careful not to collide with any part of the sample or stage. Look at the bottom computer monitor and part on the stage to do this.
3) Set Z-stop (button on Motion Controller from  blinking red to red)
Optimize Pitch/Roll  
1) Drive in XY to cleanest, flattest area on your surface.
2) Focus the sample and find the fringes.
3) Select lowest internal zoom possible (0.5X).
4) Select PR. Drive in direction that adjusts fringes, so they are perpendicular on monitor (like shown in figure right). Hint: probe joystick lightly in several directions, trying 45-degree angles first as shown.
5) Lightly adjust Z (rotate joystick) to move fringes left and right to center of screen. (Can decrease z-speed).
6) Drive joystick perpendicular to fringes (left or right), such that they expand. Expand until there is only one fringe (doesn’t matter which).
7) Auto Light Level (F9) to get rid of red saturation on sensor.

8) Your surface is now normal to the objective, and you are ready to take a measurement.

Measure  
In the measurement Setup panel on the left
1)  Z resolution is High (there is a fine and coarse z-motor that moves the objectives while recording measurements. High uses fine, piezo motor)  
2) In the measurement range drop box, select a range <145µm to keep high Z resolution. Above this will be coarse.  
3) Ensure that “Enable stich” box is unchecked. Select Measure noted by the blue circle on Mx Pro (F12).  
If software begins to do anything you don’t expect, hit red button on the motion icon controller (takes only 2 min to reset.  


Set Analyze Controls  
Navigate to the “Analyze” tab in MxPro software. The measurement you just took shows in 3D in the main window, 2D in the top right window, and brightfield in bottom right. You can load prior measurements by selecting Load and then loading a .datx file saved earlier. You will likely need to further level your data with post processing.


2D leveling  
1) Right-click on main window 3D figure and select 2D.  
2) Select “Linear” above window.
3)  A slice with arrows will appear. Click in two positions on your image to select the measurement of interest. Note graph below will automatically plot the profile.  
4) Right click on graph, add inspector 1. Right click again and add inspector 2.
5)  Slide around to your baseline surface. Right click, Level.
3D leveling
1)  In the left panel you are in the “Surface” section. Select “Surface Processing” (pop up window appears)  
2) Check “Immediate Update” in bottom left. Check “Use Fit Mask.” Select Mask Editor. A window will pop up.  
3) Ensure “Form Remove” is checked.
4)  Draw geometry to fully characterize the form you are removing.  
5) Close out of the mask editor window when finished. The form being removed is shown in lower left.  
6) Close out of the surface processing window. Your changes will be automatically implemented to the 3D data set.  
Save Results  
1) Zygo file(.datx): File>> Save data. Save in Data (D:)ZygoData folder in D drive.  
2) Right click on any plot >> Export to export anything as image or 2D plots as . csv files.
Clean Up
1) Raise the objectives to highest point (set z- stop here. Press once to unlock as blinking red. Press again to set as solid red)  
2) Close Mx Software, log off Zygo account, Turn off monitor
3) Sign name in Log-book
4) Report any error during use in log-book. Take the Screen shot and save in data folder. 

