The Leybold 850-400-G1 is a high-performance industrial vacuum pump module designed for demanding applications requiring reliable and efficient vacuum generation. It is suitable for use in semiconductor manufacturing, packaging, research and development laboratories, and other industrial processes where a clean, stable vacuum is essential.
Product Type: Industrial vacuum pump module
Pumping Speed: 400 m³/h (approx. 111 l/s)
Ultimate Pressure: 10⁻² mbar (0.01 mbar)
Motor Power: 8.5 kW
Operating Voltage: 380 V, 3-phase, 50 Hz
Weight: 300 kg
Dimensions (L x W x H): 1200 x 800 x 1000 mm
Certifications: CE, ISO 9001
Applications: Semiconductor fabrication, vacuum packaging, R&D labs, industrial processing

The 850-400-G1 is engineered for continuous operation in industrial environments. Its robust construction ensures long-lasting performance with minimal maintenance. The high pumping speed of 400 m³/h allows rapid evacuation of large chambers, while the ultimate pressure of 10⁻² mbar is suitable for many industrial vacuum processes. The integrated motor with 8.5 kW power ensures efficient energy use, and the compact dimensions (800 x 400 x 300 mm for some variants) facilitate integration into existing systems.
This vacuum pump is used in semiconductor manufacturing for wafer handling and thin-film deposition, in packaging for vacuum sealing and degassing, in research laboratories for high-vacuum experiments, and in industrial processes such as vacuum drying and distillation.



