Welcome to the Industrial Automation website!

Product
Article
NameDescriptionContent
HONG  KANG
E-mail  
Password  
  
Forgot password?
  Register
HOME ⊙ ZYGO ⊙ ZYGO ZMI 2000 System Displacement Measuring Interferometer Systems
当前位置：

ZYGO ZMI 2000 System Displacement Measuring Interferometer Systems

来源: | 作者:FAN | 发布时间 :2025-08-01 | 8 次浏览: | Share:
ZYGO ZMI 2000 System Displacement Measuring  Interferometer Systems
Displacement Measuring Interferometry improves positioning accuracy.  Zygo’s ZMI 2000 is the industry’s top performing Displacement Measuring Interferometer (DMI) System offering the highest resolution, the highest velocity, and lowest data age uncertainty for real time position control.  Zygo, a world-class interfero metric metrology company, supports you at all levels of design, engineering and manufacturing.  Zygo works as an extension of your research, engineering and  manufacturing teams in providing metrology solutions.

Performance Benefits of the ZMI 2000

• Positioning accuracy – Velocity and time dependent errors are eliminated.  All axes of motion are synchronized to an uncertainty of ≤1.7 ns.
•Overlay accuracy – λ/2048 resolution(0.31 nm) with 2 pass interferometers for excellent overlay and alignment capability.
• System throughput – Slew rates of 2.1 m/s with 2 pass interferometers enabled by the 20
MHz heterodyne split frequency
ZMI 2000 Systems are found in the most demanding feedback control applications:
• Lithography tools: optical steppers and scanners,e-beam and laser mask writers.
•Mask, wafer and LCD inspection and measurement tools, CD-SEM’s.
• Process equipment, memory repair tools.

Integration Benefits of the ZMI 2000 for real-time position control

•Reduce heat, cost and ESD sensitivity, improved electrical isolation, and minimal package size
Fiber optic cables are used on both the reference and measurement legs.
•Reduce cost in backplane space requirements
The ZMI 2002 offers two axes of interferometry on a single 6U VME board.
•Reduced design costs with simplified integration time – The measurement boards are fully programmable through the interface bus (VME or ISA), or the P2 interface.
•Reduced cost of integration – Standard hardware interfaces for up to 7.7 MHz P2 data rates for up to 16 axes.  Easily expanded to accommodate more axes at the same rates.
The ZMI 2000 as a Metrology System Unparalleled performance and flexibility.  All of the performance benefits of the ZMI 2000 with the following integration options:
• ZMI Systems Chassis with PCI-VME for processor speed real-time data,
• ZMI Systems Chassis with serial or GPIB interface for more cost effective solutions,
• ZMI PC for integration into an ISA slot.
ZMI 2000 Systems are in use in Standards Labs worldwide for applications in measurement and calibration of high resolution and high frequency mechanical motions:
• Piezo transducer calibration,
• Linear Scale calibration,
• Rotary Scale calibration,
• AFM stage calibration.

The ZMI 2000 System Laser Head

The laser source may be the single most critical component of the Displacement Measuring Interferometer.  To control and assure laser head quality, Zygo manufactures our own laser tubes.
The proprietary tube design, combined with a state-of-the-art assembly and test facility, provides for a highly reliable laser head with:
• > 50,000 hour lifetime,
• Longest basic warranty at 18 months,
• Extended warranties of up to 5 years,
• Up to 8 axes of interferometry on a single head,
• Multiple head synchronization.


ZMI 2000 System Integration Features

• Optical power monitor for the laser head output,
and measurement board input.
• Built in laser head diagnostics.
• Position, time, and velocity, all available independently on the P2, or VMEbus.
• Programmable synchronization signal.
• Measurement boards can be used in any standard 6U VME or ISA backplane.

The ZMI 2000 System technology combined with our world-class opto-mechanical design and manufacturing center in Middlefield, CT makes Zygo Corporation a key partner in the successful design, manufacture, and integration of your real-time position control systems.

