Welcome to the Industrial Automation website!

NameDescriptionContent
HONG  KANG
E-mail  
Password  
  
Forgot password?
  Register
当前位置:

How to unpack and install the Zygo Mark II 4-inch interferometer system?

来源: | 作者:FAN | 发布时间 :2025-10-28 | 755 次浏览: | 🔊 Click to read aloud ❚❚ | Share:

How to unpack and install the Zygo Mark II 4-inch interferometer system?

System composition and technical parameters

(1) System core module

Mark II host: The core function is to collect real-time interference patterns, including a 632.8nm circularly polarized output HeNe laser (replaceable on site), laser power supply, beam splitter spatial filter (BDSF), CCTV camera, and a sealed optical cabin to protect precision optical components. It is equipped with accessory sockets (for installing transmission components) and a remote control box (connected by cables).

Video monitor: Display real-time interference patterns collected by the host, 9-inch diagonal screen, equipped with a universal bracket, can be placed on the desktop or installed above the host through a dedicated lifting bracket, supporting flexible adjustment of viewing angle to optimize observation effect.

Optional VP-2 video printer: uses specially coated paper to provide hard copy recording of interference fringe patterns for easy archiving and analysis.

(2) Key technical parameters

Specific parameters of the module

Mark II host aperture: 4-inch diameter, capable of continuous zoom up to 2/3 inch (6x zoom range); Alignment: Automatic alignment and fast stripe acquisition system; Video output: 520 lines/60Hz (EIA RS170 standard) or 625 lines/50Hz (CCIR standard), 2:1 interlaced scanning, BNC interface, synchronous signal including horizontal and vertical; Dimensions: 648mm x 533mm x 203mm (length x width x height); Weight: 34kg; Power supply: 115 ± 10VAC/60Hz, 110 ± 10VAC/50Hz, or 230 ± 10VAC/50Hz, 50W without monitor, 85W with monitor (single-phase)

Video monitor screen: 9-inch diagonal; Interface: BNC type; Synchronization: Built in; Video input: Supports 75 Ω or high impedance terminals; Power supply: 115 ± 10VAC/60Hz, 300mA; Dimensions: 311mm x 229mm x 241mm (length x width x height); Weight: 6.35kg

Laser Radiation Safety Regulations

Laser characteristics and risk warning: The host emits visible red light, with no harmful invisible radiation. The radiation power is less than 1 milliwatt (1/1000 watt), the wavelength is 632.8nm, and the irradiation time exceeds 0.25 seconds. It cannot burn or drill holes, but it is necessary to avoid direct viewing of the beam and strong light reflection to prevent eye damage. Skin contact is not harmful.

Classification and compliance standards: Complies with ANSI Z136.1-1980 standard and belongs to "low-power Class II laser"; Comply with the regulations of the National Center for Devices and Radiological Health (NCDRH) under the US Food and Drug Administration (FDA) effective August 2, 1976 (for laser products manufactured after August 1, 1976), and meet the DHHS radiation performance standards (21CFR Chapter 1, Subcapter J).

Safe operation and identification

Control usage: Only operate control buttons, adjust parameters, or execute procedures as specified in the manual. Violation may result in hazardous radiation exposure.

Key components: The front panel of the host has a green radiation emission indicator light (which lights up when turned on and indicates Class II radiation), and a "BEAM ATTEN." beam attenuation knob (pull out to turn off the laser, push in to turn on); The laser head and power supply need to use Zygo original accessories, and replacement should follow the process outlined in Service Manual SP-0038 to ensure compliance with federal radiation standards.

Identification location: There are certification and patent labels (US Patent No. 4201473) and model serial number labels on the back of the host; At the top (when installing the aperture converter), there is a sign that reads "Laser radiation is emitted from this aperture to avoid exposure"; After opening the lid, there are labels such as "Damaged Seal Invalid Warranty", "High Voltage Warning", "Laser Radiation When Opening, Avoid Direct Exposure" (see Figures 3-1 to 3-3).

