ASML SMC Pneumatic Valve Manifold Assembly 4022.472.5315

Assembly Description

The ASML SMC Pneumatic Valve Manifold Assembly, cross‑referenced with part numbers 4022.472.5315 and 4022.630.4104, is a compact, pre‑assembled unit that controls the distribution of compressed air for wafer and reticle handling operations. It combines four solenoid valves, a pressure regulator, and a manifold base in a single footprint, reducing installation time and eliminating leak‑prone tubing connections.

Valve Configuration

The manifold contains four 3‑port, 2‑position solenoid valves with a 24 V DC coil. Each valve has a flow capacity of Cv = 0.18 and can operate at pressures from 1 to 8 bar. The valves are independently actuated via a 12‑pin M12 connector, which also provides feedback signals (valve status and pressure sensor output). An integrated pressure sensor with a range of 0‑10 bar and 0.5 % accuracy monitors the supply pressure.

Performance Specifications

• Valve Type: SMC VXZ series, 3‑way, normally closed

• Actuation: 24 V DC ±10 %, 2.5 W per coil (inrush 3.0 A)

• Response Time: On < 10 ms, Off < 15 ms

• Max Operating Pressure: 10 bar

• Flow Rate (at 6 bar): 200 L/min (ANR) per valve

• Pressure Sensor Output: 4‑20 mA, loop powered

• Ambient Temperature: 5 °C to 50 °C

• Protection Class: IP65 (with mating connector)

Application in Lithography

This manifold is typically used to control the vacuum grippers that pick and place reticles, as well as the air‑bearing cushions that levitate the wafer stage. Each valve can be individually programmed to provide sequential actuation, enabling smooth transfer motions. The integrated pressure sensor allows the controller to verify that the required pressure is present before each operation, preventing mis‑picks and reticle damage.

Installation and Plumbing

Mount the manifold on a DIN rail or directly to the machine frame using the four M4 mounting holes. Connect the main air supply to the 1/4” NPT inlet port. The outlet ports are 1/8” NPT, each labelled with a number (1‑4) corresponding to the solenoid channel. Use PTFE tape on all threads and tighten to 7‑8 Nm. The electrical connection is a standard M12 12‑pin socket; wire according to the pin‑out diagram supplied with the assembly.

Commissioning and Testing

After installation, perform a functional test by applying 24 V to each valve coil individually and listening for the click. Verify that the pressure sensor output increases linearly with the applied pressure. A leak test is mandatory: pressurize the system to 8 bar and check for pressure drop over 2 minutes – a drop of more than 0.1 bar indicates a leak. Use a soap solution to locate and fix any leaks.

Maintenance and Replacement

The manifold is maintenance‑free except for periodic cleaning of the pilot air filter (replace every 12 months). If a valve fails to actuate, first check the coil resistance (should be ~230 Ω) and the supply voltage. The entire manifold assembly can be replaced quickly; the base plate remains mounted and the new manifold slides on. Always use the specified sealing rings provided with the replacement unit. After replacement, recalibrate the pressure sensor offset using the trim pot accessible through the front cover.