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Description
ASML 4022.472.97505 ProDrive PCB Board with XP Modules – High‑Performance Motion Control
The ASML 4022.472.97505 is a ProDrive PCB board equipped with three XP modules, engineered for precise motor and actuator control in ASML lithography systems. This drive board provides high‑performance motion control for wafer stages, reticle stages, and other precision positioning applications. Its advanced design ensures smooth, accurate, and reliable operation in demanding semiconductor manufacturing environments.
Overview of the ProDrive Board
The ProDrive PCB is a high‑density motor drive and control board that integrates three independent XP modules for multi‑axis control. Each XP module provides drive electronics and feedback processing for a single motor or actuator, enabling synchronized multi‑axis motion with high precision and low latency.
Technical Specifications
Part Number: 4022.472.97505
Board Type: ProDrive PCB with 3 XP modules
XP Module Count: 3
Motor Types Supported: Brushless DC, stepper, linear
Power Supply: 48 VDC, 400 VDC (motor bus)
Communication Interface: EtherCAT, CAN
Feedback Interface: Incremental encoder, absolute encoder, resolver
Current per Axis: 10 A continuous, 20 A peak
Operating Temperature: 0 °C to 50 °C
Protection Class: IP20
Dimensions: 320 mm x 220 mm x 45 mm
Weight: 1.8 kg
XP Module Functionality
Each XP module provides integrated drive electronics, feedback processing, and safety monitoring for a single motor axis. The modules support a wide range of motor types and feedback devices.
Application Areas
This board is used in wafer stage control, reticle stage control, and inspection system positioning.
Installation and Configuration
The board is installed in the system's control rack and configured through software.
Maintenance
ASML provides support and documentation.
Compliance
The board complies with CE and RoHS standards.
Conclusion
The ASML 4022.472.97505 ProDrive PCB board provides high‑performance motion control for precision lithography systems.
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