ASML 4022.654.97871 LM 4C LPSA Power Supply

The ASML 4022.654.97871 is a laser module power supply assembly, designated LM 4C LPSA with reference SEM-I-574=9A38. This unit is designed to deliver clean, regulated DC power to laser diodes and associated control electronics in ASML lithography systems. It offers high efficiency, low ripple, and comprehensive protection features.

Electrical Specifications

• Part Number: 4022.654.97871

• Type: LM 4C LPSA (SEM-I-574 variant)

• Input Voltage: 200–240 V AC, 50/60 Hz, single phase

• Output Channels: 4 independent regulated outputs

• Channel 1: +3.3 V DC, 15 A

• Channel 2: +5 V DC, 10 A

• Channel 3: +15 V DC, 5 A

• Channel 4: +48 V DC, 8 A

• Line Regulation: ±0.1%

• Load Regulation: ±0.15%

• Ripple & Noise: < 4 mV RMS

• Efficiency: > 87% at full load

• Protection: OVP, OCP, OTP, and short-circuit protection with auto-recovery

• Cooling: Passive convection with heat sink (fan optional for high-load)

Functional Description

The unit uses a resonant LLC converter topology to achieve high efficiency and low EMI. Each output is post-regulated using low-dropout linear regulators for extra-low noise on sensitive rails. The 3.3 V and 5 V channels are designed for digital logic, while the 15 V and 48 V channels serve analog and high-power loads. The power supply includes a micro-controller that manages soft-start, output sequencing, and fault handling.

Installation and Wiring

Mount the supply on a flat metal surface for heat dissipation, using the four M4 screws. Provide sufficient spacing from other heat-generating components. Connect the AC input via a standard IEC 320 inlet with a 12 A fuse. For DC outputs, use high-quality copper cables – 14 AWG for the 48 V channel. Ensure that all output grounds are returned to the main ground point. After wiring, measure the output voltages with a multimeter before connecting to the load.

Configuration and Monitoring

The power supply can be adjusted via internal trimpots or through the optional digital interface (I²C). The ASML Power Monitor software can read output voltages, currents, and internal temperature. The unit provides a "power good" signal that goes high when all outputs are within tolerance.

Maintenance and Reliability

Periodic inspection for dust accumulation and proper ventilation is recommended. The MTBF is 80,000 hours at 25°C. No internal adjustments are required; the unit is sealed and should be returned to ASML for any repair.

Integration with Laser Systems

This power supply is compatible with ASML IR2-FIR and other laser modules. Its output voltage sequencing ensures that the laser controller and pump diodes are powered up in the correct order, preventing damage.

Environmental and Safety

Compliant with EN 61010-1, UL 60950-1, and RoHS. Operating temperature 0°C–40°C, storage -20°C–60°C. Humidity 20%–80% non-condensing.

Technical Support

ASML provides a user manual, connection diagram, and application notes. Replacement fuse and connector kits are available. For critical systems, a spare supply is recommended.

Conclusion

The ASML 4022.654.97871 LM 4C LPSA Power Supply offers stable and reliable power for laser modules, ensuring consistent performance and long service life in semiconductor manufacturing.