  • GE AT868 AquaTrans Ultrasonic Flow Transmitter
  • ABB PFSA107-Z42 DTU Stressometer Digital Transmission Unit
  • ABB PFSA240 3BSE073476R1 Roll DC Supply Unit
  • Fanuc A16B-2201-0320 CPU MAIN Board
  • Pilz 475650 PNOZ 1 Safety Gate Relay
  • Omron NSH5-AL001 HMI Interface Unit
  • Allen-Bradley 1756-OF8 Analog Output Module
  • Siemens 6SL3210-1SE31-0AA0 Power Module 45kW
  • PMA TB45-110-00000-000 Temperature Limiter
  • PSR-SCP-24DC-ESD-5x1-1x2-300 Safety Relay
  • Pilz 774140 PZE 9 Safety Relay
  • Telemecanique TSXRKN82F PLC Rack Chassis
  • Mitsubishi R16CPU PLC CPU Module
  • OMRON C500-PS223-E Power Supply Module
  • Siemens 3VL4731-1DC36-0AA0 Circuit Breaker
  • Siemens 7ML5201-0EA0 Ultrasonic Level Transmitter
  • OMRON NQ3 NQ5 Touch Panel HMI
  • OMRON CJ1W-AD081-V1 Analog Input Module
  • OMRON NJ301-1100 Machine Automation Controller
  • B&R X20BC00G3 EtherCAT Bus Controller
  • Schneider ATV212HD22N4S Variable Speed Drive
  • B&R 8B0C0320HW00.002-1 Power Supply Module
  • Mitsubishi OSA105S2A Incremental Rotary Encoder
  • Pilz 777514 PNOZ XV3P Safety Relay
  • Gould AS-884A-111 Modicon 884 Controller
  • Siemens 6SC6130-0FE00 SIMODRIVE Control Card
  • Omron CV500-PS221 PLC Power Supply Module
  • ABB CM577-ETH AC500 PLC Ethernet Module
  • Omron NX-SIH400 Safety Input Unit NX Series
  • Omron NJ501-1300 Machine Automation Controller
  • Siemens 3VT8563-2AA03-2KA2 Molded Case Breaker
  • Pilz PNOZ m1p ETH 773103 Safety Controller
  • Omron CJ1H-CPU66H-R CJ1 Series CPU Module
  • ASI ASI533-S00 PLC Module S1
  • Mitsubishi AJ71C21-S1 Serial Module
  • Keyence IX-1000 Laser Sensor Amplifier
  • Siemens 6SN1145-1AA01-0AA1 Power Module
  • Siemens 3VA2340-5HL32-0AA0 MCCB 400A
  • Mitsubishi OSA104S Absolute Encoder
  • Siemens 6ES7350-1AH03-0AE0 FM 350-1 Counter
  • Siemens 6SE7038-6EK84-1JC2 IGD8 Gate Driver
  • Eaton EASY819-AC-RC Programmable Relay
  • Omron CPM1A-40CDT-D PLC 24V DC
  • Omron NA5-12W101B-V1 12-inch Programmable Terminal
  • Siemens 6ES7331-7KF02-0AB0 Analog Input SM 331
  • Moxa PTC-101-S-SC-HV Photoelectric Converter
  • Fanuc A20B-3300-0031 CNC Control Circuit Board
  • OMRON NA5-7W001B-V1 Programmable Terminal HMI
  • Parker AH385851U002 590C DC Drive Power Board
  • ABB 3BSE040662R1 AI830A Analog Input Module
  • DOLD BF9250.01/001 Solid State Relay
  • Siemens 6ES7331-7KF02-0AB0 SIMATIC S7-300 SM 331
  • ABB 07AC91 I6 GJR5252300R3101 Advant Controller 31
  • Schneider HMIST6500 Touch Screen HMI
  • Phoenix IL PN BK DI8 DO4 2TX-PAC Bus Coupler
  • NLTECH NL8060AC21-21D 8.4 inch LCD Display
  • Mitsubishi A2NCPU-P21 CPU Module A2NCPUP21
  • 1841-PL1-B-LH-ES Pressure Controller
  • Mitsubishi GT2512-STBA GT2512-STBD HMI
  • Cosel PJA600F-24 24V 600W Power Supply
  • B&R X67DM1321 Digital Mixed Module
  • Fanuc A16B-1310-0010 Power Supply Unit