Unpacking and installation setup

(1) Installation environment and equipment placement

Stability requirement: The host is recommended to be placed on an optical workbench (such as a granite or honeycomb air cushion platform), with a horizontal beam emitted from the right side of the equipment, making it easy to place the test piece and auxiliary components on the same platform and flexibly adapting to various testing scenarios.

Installation flexibility: In addition to the standard horizontal beam setup, the host can be installed with vertical upward/downward light output; The remote control box and movable monitor enable the host position to be optimized independently of the testing setup, suitable for laboratory prototype development, production testing, and other scenarios. It can also support multiple sets of testing setups on one host through the use of a MUX cube or mobile host.

(2) Unpacking and Inspection

System inventory: The packaging box should include the host, video monitor with bracket, lifting bracket and accessories (hardware, monitor power cord, BNC coaxial line), "Interference Pattern Interpretation and Evaluation Manual" (including mechanical parallelogram), acquisition target, "Operation and Maintenance Manual OMP-0055", "Service Manual SP-0038"; If the packaging box is damaged, please contact the shipping party immediately.

Unpacking operation: Unpacking in a clean and dry area requires two people to lift the main unit from the bottom of both ends and remove it. It is forbidden to pull or tug on the outer shell; Before removing all items, do not discard reusable packaging boxes (it is recommended to keep them for return); Cushioning materials such as foam shall be used to prevent shock during handling to avoid severe impact.

(3) Connection and switch settings

Cable connection: Connect the BNC cable according to Figure 4-1 (host monitor) and Figure 4-2 (host monitor printer); The default factory setting for the CCTV camera jumper in the host is "output synchronization", which does not require adjustment.

Power and parameters: Insert the monitor power cord into any auxiliary power outlet on the back of the host; Confirm that the position of the "75 Ω/HI-Z" switch on the monitor is correct (see Figure 4-1/4-2); The host power cord should be connected to a power source that meets the requirements of the electrical label on the back. It is recommended to use a three hole socket with neutral grounding.

Operation process

(1) Preparation before operation

Safety prerequisite: It is necessary to read Chapter 3 "Laser Radiation Safety Information" before operating the host.

Equipment preheating: After turning on, the host and monitor need to be preheated for at least 30 minutes to ensure stable performance.

Familiarity with controls: Clearly define the functions of each button on the host and remote control box (such as the power switch, beam attenuation knob, and accessory socket tilt adjustment knob on the host; the fast stripe acquisition switch and zoom/focus adjustment switch on the remote box).

(2) Core operational steps

Boot startup

Confirm that the front beam attenuation knob of the host is pushed in, turn on the power switch, and the laser should start within 30 seconds. If it does not start, refer to the troubleshooting section of Service Manual SP-0038; There is a slow melting fuse on the back of the host (see Chapter 6 "Fuse Specifications" for the model).

Remote control box operation (see Figure 5-4)

Quick FAS switch: Center off, left dial "ALIGN" (alignment mode, hold for about 2 seconds, monitor displays aligned spot and automatic alignment crosshair), right dial "VIEW" (observation mode, hold for about 2 seconds, display interference pattern).

Zoom adjustment: With the center closed, it can achieve 6x continuous magnification (corresponding to aperture diameter for planar testing and f-number for spherical/cylindrical testing).

Focus adjustment: Center off, operate at 6x (or close to 6x) zoom, hold down the left and right keys, observe the edges of the test piece or small objects inserted into the beam (such as pen tips) until the outline is clearest (the stripes are not bent at the edges and are sharply truncated), do not directly focus on the stripes (their width is determined by the illumination intensity and needs to be adjusted by the monitor brightness/contrast).

Installation and alignment of transmission components

Universal installation: For transmissive components (flat or spherical), hold the metal edge in hand (do not touch the glass), loosen the spring clip screw of the accessory socket, insert the short metal pin of the component into the socket slot, and then rotate clockwise until it clicks into place. Finally, tighten the spring clip screw.

Alignment of transmission plane: After turning on the remote box, dial "ALIGN" for about 2 seconds, and the monitor will display a crosshair and two light spots (the bright spots are reflected by the uncoated surface of the transmission plane). Adjust the two tilt knobs of the accessory socket to make the bright spots coincide with the center of the crosshair.

