Welcome to the Industrial Automation website!

Product
Article
NameDescriptionContent
HONG  KANG
E-mail  
Password  
  
Forgot password?
  Register
HOME ⊙ ZYGO ⊙ ZYGO ZMI 2000 System Displacement Measuring Interferometer Systems
当前位置：

ZYGO ZMI 2000 System Displacement Measuring Interferometer Systems

来源: | 作者:FAN | 发布时间 :2025-08-01 | 210 次浏览: | 🔊 Click to read aloud ❚❚ ▶ | Share:
ZYGO ZMI 2000 System Displacement Measuring  Interferometer Systems
Displacement Measuring Interferometry improves positioning accuracy.  Zygo’s ZMI 2000 is the industry’s top performing Displacement Measuring Interferometer (DMI) System offering the highest resolution, the highest velocity, and lowest data age uncertainty for real time position control.  Zygo, a world-class interfero metric metrology company, supports you at all levels of design, engineering and manufacturing.  Zygo works as an extension of your research, engineering and  manufacturing teams in providing metrology solutions.

Performance Benefits of the ZMI 2000

• Positioning accuracy – Velocity and time dependent errors are eliminated.  All axes of motion are synchronized to an uncertainty of ≤1.7 ns.
•Overlay accuracy – λ/2048 resolution(0.31 nm) with 2 pass interferometers for excellent overlay and alignment capability.
• System throughput – Slew rates of 2.1 m/s with 2 pass interferometers enabled by the 20
MHz heterodyne split frequency
ZMI 2000 Systems are found in the most demanding feedback control applications:
• Lithography tools: optical steppers and scanners,e-beam and laser mask writers.
•Mask, wafer and LCD inspection and measurement tools, CD-SEM’s.
• Process equipment, memory repair tools.

Integration Benefits of the ZMI 2000 for real-time position control

•Reduce heat, cost and ESD sensitivity, improved electrical isolation, and minimal package size
Fiber optic cables are used on both the reference and measurement legs.
•Reduce cost in backplane space requirements
The ZMI 2002 offers two axes of interferometry on a single 6U VME board.
•Reduced design costs with simplified integration time – The measurement boards are fully programmable through the interface bus (VME or ISA), or the P2 interface.
•Reduced cost of integration – Standard hardware interfaces for up to 7.7 MHz P2 data rates for up to 16 axes.  Easily expanded to accommodate more axes at the same rates.
The ZMI 2000 as a Metrology System Unparalleled performance and flexibility.  All of the performance benefits of the ZMI 2000 with the following integration options:
• ZMI Systems Chassis with PCI-VME for processor speed real-time data,
• ZMI Systems Chassis with serial or GPIB interface for more cost effective solutions,
• ZMI PC for integration into an ISA slot.
ZMI 2000 Systems are in use in Standards Labs worldwide for applications in measurement and calibration of high resolution and high frequency mechanical motions:
• Piezo transducer calibration,
• Linear Scale calibration,
• Rotary Scale calibration,
• AFM stage calibration.

The ZMI 2000 System Laser Head

The laser source may be the single most critical component of the Displacement Measuring Interferometer.  To control and assure laser head quality, Zygo manufactures our own laser tubes.
The proprietary tube design, combined with a state-of-the-art assembly and test facility, provides for a highly reliable laser head with:
• > 50,000 hour lifetime,
• Longest basic warranty at 18 months,
• Extended warranties of up to 5 years,
• Up to 8 axes of interferometry on a single head,
• Multiple head synchronization.


ZMI 2000 System Integration Features

• Optical power monitor for the laser head output,
and measurement board input.
• Built in laser head diagnostics.
• Position, time, and velocity, all available independently on the P2, or VMEbus.
• Programmable synchronization signal.
• Measurement boards can be used in any standard 6U VME or ISA backplane.

The ZMI 2000 System technology combined with our world-class opto-mechanical design and manufacturing center in Middlefield, CT makes Zygo Corporation a key partner in the successful design, manufacture, and integration of your real-time position control systems.