Model Supplement

ZYGO 4104C Measurement Electronic Board


  • GE IS230PCAAH1B Core Analog I/O Module
  • GE IS230PCAAH1A core analog I/O module
  • Alstom vajh13yf1001aba - Automatic Trip Relay 220-250 V
  • ALSTOM Servo Inverter Type:ALSPA MV 1007-IT - - 3.0 kW
  • ALSTOM Cegelec Interface Modnet 1 / MB+ Fbk Mbp S1/S - Interface Module
  • Alstom Input / Output Card I/O Module SA44647.A - Module
  • Alstom Plug-in card Input/Output module SA44650.C - Module
  • ALSTOM Adjustment Module Keypad Alspa MV1000 - Keypad
  • Alstom Operating module Keypad Alspa MV1000 - Keypad
  • Alstom Plug-In Input/Output Module Sa 45629.B - Module
  • ALSTOM Adjustment Module Keyboard Alspa MV1000 - Keyboard
  • ALSTOM Control Set - 15 V 029.069642/26472/1011 - Voltage regulator
  • Alstom Input/Output Card Module SA44650.C - Module
  • Alstom Input / Output Card I/O Module - Module
  • Alsthom Alstom Plug-In Input/Output Module SA41630 B - Module
  • ALSTOM Servo Inverter Type: ALSPA MV 1007-IT - - 3.0 kW
  • Alstom Plug-In Input/Output I/O Module SA44647.A - Module
  • Alstom Plug-In Input/Output Module Sa 45629.B - Module
  • Alstom Plug-in card Input/Output module SA46623.B - Module
  • ALSTOM Control Module Keyboard Alspa MV1000 - Keyboard
  • Alstom Plug-In Input/Output Module SA46623.B - Module
  • Alstom Plug-In Input/Output Module SA44650.C - Module
  • Alstom Plug-In Input/Output Module SA43610.E - Module
  • Alstom Insertion Card Input / Output Module SA43610.E - Module
  • Alsthom Alstom Plug-In Input/Output Module SA41630 B - Module
  • Alstom Plug-In Input/Output I/O Module - Module
  • Alstom Plug-In Input/Output Module SA46623.B - Module
  • Alstom Plug-in card Input/Output I/O module SA44647.A - Module
  • Alstom Plug-in card Input/Output I/O module SA44647.A - Module
  • Alstom Plug-in card Input/Output module SA 45629.B - Module
  • ALSTOM Alspa VF Inverter Type : VF 4004b - - 1.5 Kw
  • Alstom Plug-In Input/Output Module SA46617.B - Module
  • Alstom PS 431 - Control Unit
  • Alstom Plug-In Input/Output Module Sa 46624.A - Module
  • Alstom Plug-In Input/Output Module SA44650.C - Module
  • Alstom Plug-In Input/Output Module SA43610.E - Module
  • ALSTOM Alspa MV1000 Frequency Type : Alspa MV1032 - - 15 Kw
  • Alstom Input/Output Card Module SA46617.B - Module
  • Alstom Input/Output Card Module Sa 45629.B - Module
  • Alstom Input/Output Card Module SA46623.B - Module
  • ALSTOM Servo-Converter Type : ALSPA MV 1007-IT - - 3.0 Kw
  • ALSTOM Frequency Type : ALSPA MD2000 - 43-400 (49-460)
  • ALSTOM Servo-Converter Type : ALSPA MV 1007 - - 3.0kW
  • Alstom PS 431 - Control
  • ALSTOM Alspa Cegelec Guide Value Transmitter 029.087.176/98N115099109 - Transmitter
  • Alstom Input/Output Card Module Sa 46624.A - Module
  • ALSTOM Control Set - 15 V 029.069642/26472/1011 - Voltage regulator
  • ALSTOM Alspa Module Control Set 029.111.890/27347/1018 - Module
  • ALSTOM Alspa Module Control Set 029.063.255/25443/1044 - Module
  • ALSTOM Alspa Cegelec Module Control Set 029.063.292/25943/1008 - Module
  • ALSTOM Microverter D 4-8/500/029.130.005 - Inverter
  • Alstom ISTAT M233 M233X2GUYECAL0A - Measurement unit M233X2GUYECAL0A NEW
  • ALSTOM Alspa Cegelec Guide Value Transmitter 029.087.176/98N115099109 - Transmitter
  • Alstom Input/Output Module SA 46624.A - Plug-in card
  • ALSTOM Cegelec Interface Modnet 1 / MB + Fbk - Mbp S1/S
  • ALSTOM MAE 00-11 - 8 Channel isolated analog i/o termination panel LC11-13 24118b
  • Alstom MMLG01 137945N - Test block electric panel 715209M T&D protection and control
  • ALSTOM Mae 00-11 - Channel Isolated Analog I/O Terminal Panel LC11-13 24118b Al
  • CONVERTEAM S20X4262/50 / S20X426250 - Module
  • CONVERTEAM MV530A4C1A / MV530A4C1A - Inverter
  • CONVERTEAM C100/5302 / C1005302 - Module
  • CONVERTEAM 20X4355B1L / 20X4355B1L - (new without box)
