Leybold CM330 Combination Vacuum Gauge Controller
The Leybold CM330 (also known as the Combitron CM330) is a combination vacuum gauge controller designed for continuous pressure monitoring from rough vacuum to high vacuum. It interfaces with passive Pirani (Thermovac) and cold cathode (Penningvac) sensors, providing a single output that spans the entire measurement range. The controller is rack-mountable or tabletop and features both analog needle and digital displays.
Technical Specifications
Measurement Channels: 3 channels (typically 2 Pirani + 1 cold cathode)
Measurement Range: 1000 mbar to 10⁻⁹ mbar (depending on connected sensors)
Power Supply: 115V / 230V AC, 50/60 Hz
Analog Outputs: 0-10V or logarithmic outputs for recorder or PLC
Relay Outputs: Built-in relay contacts for pressure-dependent switching (interlocks)
Compatible Sensors: Thermovac (Pirani): TTR 211, TTR 216; Penningvac (Cold Cathode): PTR 225
Automatic Range Switching: Seamless transition between Pirani and cold cathode readings
Design: Rack-mountable or tabletop, analog needle display or digital segments (depending on version)
Full-Range Vacuum Measurement
The CM330 automatically switches between the Pirani sensor (for higher pressures) and the cold cathode sensor (for high vacuum) to provide a continuous pressure reading across the entire range. This eliminates the need for manual range selection. The controller includes safety interlocks that protect the cold cathode sensor by ensuring it only powers on when the pressure is sufficiently low. The large, easy-to-read display allows real-time monitoring of pump-down cycles and process pressures.
Application Domains
The CM330 is used in industrial coating systems for monitoring roughing to high-vacuum sputtering, in mass spectrometry for vacuum interlock safety, in vacuum furnaces for controlling heating elements and gas backfilling based on pressure thresholds, and in semiconductor R&D for small-scale lab systems requiring reliable decentralized vacuum monitoring.
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