Transmission sphere alignment: Remote box dial "ALIGN" for about 2 seconds, the monitor displays a crosshair and a light spot (reflected by the transmission element surface), adjust the tilt knob to make the light spot coincide with the center of the crosshair; Place the test piece (or 4% reflectivity concave convex surface) at the focal point of the converging beam of the transmissive element, and move the test piece so that the curvature center coincides with the focal point of the transmissive sphere (the bright spot converges at the center of the crosshair and disappears); Switch the "VIEW" mode. If the bull's-eye pattern displayed by the monitor is offset, use the X/Y knob of the 3/5 axis bracket to center (do not move the tilt knob of the host), and then focus through the Z axis knob (push the movement direction of the observation ring on the back of the bracket: move the Z axis clockwise when moving toward the center, and counterclockwise when moving outward). Finally, adjust the X/Y knob at the socket end of the transmission element to control the number of stripes to 0-7 (the best observation effect).

Installation and alignment of aperture converter

Preliminary preparation: Remove the transmission component from the accessory socket of the host, place a flat reflector with two axis brackets (reference or transmission plane) in the laser light path (about 45.7cm away from the host), and align the reflector using the "transmission plane alignment" process (this alignment state needs to be maintained).

Converter installation: Remove the transmission element from the converter, insert its short metal pin into the socket slot of the host accessory, push it in and rotate it to fix it, tighten the locking screw, align the tilt knob of the host accessory socket with the converter, and remove the flat reflector.

Component alignment: Install the transmission component on the converter, use the two tilt knobs at the aperture end of the converter (do not touch the host socket knob), and follow the "Transmission Component Alignment" process; If a transmissive sphere is installed on the converter, additional alignment checks are required: the test piece is placed at the focal point of the converging beam. In "VIEW" mode, if the target center pattern is offset, use the converter socket knob to adjust it. If the aperture is not full of the screen (vignetting), adjust it through the Zygo 3/5-axis bracket X/Y, and optimize the focusing method according to the spherical plane alignment. The final number of stripes is controlled between 0-7.

Interference pattern evaluation and geometric distortion inspection

Interference pattern evaluation: It is necessary to quantify the deviation between the test fringes and the ideal fitting pattern (usually expressed as a fraction of the ideal fringe spacing). It is recommended to refer to the "Interference Pattern Interpretation and Evaluation Manual AB-0001". Zygo provides real-time interference pattern evaluation equipment, and information can be requested as needed.

Geometric distortion inspection: Preheat the equipment for 30 minutes (the roundness change of the image during the preheating period is normal and does not need to be adjusted), remove the accessory socket transmission element, place a reference plane with two axis brackets (4% or 90% reflectivity) 12 inches away from the host, and align it with Quick FAS; Insert vertically arranged parallel thin lines (or adjustable parallelograms provided in the user manual) into the beam near the reference plane, zoom to 6x and restore to 1x, observe the monitor line pattern (which can be photographed by a video printer), and if there is non ideal distortion (such as aspect ratio deviation), refer to Service Manual SP-0038 for correction, or contact Zygo service department; If there is a ZAPP/PC system, the host signal can be directly evaluated (its circular mask should display as a perfect circle, and the host CCTV needs to be adjusted to fill the aperture image with the mask).

(3) Operation precautions

Do not touch the glass surface of optical accessories with bare hands. If touched without professional cleaning experience, do not clean it yourself (soft coating only has a reflectivity of 90% and is easily damaged); When not in use, the optical accessories should be returned to the protective box.

When installing optical accessories, avoid excessive force that may cause strain or damage to the components; When clamping attachments, do not tighten the screws too tightly to prevent deformation of the reference surface.

The accessories are lightly clamped with nylon screws on the two axis bracket. If the bracket tilts backwards, the accessories may fall off, so the bracket should not be moved or tilted when clamping the accessories.

The host needs to be used along the axis defined by the automatic alignment system, and the alignment accuracy must be ensured in the alignment mode, otherwise there may be no stripe display in the observation mode; The intensity of the two interfering beams needs to be close to obtain the best stripe contrast.