  • Festo VABF-S4-1-V2B1-C-VH-20 Vacuum Generator
  • Mitsubishi A3ACPUP21 A3ACPU-P21 CPU
  • Mitsubishi Mazak PD14B-1 Power Supply
  • Siemens 6SY7000-0AC80 Module
  • PILZ 774400 PDZ Safety Relay
  • Mitsubishi A1SX81 Digital Input Module
  • Asyst Gasonics R94-1163 Controller 112671
  • Cincinnati Milacron 3 545 1000A Card
  • Siemens 6DD1607-0AA2 UPS Module
  • Square D 8536SCG3V02S Motor Starter
  • Siemens 6SL3100-1DE22-0AA1 Control Supply
  • Beckhoff EL9400 EtherCAT Power Terminal
  • Fanuc A16B-2202-0421 Power Supply Board
  • Turck TBEN-LG-8DIP-8DOP I/O Block
  • Euchner MGB-L1B-PNA-L-121861 Safety Switch
  • Pilz 772170 PNOZ M EF 1MM Safety Expansion
  • Mitsubishi AY51 MELSEC-A Output Module
  • Advantech AMAX-5056-A 8-Channel Digital Output
  • NXP MC912D60ACPV8 16-Bit MCU 60KB Flash
  • Omron C500-PS223-E SYSMAC PLC Power Supply Unit
  • Balluff BNI0047 BNI PBS-302-101-Z001 Profibus Module
  • Siemens 6SN1118-0DM31-0AA0 Regulation Card
  • Bently Nevada 9200-02-01-10-00 Sensor
  • Omron C500-PS223-E Power Supply Unit
  • Cognex COG-VC5-120-000 Vision Controller
  • ABB P-HC-BRC-40000000 Bridge Controller
  • Mitsubishi AJ71E71N-B5T PLC Module
  • Phoenix PSI-REP-PROFIBUS/12MB 2708863
  • Siemens 6SL3210-5BE31-8UV0 Converter
  • ABB CI868K01-eA 3BSE048845R2 Module
  • Honeywell S7999D1006 Touch Screen
  • Keyence CA-CHX10U Repeater Unit
  • Keyence VT5-W07 Touch Screen HMI
  • Keyence KV-8000 PLC CPU
  • Siemens 7MH4900-3AA01 Weighing Module
  • Omron C200HS-CPU01-E Programmable Controller
  • CD22-35AM12 Inductive Sensor
  • Mitsubishi A2NCPUR21-S1 PLC CPU
  • Siemens 6ES7331-7FK02-0AB0 Analog Input
  • Schneider HMIST6500 Touch Screen HMI
  • 0970 PSL109 Module Industrial Control
  • Schneider LC1F500P7 Contactor 500A
  • Mitsubishi GT2512-STBA GT2512-STBD HMI
  • Omron NJ1019000 Machine Automation Controller
  • Siemens 6SN1112-1AC01-0AA1 Power Module
  • Eaton AE16KNS0AB Bimetallic Overload Relay
  • ABB 3bse036456r1 Ai825 Analog Input 4 Ch
  • Fuji Electric 7MBR50SB120-50 IGBT Module
  • Schneider XPSMC32ZP Safety Relay
  • Siemens 3VL4740-2AA36-0AA0 Circuit Breaker
  • ABB PharpSFan03000 Mpsiii Fan System Monitor
  • Honeywell DPCB21010002 IRTP131 PCB
  • Siemens 6ES7214-1HG40-0XB0 CPU 1214C
  • Siemens 6ES7350-1AH03-0AE0 FM 350-1
  • PILZ PNOZ mm0.1p 772001 Safety Relay
  • E2V EVX12DS130AGC 12DS130 Module
  • Siemens 3RT5066-6AB36 Contactor
  • HIRSCHMANN RS20-0800T1T1SDAEHC09.1.00 Switch
  • Q4XTILAF500-Q8 Laser Range Sensor
  • OMRON CVM1-BC103 Base Unit 145752
  • CAREL RITC400001 Card
  • Eaton LZMN3-AE400 Molded Case Circuit Breaker
  • Fanuc A20B-3300-0031 Control Circuit Board
  • Siemens 6ES7450-1AP01-0AE0 S7-400 FM 450-1
  • Fanuc A90L-0001-0317/F Spindle Fan Motor
  • Schneider TM262L10MESE8T Logic Controller