ASML LISAF 3P Power Supply 4022.634.44801

Product Overview

The ASML LISAF 3P power supply, part number 4022.634.44801, is a robust three‑phase AC/DC converter designed to supply stable DC power to the illumination and laser subsystems in large‑format lithography systems. It delivers high current capacity with low ripple and includes comprehensive protection features, making it a reliable backbone for power‑sensitive applications.

Electrical Specifications

• Input: 400 V AC ±10 %, 3‑phase + neutral, 50/60 Hz, 25 A max

• Output 1: 48 V DC / 30 A (regulated, adjustable 40‑55 V)

• Output 2: 24 V DC / 10 A (isolated, regulated)

• Output 3: 5 V DC / 5 A (standby, always‑on)

• Total Output Power: 1500 W continuous

• Ripple & Noise: < 100 mV peak‑to‑peak (on 48 V output)

• Efficiency: > 92 % at full load

• Protection: Overvoltage, overcurrent, overtemperature, and input phase loss

Design and Cooling

The unit is housed in a 2U rack‑mountable chassis with forced‑air cooling using two variable‑speed fans. The power stage uses IGBT modules and a high‑frequency transformer to achieve high power density. A digital signal processor (DSP) controls the pulse‑width modulation (PWM) and monitors all voltages and currents in real time. The front panel includes a backlit LCD that displays output voltages, load currents, and fault codes.

Application in ASML Systems

The LISAF 3P supply is typically used to power the arc‑lamp ballasts or the laser diode arrays in the illumination unit. The 48 V output drives the lamp ignitor and the continuous‑wave laser pump diodes, while the 24 V output is used for cooling fans, shutters, and sensors. The standby 5 V supply ensures that the controller board remains alive even when the main outputs are switched off. The supply interfaces with the system controller via a CAN‑bus, enabling remote monitoring and adjustment of output voltages.

Installation and Wiring

Mount the power supply in a 19” rack using the supplied mounting ears. Ensure that the ambient temperature does not exceed 40 °C and that there is at least 100 mm clearance at the rear for hot air exhaust. Connect the three‑phase input through a lockable circuit breaker (rated 32 A). The DC outputs are on heavy‑duty terminal blocks; use cables with appropriate cross‑section (e.g., 10 mm² for 48 V output). Ground the chassis to the rack earth bar using a 4 mm² wire.

Start‑up and Calibration

Before applying mains power, check that all output cables are correctly terminated. Turn on the circuit breaker; the LCD will show the start‑up sequence and then display the active voltages. The output voltages can be adjusted via potentiometers inside the unit (accessible through the front panel). For precise calibration, use a DMM and adjust the 48 V output to 48.00 V ±0.05 V. The power supply also has a digital trim function via CAN‑bus; this is preferred for automated calibration.

Maintenance and Troubleshooting

Inspect the cooling fans every 3 months; clean the intake filter with compressed air. The power supply stores a fault history that can be read through the CAN‑bus. Common faults: “Phase Loss” – check the input connections; “Over Temp” – clean the heatsinks and verify fan operation. If the output voltage is out of regulation, check the feedback sense wiring (use twisted pairs). The unit is not user‑repairable; any internal failure requires replacement by an ASML service engineer.