ASML RH-PU-Mk3 Parker Power Unit 4022.631.24391

General Description

The ASML RH-PU-Mk3, manufactured by Parker and bearing part number 4022.631.24391, is a dedicated power and control unit for the reticle handler subsystem in advanced photolithography tools. This integrated assembly combines electrical power conditioning with pneumatic pressure regulation, providing the essential energy and actuation resources required to safely transport reticles between the storage cassette and the exposure stage.

Key Components

The unit houses a switched‑mode power supply that converts 230 V AC input to a stable 24 V DC output at 10 A, used to drive the handler’s motors and sensors. A precision pneumatic section includes a 5‑µm filter, a pressure regulator adjustable from 0.5 to 8 bar, and a manifold with three 2‑position solenoid valves. The valves are controlled directly by the system PLC via a 25‑pin D‑sub connector. Additionally, two analog pressure transducers provide feedback for closed‑loop pressure control.

Performance Specifications

• Input Voltage: 200‑240 V AC, 50/60 Hz, single phase

• DC Output: 24 V DC ±2 %, 10 A continuous

• Pneumatic Supply: Clean dry air (CDA) at 6‑10 bar, flow rate 200 L/min

• Regulated Pressure Range: 0.5‑8 bar, accuracy ±0.1 bar

• Valve Response Time: < 15 ms

• Protection Class: IP20, with overvoltage and short‑circuit protection

• Operating Ambient: 10 °C to 40 °C, humidity 10‑90 % non‑condensing

Integration with Reticle Handler

The RH-PU-Mk3 interfaces with the reticle handler’s motion controller via a dedicated cable harness. The 24 V supply powers the handler’s linear motors and gripper solenoids, while the pneumatic valves control vacuum pick‑up and release functions. A built‑in pressure switch monitors the vacuum level; if it drops below the setpoint, an alarm signal is sent to the main controller to prevent reticle drops. The unit also features a manual pressure‑release button for maintenance.

Installation Guidelines

Mount the unit vertically on the equipment rack using the four M6 threaded holes provided. Ensure a clearance of at least 50 mm on all sides for airflow. Connect the AC input through a filtered inlet and the DC output to the handler distribution panel using 2.5 mm² wires. The pneumatic ports are 1/4” NPT female; use PTFE tape for sealing. After installation, perform a leak test by pressurizing the system and verifying that the pressure holds for 5 minutes without decay.

Routine Maintenance

Every 6 months, replace the air filter element and check the regulator diaphragm for wear. Inspect electrical terminals for oxidation and retighten to specified torque (0.8 Nm). The unit’s diagnostic LEDs indicate power status, valve activation, and pressure faults. If the red fault LED illuminates, consult the error code table in the service manual. Firmware updates are not required for this passive electromechanical assembly.

Compatibility and Spare Parts

This power unit is compatible with all ASML reticle handlers that use the Parker RH‑PU‑Mk3 architecture, including systems with part numbers 4022.630.x and 4022.631.x variants. Spare solenoid valves and regulator kits are available under separate part numbers. Always use genuine Parker replacement components to maintain safety and performance.