ZYGO Laser Interferometer Accessory Guide OMP-0463AM

3. Installation, Debugging, and Application Cases

(1) Installation and debugging process

The manual may provide a "step-by-step installation guide" for key accessories, taking "installation on a transmissive sphere" as an example:

Mechanical fixation: Fix the transmitted spherical surface on the interferometer output port through a dedicated bracket, ensuring that the bracket is level (calibrated with a level, deviation ≤ 0.1 °);

Optical alignment: Fine tune the pitch/roll of the transmission sphere by adjusting the frame, so that the center of the reference wavefront coincides with the interferometer optical axis (observe the "center spot symmetry" through MetroPro software, deviation ≤ 5%);

Accuracy verification: Measure the standard spherical mirror and compare the "measured curvature radius" with the "standard value". The deviation should be ≤ 0.1% (for example, if the standard value is 100mm, the measured value should be between 99.9-100.1mm).

(2) Typical application cases

The manual may help users understand the value of accessories through case studies of "scene+accessory configuration+effect". The following case studies are speculated:

Case 1: Measurement of semiconductor wafer flatness

Host: GPI Pro (12 inches);

Accessories: 12 inch transmission plane, programmable vacuum stage, active isolation stage;

Effect: Achieve full aperture measurement of 8-inch wafers, with flatness repeatability ≤ 0.05nm RMS and measurement efficiency of 1 wafer per 2 minutes.

Case 2: Measurement of Step Height in MEMS Devices

Host: NewView 7000;

Accessories: 50X Mirau objective lens, 10 μ m step height standard component, high-speed image acquisition card;

Effect: The measurement accuracy of step height is ± 0.01 μ m, and it supports MEMS dynamic step change monitoring (sampling rate 10Hz).

4. Maintenance and warranty of accessories

Maintenance cycle and method: For example, the transmission plane needs to be cleaned every 3 months (gently wiped with a lint free cloth dipped in isopropanol), and the vibration isolation table needs to be calibrated for levelness every 6 months;

Warranty information: Zygo original parts warranty period (such as 1 year for optical parts and 2 years for mechanical parts), warranty scope (free replacement for non-human damage), repair process (such as applying for repair through Zygo customer support).

Model may be required

ZMI-2002 8020-0211-1-J

8010-0105-01

PC200  CS1115-801-346

ZMI-4004

7702  8070-0102-01X

7702 8070-0102-35

ZMI-2002 8020-0211

4104C

HSSDC TO HSSDC2 CABLE 1115-800-056

HSSDC2 TO HSSDC2 CABLE 1115-800-055

1115-801-346

8010-0105-02 ZMI-501