ASML 4022.671.23212 TCMA Thin Client Module MK2

The ASML 4022.671.23212 is a Thin Client Module (TCMA) MK2, designed to provide remote graphical user interface access to ASML PAS 5000/2500 steppers and other lithography systems. This compact, fanless device enables operators to control the stepper from a convenient location outside the cleanroom or from a central control room, improving workflow efficiency and reducing operator exposure to the fab environment.

Technical Specifications

• Part Number: 4022.671.23212

• Type: TCMA MK2 (SEM-I-786=9G11 variant)

• Processor: Intel Atom E3845 (1.91 GHz, quad-core)

• Memory: 4 GB DDR3L

• Storage: 32 GB eMMC

• Display Output: 1 x DVI-I, 1 x DisplayPort

• Network: 2 x Gigabit Ethernet (with PXE boot)

• USB: 4 x USB 2.0

• Power: 24 V DC (12–36 V input range)

• Dimensions: 200 mm x 150 mm x 30 mm

• OS: Windows Embedded Compact 7 (customized)

Functional Overview

The TCMA MK2 operates as a remote desktop client, connecting to the stepper’s host PC via a secure Ethernet link. It runs the ASML Remote Operator Interface (ROI) application, which mirrors the main console display and provides full control capability. The module also includes a built-in web server for remote diagnostics and performance monitoring. Its fanless design ensures silent operation and eliminates particulate generation.

Installation and Setup

Mount the 4022.671.23212 on a VESA-compatible monitor arm or behind a flat-panel display using the included bracket. Connect the DVI or DisplayPort cable to the monitor, and attach the Ethernet cable to the fab network. Power the unit using the supplied AC/DC adapter or from a 24 V DC cleanroom supply. During first boot, the device obtains an IP address via DHCP; configure a static IP and connect to the stepper’s host by entering its IP address in the connection manager.

Configuration and User Management

Configuration settings, including display resolution, network parameters, and auto-reconnect options, are accessible through the on-screen setup menu. The TCMA supports multiple user profiles, allowing each operator to have customized settings. Security features include TLS encryption for remote sessions and integrated certificate management. For maintenance, a service mode provides access to file transfer and system logs.

Integration with PAS Systems

This thin client module is fully compatible with PAS 5000/2500 controllers running firmware v5.0 or later. It uses the ASML Remote Protocol (ARP) for low-latency screen updates and keyboard/mouse input. The TCMA can also connect to multiple steppers simultaneously, allowing an operator to switch between machines with a single keystroke.

Reliability and Maintenance

With no moving parts, the 4022.671.23212 offers high reliability; MTBF is estimated at 100,000 hours. Maintenance consists of periodic cleaning of the enclosure vents with compressed air. Firmware updates are delivered via the Ethernet and can be performed remotely. The unit’s solid-state storage is rated for 1 million read/write cycles.

Environmental Compliance

The TCMA complies with RoHS, CE, and FCC Class B standards. It is designed for operation in office or cleanroom environments with ambient temperatures from 10°C to 40°C and humidity up to 80%.

Technical Support

ASML provides comprehensive documentation, including user manuals, quick-start guides, and network configuration examples for the 4022.671.23212. A diagnostic tool is available to test connectivity and performance. For large installations, ASML offers a central management console to deploy and monitor all thin clients.

Conclusion

The ASML 4022.671.23212 TCMA Thin Client Module MK2 is a modern, efficient solution for remote operation of PAS steppers. Its robust hardware, secure connectivity, and ease of deployment enhance operator productivity while maintaining the highest levels of system control and reliability.