The distance between the test piece and the host should be moderate, shortening the optical path length of the last reflector and reducing the cavity length to reduce wavefront distortion caused by unstable air paths.

Maintenance and accessory management

(1) Daily maintenance

Appearance cleaning: clean the blue shell with a soft cloth dipped in a mild furniture polish, and clean the gray painted parts with a mild spray cleaner.

Component lubrication: The spring positioning pin after the socket clip of the host accessory needs to be lubricated with Lubriplate or similar lithium based bearing grease.

Optical component care: The main optical cabin is sealed, and the internal components are dust-proof; The attached optical components should be stored properly in a protective box to reduce the need for cleaning and the risk of damage; Clean only when the components are visibly dirty, prioritize cleaning the local area rather than the entire surface.

Optical cleaning process (to be strictly followed to avoid damage)

Cleaning materials (or equivalent): Orvus WA paste (KWW Warehouse Chemicals), distilled water, spectral grade methanol (Fisher Scientific A-408), spectral grade acetone (Fisher Scientific A-19), Multilith pad (Multigraphics # 200-847), lens paper (Aldine Papers 8 x 9 inches), vinyl gloves (Laminaire # 607).

Preparation: Before cleaning the special coating, check the protective instructions, remove the jewelry on your hands, thoroughly wash your hands, wear gloves, use clean filtered air to blow away loose particles on the optical surface, and check for residual pollutant types.

Specific cleaning procedures (methanol/acetone is toxic and flammable, caution is required; do not rinse the optical surface with flowing liquid to prevent damage to the seal/bonding area; consumables cannot be reused):

Loose particles on uncoated surface: Fold the lens paper into a 2-inch square pad, dip it in methanol (without dripping water), gently scratch the circular surface from the center outwards to wipe (change the pad every time), and wipe the square/rectangular surface from one end to the other.

Loose particles on the coating surface: Fold the Multilith pad in half four times, dip it in acetone (without dripping water), and wipe it according to the corresponding shape.

Semi solid pollutants on coated/uncoated surfaces: Dip the Multilith pad in Orvus solution (without dripping water) and gently wipe the contaminated area (according to the corresponding shape, do not scratch); Dip the pad in distilled water to wipe off Orvus; Dip the pad in methanol again to absorb residual moisture; Finally, change the pad and dip it in acetone, slowly wipe it in one direction and "lift it off" to finish (without dragging it to the edge), repeat until there are no traces of acetone; If there are still stains, the entire process needs to be repeated.

Special Warning: Zygo does not recommend cleaning high reflectivity soft coatings on transmission/reference components. If cleaning is necessary, the risk of damage must be borne by the user.

Maintenance of video monitor: no user serviceable parts, the shell is cleaned with a damp cloth or mild spray cleaner, and the screen is wiped with a commercial glass cleaner or a special cleaner for computer screen, and the fault needs to be sent back to Zygo for maintenance.

Laser head replacement: The laser head can be used normally for many years without any faults. If the output power is too low or the vibration stops, please refer to the "Service Manual SP-0038" for replacement and use Zygo original accessories.

(2) Accessories Management

Recommended spare parts list (Table 6-1): Classified by replacement probability (Class A: May need to be replaced, Class B: Less need to be replaced but recommended for backup to reduce downtime, Class C: Very rarely need to be replaced, optional backup), including laser, CCTV camera, diffuser assembly, motor drive PCB, laser power supply, beam splitter spatial filter, etc., with part numbers, descriptions, and quantities listed.

Fuse specifications (Table 6-2): All are 250V 3AG slow melting fuses, with main units of 1.5A in the United States, 0.75A in Europe, and 1.5A in Japan; accessories: Global 1A; laser power supply: Global 0.25A.