Model Supplement

ZYGO 4104C Measurement Electronic Board


  • OEMAX NX-CPU700P PLC Controller
  • OEMAX NX-BASE10 PLC Backplane
  • OEMAX NX-AO4C 4-Channel Analog Output Module
  • OEMAX NX-AI8C 8-Channel Analog Input Module
  • OMACO GF0-57CQD-002 Industrial Control Module Precision Automation
  • OPTIMATE OP-620 Industrial Automation Control Module
  • OPTIMATE OM1510 Industrial Control Module Performance Solution
  • OPTO 22 SNAP-IDC5D Digital Input Module for Automation
  • OPTO 22 SNAP-AITM-2 Thermocouple Module
  • ORIENTAL A4722-9215KM Cooling Fan
  • ORIENTAL MOTOR 2GK180K Gearhead Specifications
  • OSRAM DULUX L 36W 840 865 Lamp Specification
  • OTHER FLASH SERIES 2 Memory Module Data
  • OVATION 1X00458H01 Control Module Specification
  • Emerson Ovation 1C31157G02 Event Sequence Module
  • Emerson Ovation 5X00070G04 Analog Input Module
  • OXIDE 0020-31655 Industrial Controller
  • ABB FAU810 C87-11006 / C10-12010 Flame Analyzer
  • Pilz PSSu E F 4DI Safety Input Module
  • Pepperl+Fuchs KFD2-UFC-1.D Frequency Converter
  • Pacific Scientific VDE0530-S1 Stepper Motor
  • Pacific Scientific 6410-001-N-N-N Stepper Drive
  • PACIFIC LA23GCKC-1Y Servo Motor Reliable Automation Motion Solution
  • PACIFIC LA23GCKX-P500A Servo Motor Advanced Industrial Motion Control
  • PACIFIC LA23GCKC-P500A High Precision Servo Motor for Industrial Automation
  • Pacific Scientific E32NCHA-LNN-NS-00 Hybrid Stepper Motor
  • Pacific Scientific SCE903A3-002-01 Servo Drive
  • Pacific Scientific 6410-024-N-N-N Stepper Motor Drive
  • PALCLEAN JD-BXG Industrial Control Module
  • Panametrics 704-673-20 Ultrasonic Flow Meter
  • Panasonic MSD043A1XX AC Servo Driver
  • Panasonic KX-FT936CN Plain Paper Fax Machine
  • Panasonic DL-1109CWS Electric Bidet Toilet Seat
  • PACIFIC SCIENTIFIC 33VM52-000-29 LDA-196-1000CE Servo Motor Controller
  • PACIFIC LA23GCKC-1G Linear Actuator Specifications
  • PACIFIC PC3406AI-001-E Stepper Controller Manual
  • PACIFIC SCE904AN-002-01 Servo Drive Analysis
  • PACIFIC 6445-001-K-N Digital Servo Drive Details
  • PACIFIC SCIENTIFIC R43HCNA-R2-NS-VS-00 Motor Data
  • Pacific Scientific H32NCHA-LNN-NS-00 Hybrid Motor Performance
  • ABB DSAI130DK01 3BSE020828R1 Analog Input Module
  • Parker 466966-0001-3820 Industrial Component Data
  • PARKER ZETA6104 Microstepping System
  • PARKER COMPAX 2500S/F3 Servo Drive Manual Details
  • PARKER CX-DH Indexer Drive Technical Specifications
  • PARKER 6K8 Motion Controller Features and Specifications
  • PARKER EVM32-BASE I/O Module Base Technical Specification
  • ABB Pb PN-112718 Digital Input Module
  • Pb PN-45734 PN-73899 Industrial Automation Module
  • Control Techniques Pb PN-40856 Industrial Control Module
  • Pb PN-104412 4002910956 Industrial Control Module
  • Siemens Pb PN-41513 Industrial Ethernet Module
  • Pelco PA30-0065-00-A1 PTZ Decoder Module
  • Pentek FILTER 3F11 800000919 Pleated Filter Cartridge
  • Pepperl+Fuchs RSD-TI-EX8 Temperature Input Module
  • PERITEK AC7-00712-1113 Industrial Interface Module
  • PFEIFFER EVR116 Vacuum Control Module
  • Pepperl+Fuchs RSD-CI-EX8 Hazardous Area Interface Module
  • PEPPERL+FUCHS 2108HAT Intrinsic Safety Barrier Module
  • Philips 958481320201 PROC+ Processing Unit
  • Philips 958481321300 PSB Power Supply Board