  • CONVERTEAM GM0020002 / GM0020002 - Module
  • CONVERTEAM P111-6052 / P1116052 - Module
  • Alstom PS 431 - Controller
  • ALSTOM Type : Alspa BC 32 - Brake Chopper Unit
  • ALSTOM Alspa MV500 SE23400075/MV502A4C1A - - 0.75kW Inverter
  • Alstom M30-Tx200 DIN931 - Hexagon screw stamped 8A B screw GE Alstom SW 46
  • Alstom Sa 46624.A - Plug-In Input/Output Module
  • ALSTOM Adjustment Module Keyboard Alspa MV1000 - Keyboard
  • Alstom PA20397/2186-03-H01 - Circuit Board
  • Alstom KBCH12001H12MEL 228633J - Relay Differential KBCH120
  • Alstom MMLG01 137945N - TestBlock Electric Panel 715209M T&D Protection & Control
  • Alstom KBCH12001H12MEL 228633J - Differential Relay KBCH120
  • Alstom MMLG01 137945N - Test Block Electrical Panel 715209M T&d Protection &
  • ALSTOM Mae 00-11 - 8 Channel Isolated Analog I/O Terminal Panel LC11-13 24118b
  • Alstom KBCH12001H12MEL 228633J - Differential Relay KBCH120 and extended warranty
  • Alstom MMLG01 137945N - Test Block Electrical Panel 715209M T & D Protection & De
  • Alstom DFI-110-0340F - DFI1100340F Diagnostic Flame Indicator
  • KCGG142 KCGG14201D20EEA - 287362J
  • ALSTOM MAE 00-11 - Channel isolated analog i/o termination panel LC11-13 24118b Al
  • KCGG122 KCGG12201DEED - 463055L and extended warranty
  • Alstom MMLG01 137945N - Test Block Electrical Panel T&D Protection & Control
  • Alstom 3FAFA5100A - Voltage Sensor TN7 112 003 Alstom T&D Protection & Control
  • Used ALSTOM PIB100 F 3BEB0169 - Board
  • Alstom Keypad - Alspa MV 1000
  • Alstom MMLG01 137945N - Test Block Electrical Panel 715209M T & D Protection &
  • ALSTOM PS441 - Overcurrent protection - Used
  • Alstom Power 2506305 - Circuit Board
  • ALSTOM PS431 - CONTROL UNIT
  • ALSTOM MV502S2B1A - 1 pc X Frequency Drive Alspa MV500
  • Alstom 3VAFS5500A - Voltage Sensor TN7105 002 Alstom T&D Protection & Control
  • ALSTOM MV507A2D1A - 1 pc X Frequency Drive Alspa MV500
  • KCGG KCGG12201L20EED - 655002M and extended warranty
  • ALSTOM TRVP059753000 - AGC3X-007 BLOCK ENCODER TRVP05975400
  • KCGG KCGG14202l20EEB - 654833M and extended warranty
  • Alstom 029 204 538 - cegelec Interface RS422/RS232 Alspa MV 1000
  • ALSTOM PIB100 F - 3BEB0169 Board
  • CONVERTEAM 8321-4002 / 83214002 - (new with box)
  • CONVERTEAM MVAJ14D1GA0774A / MVAJ14D1GA0774A - Relay
  • CONVERTEAM 8178-4002 / 81784002 - (new with box)
  • CONVERTEAM QTWIE2-VD4A / QTWIE2VD4A - (new with box)
  • CONVERTEAM A48DI-40DX-B7/95 / A48DI40DXB795 - Meter
  • CONVERTEAM V96LC/0-400RPM / V96LC0400RPM - Meter
  • CONVERTEAM A72DI-5-40X4/95 / A72DI540X495 - Meter
  • CONVERTEAM 8321-4002 / 83214002 - Module
  • CONVERTEAM 029.081-942 / 029081942 - Module
  • CONVERTEAM V96LC/0-600RPM / V96LC0600RPM - Meter
  • CONVERTEAM 20X4524B1L / 20X4524B1L - Module
  • CONVERTEAM EGS3C-ST11001 / EGS3CST11001 - Module
  • CONVERTEAM S8503-4001 / S85034001 - Module
  • CONVERTEAM MVAX12B1DA0752A / MVAX12B1DA0752A - Relay
  • CONVERTEAM 11P408ND8268/7 / 11P408ND82687 - (new without box)
  • CONVERTEAM MVAJ26L1BB0502A / MVAJ26L1BB0502A - Relay
  • CONVERTEAM C100/5120 / C1005120 - Module
  • CONVERTEAM D-984-0578 / D9840578 - Board
  • CONVERTEAM GDS1017-4001 / GDS10174001 - Enhancement Card
  • CONVERTEAM MBC101F1AD0761A / MBC101F1AD0761A - Module
  • CONVERTEAM GDS1006-4001 / GDS10064001 - Keypad
  • CONVERTEAM 25X8521/10 / 25X852110 - Module
  • CONVERTEAM VSELC1011A1AB / VSELC1011A1AB - (new without box)
  • CONVERTEAM RTS-13060102-R / RTS13060102R - Relay
  • CONVERTEAM LGPG-11101P55LEF / LGPG11101P55LEF - Relay
  • CONVERTEAM 203-399 / 203399 - Module
  • CONVERTEAM MV516A4C1 / MV516A4C1 - Inverter
  • CONVERTEAM SW867577-007 / SW867577007 - Module
  • CONVERTEAM MCGG22D1CD0503D / MCGG22D1CD0503D - Relay
  • CONVERTEAM MV506A4C1A / MV506A4C1A - Inverter