  • GE AT868 AquaTrans Ultrasonic Flow Transmitter
  • ABB PFSA107-Z42 DTU Stressometer Digital Transmission Unit
  • ABB PFSA240 3BSE073476R1 Roll DC Supply Unit
  • Fanuc A16B-2201-0320 CPU MAIN Board
  • Pilz 475650 PNOZ 1 Safety Gate Relay
  • Omron NSH5-AL001 HMI Interface Unit
  • Allen-Bradley 1756-OF8 Analog Output Module
  • Siemens 6SL3210-1SE31-0AA0 Power Module 45kW
  • PMA TB45-110-00000-000 Temperature Limiter
  • PSR-SCP-24DC-ESD-5x1-1x2-300 Safety Relay
  • Pilz 774140 PZE 9 Safety Relay
  • Telemecanique TSXRKN82F PLC Rack Chassis
  • Mitsubishi R16CPU PLC CPU Module
  • OMRON C500-PS223-E Power Supply Module
  • Siemens 3VL4731-1DC36-0AA0 Circuit Breaker
  • Siemens 7ML5201-0EA0 Ultrasonic Level Transmitter
  • OMRON NQ3 NQ5 Touch Panel HMI
  • OMRON CJ1W-AD081-V1 Analog Input Module
  • OMRON NJ301-1100 Machine Automation Controller
  • B&R X20BC00G3 EtherCAT Bus Controller
  • Schneider ATV212HD22N4S Variable Speed Drive
  • B&R 8B0C0320HW00.002-1 Power Supply Module
  • Mitsubishi OSA105S2A Incremental Rotary Encoder
  • Pilz 777514 PNOZ XV3P Safety Relay
  • Gould AS-884A-111 Modicon 884 Controller
  • Siemens 6SC6130-0FE00 SIMODRIVE Control Card
  • Omron CV500-PS221 PLC Power Supply Module
  • ABB CM577-ETH AC500 PLC Ethernet Module
  • Omron NX-SIH400 Safety Input Unit NX Series
  • Omron NJ501-1300 Machine Automation Controller
  • Siemens 3VT8563-2AA03-2KA2 Molded Case Breaker
  • Pilz PNOZ m1p ETH 773103 Safety Controller
  • Omron CJ1H-CPU66H-R CJ1 Series CPU Module
  • ASI ASI533-S00 PLC Module S1
  • Mitsubishi AJ71C21-S1 Serial Module
  • Keyence IX-1000 Laser Sensor Amplifier
  • Siemens 6SN1145-1AA01-0AA1 Power Module
  • Siemens 3VA2340-5HL32-0AA0 MCCB 400A
  • Mitsubishi OSA104S Absolute Encoder
  • Siemens 6ES7350-1AH03-0AE0 FM 350-1 Counter
  • Siemens 6SE7038-6EK84-1JC2 IGD8 Gate Driver
  • Eaton EASY819-AC-RC Programmable Relay
  • Omron CPM1A-40CDT-D PLC 24V DC
  • Omron NA5-12W101B-V1 12-inch Programmable Terminal
  • Siemens 6ES7331-7KF02-0AB0 Analog Input SM 331
  • Moxa PTC-101-S-SC-HV Photoelectric Converter
  • Fanuc A20B-3300-0031 CNC Control Circuit Board
  • OMRON NA5-7W001B-V1 Programmable Terminal HMI
  • Parker AH385851U002 590C DC Drive Power Board
  • ABB 3BSE040662R1 AI830A Analog Input Module
  • DOLD BF9250.01/001 Solid State Relay
  • Siemens 6ES7331-7KF02-0AB0 SIMATIC S7-300 SM 331
  • ABB 07AC91 I6 GJR5252300R3101 Advant Controller 31
  • Schneider HMIST6500 Touch Screen HMI
  • Phoenix IL PN BK DI8 DO4 2TX-PAC Bus Coupler
  • NLTECH NL8060AC21-21D 8.4 inch LCD Display
  • Mitsubishi A2NCPU-P21 CPU Module A2NCPUP21
  • 1841-PL1-B-LH-ES Pressure Controller
  • Mitsubishi GT2512-STBA GT2512-STBD HMI
  • Cosel PJA600F-24 24V 600W Power Supply
  • B&R X67DM1321 Digital Mixed Module
  • Fanuc A16B-1310-0010 Power Supply Unit