  • Philips 958481321220 PD208 Power Module
  • PHILIPS 958481321200 PD216 Control Module
  • PHILIPS 958481320201 PROC PLUS Control Module
  • Philips 958481320400 PIF Interface Module
  • Philips 958481320100 LCB Control Board
  • PHILIPS 958481223220 Industrial Control Module
  • PHILIPS 958481223223 Industrial Control Module
  • PHILIPS 958481321300 Industrial Control Module
  • PHILIPS SCM040 Digital Output Synchronization Module
  • PHILIPS DSI020 Data Storage Interface Module
  • PHILIPS OPM010 Optoelectronic Control Module
  • PHILIPS VBM010 Industrial Automation Module
  • PHILIPS VBM030 Turbine Supervisory Instrumentation
  • PHILIPS PR1613 Industrial Control Module
  • PHOENIX PATG1/23 1013847 Ground Terminal Block
  • Phoenix Contact IB ST 24 AI 4/SF Analog Input
  • Phoenix Contact OPC5315-004-AB Industrial PC
  • Phoenix Contact UMK-SE11.25-1 Side Element
  • PHOENIX 2961192 Relay Module
  • PHOENIX IB ST ZF 24 AI 4/SF Analog Input Module
  • Phoenix Contact PLC-BSC-24DC/21 Relay Base
  • Phoenix Contact UK6N Feed-Through Terminal Block
  • Phoenix Contact UK4-T Disconnect Terminal Block
  • Phoenix UK3N Screw Terminal Block
  • Phoenix QUINT-PS-100-240AC/10 Power Supply
  • Phoenix QUINT PS-100-240AC/24DC/10 Power Supply
  • Phoenix UT 6-HE SI Surge Protection Terminal Block
  • Phoenix UT 4-MTD Feed-through Terminal Block
  • Phoenix UT 4-HE SI Surge Protection Terminal Block
  • Phoenix IBS 24BK-I/O-T Bus Coupler
  • Phoenix Contact HDFK4 High-Current Terminal Block
  • PHOENIX ST-SI-UK4 Fuse Terminal Block
  • PHOENIX FLMC10BASE-T/FO G850 Fiber Media Converter
  • PHOENIX CONTACT QUINT-PS-100-240AC/24DC/40 Power Supply
  • PHOENIX CONTACT QUINT-DIODE/40 Redundancy Module
  • Phoenix Contact 2884208 Wireless I/O MUX
  • Photonetics 3646 HE 1540 Tunable Laser Source
  • PI C-663.12 Mercury Multi-Axis Step Motor Controller
  • PI C-663.10 Mercury Step Motor Controller
  • Pillar CB6687-2L Industrial Communication Board
  • Pilz DE-106712 A.F.051.5/01 Safety Module
  • Pilz 680003 Safety Relay Module Set
  • Pilz 301140 PNOZ X3 Safety Relay
  • Pilz P1U-1NB Safety Relay
  • Pioneer PM3398B-6-1-3-E Power Supply
  • Pioneer Magnetics PM3326B-6-1-2-E Power Supply
  • Pioneer Magnetics HYRSP-1500-56 Power Supply
  • Pioneer Magnetics PM3398B-6-1-3-E Power Supply
  • Pioneer Magnetics PM3328BP-6 Power Supply
  • Potter & Brumfield SDAS-01-7Y2S1024 Relay
  • Powec PMP10.48 SIC High-Efficiency Rectifier
  • Powerbox PU200-31C Industrial DC-DC Converter
  • PIONEER MAGNETICS PM3398BP-6-1-3-E Power Supply Module
  • PIONEER MAGNETICS PM1253AL-6-3-Z03 Power Supply Module
  • Powerex PD411811 Rectifier Diode Module
  • Power-One MAP55-1024 AC-DC Power Supply
  • ProSoft MVI56-MDA4 ControlLogix Multi-Protocol
  • POLYSPED PRD2-200 Industrial Drive Module
  • P-OPEN P-OPEN-P4-150 PAC-OP150 Operator Panel
  • ABB Processor 958481321210 350211080320 Rugged CPU
  • ABB Processor 958481320201 350211080460 Safety CPU
  • ABB Processor 958481321200 350211080320 CPU Module
  • ABB Processor 958481321220 350211080320 CPU Module
  • ABB Processor 958481320100 350211080090 CPU Module
  • Pro-Face PL5901-T42-24V HMI Touch Panel
  • PROFIBUS PB3-VME-1-E V1.2.2 Interface Card
  • PROMESS 850040060P Force Displacement Monitor