ASML 37155 CCD Camera with Lens (4022.456.12463)

The ASML 37155 is a high-resolution CCD camera system, incorporating a Hitachi Kokusai KP-M1E/K-S5 sensor and a precision lens, identified by part number 4022.456.12463. This camera is used in ASML steppers for wafer alignment, reticle inspection, and overlay measurement. Its excellent sensitivity and low noise make it ideal for capturing fine alignment marks in both visible and near-infrared spectra.

Camera Specifications

• Part Number: 4022.456.12463

• Model: 37155 (with Hitachi KP-M1E/K-S5)

• Sensor Type: Interline CCD, 1/2 inch

• Effective Pixels: 640 (H) x 480 (V)

• Pixel Size: 7.4 µm x 7.4 µm

• Frame Rate: 30 fps (full resolution)

• Lens Mount: C-mount with included 50 mm focal length lens

• Aperture: f/1.4 to f/16 (manual)

• Wavelength Response: 400–900 nm

• Output: Analog composite video (BNC) and digital (LVDS)

• Power: 12 V DC, 250 mA

Optical and Mechanical Design

The camera head is compact and lightweight, with a ruggedized housing to withstand vibration. The lens is a high-NA, low-distortion design corrected for chromatic aberrations across the visible range. An optional IR-cut filter can be installed for applications requiring pure visible-light imaging. The camera provides both manual and electronic shutter control, with exposure times from 1/10000 s to 1/30 s.

Installation and Mounting

Mount the camera on the alignment bracket using the 1/4-20 threaded tripod socket or via the four M3 mounting holes. Adjust the position to center the field of view on the alignment marks. Connect the power and video cables; for digital output, use the supplied LVDS cable. The focus and aperture should be set while viewing a test target; the lens has a lock screw to maintain focus once set.

Calibration and Alignment

Calibration involves establishing the pixel-to-micron conversion factor using a calibrated reticle. The ASML alignment software provides a step-by-step wizard for camera calibration, including flat-field correction and defect pixel mapping. The camera is also used for automatic focus detection; the focus position is stored in the system recipe.

Maintenance and Cleaning

Clean the lens surface with a lens pen or microfiber cloth; never use solvents that can damage the coating. Inspect the CCD window for dust; if necessary, open the camera head in a cleanroom and use compressed air. The camera has no user-serviceable parts; in case of failure, the entire module is replaced.

Integration with Stepper Systems

The 37155 camera is fully compatible with PAS 5000/2500 and TWINSCAN alignment systems. It interfaces with the pattern recognition board, which processes the video signal to determine the mark position with sub-pixel accuracy. The camera can also be used for reticle alignment and dark-field inspection.

Environmental and Reliability

This camera operates from 5°C to 40°C and is resistant to electromagnetic interference. It complies with CE and FCC standards. MTBF is estimated at 40,000 hours, mainly limited by the CCD’s lifespan.

Technical Support

ASML provides a camera user manual, alignment target examples, and troubleshooting guides. Replacement lenses and cables are available as spare parts. For advanced image processing, the camera driver SDK can be obtained.

Conclusion

The ASML 37155 CCD Camera with Lens is a proven imaging solution for high-accuracy alignment and inspection tasks in semiconductor lithography. Its robust hardware and flexible integration options ensure reliable operation in production environments.