Alcatel-Annecy 5150 CP Turbo Vacuum Pump with Ceramic Bearings – Complete Guide

The Alcatel-Annecy 5150 CP Turbo Vacuum Pump, identified by part number 116771, is a high-performance turbomolecular pump designed for demanding high-vacuum applications. This pump is part of the renowned CP (Ceramic Pump) series, which features advanced ceramic bearing technology for exceptional durability, low vibration, and clean, oil-free operation. It is widely used in semiconductor manufacturing, thin-film coating, analytical instrumentation, and research laboratories where ultra-high vacuum and contamination-free environments are essential.

At the core of the 5150 CP is a multi-stage turbomolecular pumping mechanism consisting of a series of rotating and stationary blades. The rotor is supported by ceramic hybrid bearings – silicon nitride balls with steel races – which offer superior hardness, lower thermal expansion, and higher speed capability compared to conventional steel bearings. These bearings operate with an oil-free lubrication system, typically using a small amount of grease that is sealed for life, ensuring that no hydrocarbon contamination reaches the vacuum chamber.

The pump delivers a nominal pumping speed of 50 L/s for nitrogen (at 10⁻⁶ mbar), with a compression ratio exceeding 10¹¹ for nitrogen and 10⁹ for hydrogen. The ultimate pressure (partial pressure) is below 10⁻¹⁰ mbar when properly baked and backed by a suitable roughing pump. The high compression ratio ensures efficient removal of light gases, which is critical for processes involving hydrogen or helium.

Operation speed is rated at 90,000 RPM, with a motor power of approximately 200 W. The pump is equipped with a built-in frequency converter that accepts a wide input voltage range (100-240 VAC, 50/60 Hz) and provides soft start and variable speed control. The converter includes comprehensive protection features, including over-temperature, over-current, and under-voltage protection, as well as a speed monitoring output for system integration.

The pump's mechanical design emphasizes compactness and ease of integration. It weighs approximately 8 kg and measures 160 mm x 160 mm x 250 mm. The inlet flange is an ISO-K DN 100 or CF 100, and the exhaust port is a KF 25. The pump includes a vent port for controlled atmospheric venting and a purge gas port for corrosive applications.

Cooling is achieved through natural convection and an optional forced-air fan, with an operating temperature range of +5°C to +40°C. The pump can be mounted in any orientation, although vertical operation with the inlet facing upward is recommended for optimal performance. The ceramic bearings ensure a long maintenance interval, typically exceeding 30,000 hours of operation.

Management and monitoring are supported through a standard RS-232 interface, allowing integration with vacuum system controllers. The pump reports rotational speed, power consumption, temperature, and bearing condition. An analog output provides a 0-10 V signal proportional to speed for external monitoring.

Compliance includes CE, UL, and RoHS. The pump is also certified for semiconductor equipment safety standards (SEMI S2/S8). Its vibration level is exceptionally low – below 0.1 µm/s – making it suitable for use with sensitive electron beam instruments.

Typical applications include vacuum systems for SEM/TEM, mass spectrometry, sputter coating, and load-lock chambers. The 5150 CP is also used in research systems requiring ultra-high vacuum for surface science and thin-film growth.

In summary, the Alcatel-Annecy 5150 CP Turbo Vacuum Pump with ceramic bearings offers superior performance, reliability, and cleanliness, making it a top choice for critical vacuum applications across multiple industries.