  • Festo VABF-S4-1-V2B1-C-VH-20 Vacuum Generator
  • Mitsubishi A3ACPUP21 A3ACPU-P21 CPU
  • Mitsubishi Mazak PD14B-1 Power Supply
  • Siemens 6SY7000-0AC80 Module
  • PILZ 774400 PDZ Safety Relay
  • Mitsubishi A1SX81 Digital Input Module
  • Asyst Gasonics R94-1163 Controller 112671
  • Cincinnati Milacron 3 545 1000A Card
  • Siemens 6DD1607-0AA2 UPS Module
  • Square D 8536SCG3V02S Motor Starter
  • Siemens 6SL3100-1DE22-0AA1 Control Supply
  • Beckhoff EL9400 EtherCAT Power Terminal
  • Fanuc A16B-2202-0421 Power Supply Board
  • Turck TBEN-LG-8DIP-8DOP I/O Block
  • Euchner MGB-L1B-PNA-L-121861 Safety Switch
  • Pilz 772170 PNOZ M EF 1MM Safety Expansion
  • Mitsubishi AY51 MELSEC-A Output Module
  • Advantech AMAX-5056-A 8-Channel Digital Output
  • NXP MC912D60ACPV8 16-Bit MCU 60KB Flash
  • Omron C500-PS223-E SYSMAC PLC Power Supply Unit
  • Balluff BNI0047 BNI PBS-302-101-Z001 Profibus Module
  • Siemens 6SN1118-0DM31-0AA0 Regulation Card
  • Bently Nevada 9200-02-01-10-00 Sensor
  • Omron C500-PS223-E Power Supply Unit
  • Cognex COG-VC5-120-000 Vision Controller
  • ABB P-HC-BRC-40000000 Bridge Controller
  • Mitsubishi AJ71E71N-B5T PLC Module
  • Phoenix PSI-REP-PROFIBUS/12MB 2708863
  • Siemens 6SL3210-5BE31-8UV0 Converter
  • ABB CI868K01-eA 3BSE048845R2 Module
  • Honeywell S7999D1006 Touch Screen
  • Keyence CA-CHX10U Repeater Unit
  • Keyence VT5-W07 Touch Screen HMI
  • Keyence KV-8000 PLC CPU
  • Siemens 7MH4900-3AA01 Weighing Module
  • Omron C200HS-CPU01-E Programmable Controller
  • CD22-35AM12 Inductive Sensor
  • Mitsubishi A2NCPUR21-S1 PLC CPU
  • Siemens 6ES7331-7FK02-0AB0 Analog Input
  • Schneider HMIST6500 Touch Screen HMI
  • 0970 PSL109 Module Industrial Control
  • Schneider LC1F500P7 Contactor 500A
  • Mitsubishi GT2512-STBA GT2512-STBD HMI
  • Omron NJ1019000 Machine Automation Controller
  • Siemens 6SN1112-1AC01-0AA1 Power Module
  • Eaton AE16KNS0AB Bimetallic Overload Relay
  • ABB 3bse036456r1 Ai825 Analog Input 4 Ch
  • Fuji Electric 7MBR50SB120-50 IGBT Module
  • Schneider XPSMC32ZP Safety Relay
  • Siemens 3VL4740-2AA36-0AA0 Circuit Breaker
  • ABB PharpSFan03000 Mpsiii Fan System Monitor
  • Honeywell DPCB21010002 IRTP131 PCB
  • Siemens 6ES7214-1HG40-0XB0 CPU 1214C
  • Siemens 6ES7350-1AH03-0AE0 FM 350-1
  • PILZ PNOZ mm0.1p 772001 Safety Relay
  • E2V EVX12DS130AGC 12DS130 Module
  • Siemens 3RT5066-6AB36 Contactor
  • HIRSCHMANN RS20-0800T1T1SDAEHC09.1.00 Switch
  • Q4XTILAF500-Q8 Laser Range Sensor
  • OMRON CVM1-BC103 Base Unit 145752
  • CAREL RITC400001 Card
  • Eaton LZMN3-AE400 Molded Case Circuit Breaker
  • Fanuc A20B-3300-0031 Control Circuit Board
  • Siemens 6ES7450-1AP01-0AE0 S7-400 FM 450-1
  • Fanuc A90L-0001-0317/F Spindle Fan Motor
  • Schneider TM262L10MESE8T Logic Controller