The ASML 4022.654.97873 is a high-reliability laser module power supply, designated LM 4C LPSA, designed to provide multiple stabilized voltage outputs for ASML solid-state lasers and associated control electronics. This compact unit delivers precise current and voltage regulation with low ripple and fast transient response, ensuring stable laser operation.
Part Number: 4022.654.97873
Type: LM 4C LPSA (Laser Power Supply Assembly)
Input Voltage: 200–240 V AC, 50/60 Hz, single phase
Output Channels: 4 independent regulated outputs
Channel 1: +5 V DC, 10 A
Channel 2: +15 V DC, 5 A
Channel 3: -15 V DC, 3 A
Channel 4: +48 V DC, 8 A (pulsed load)
Line Regulation: ±0.1%
Load Regulation: ±0.2%
Ripple & Noise: < 5 mV RMS
Efficiency: > 85%
Overvoltage/Overcurrent Protection: Yes, with auto-restart
Cooling: Forced air with temperature-controlled fan
The power supply uses switch-mode technology with synchronous rectification to achieve high efficiency and compact size. Each output is independently monitored and controlled by a dedicated microcontroller. The 48 V channel is specifically designed to drive the laser diode pump array, with a peak current capability of 15 A for short durations. The unit communicates with the laser controller via a CAN bus, reporting voltage, current, and temperature status.
Mount the power supply inside the system cabinet using the four M4 screw holes. Ensure adequate clearance for airflow (50 mm front and rear). Connect the AC input to a filtered inlet with a fuse holder. Use appropriately sized wires for DC outputs – minimum 14 AWG for the 48 V channel. Ground the chassis to the system ground. After wiring, verify that all output voltages are within tolerance under no-load conditions before connecting the load.
The power supply can be configured via DIP switches or through the digital interface. Set the output voltage trim for each channel if needed. The onboard memory stores fault logs, including overcurrent and overtemperature events. A front-panel LCD displays real-time output values. Remote monitoring is possible using the ASML Power Manager software.
Regularly inspect the cooling fan for dust buildup and ensure the air intake is clear. The electrolytic capacitors have a typical life of 10 years; replacement is recommended after 8 years of continuous operation. The MTBF of this unit is rated at 60,000 hours at 25°C ambient. Fuse replacement should only be performed with identical types.
This power supply is specifically designed for ASML IR2-FIR and other solid-state laser modules. Its outputs match the exact requirements of the pump diodes and control electronics. The CAN interface allows synchronization of the 48 V pulse with the Q-switch trigger, minimizing energy waste.
The unit complies with EN 61010-1 and UL 60950-1 safety standards. It is RoHS compliant. Operating temperature range is 0°C to 50°C, with derating above 40°C. The enclosure provides IP20 protection.
ASML supplies a detailed installation manual, schematic diagrams, and a calibration guide. Service kits, including capacitors and fuses, are available. On-site repair services are offered for critical installations.
The ASML 4022.654.97873 LM 4C LPSA Power Supply is a reliable and efficient power source for advanced laser modules. Its multiple outputs, precise regulation, and robust protection features make it an essential component for stable lithography laser performance.



