ASML 4022.471.88172 – PAAC 450/20 PRODRIVE (3‑Unit Set)
The 4022.471.88172 is a set of three identical PAAC (Piezoelectric Amplifier and Control) modules, designated PRODRIVE 450/20, designed to drive high‑voltage piezoelectric actuators in ASML lithography systems. Each unit provides up to 450V peak‑to‑peak and 20 A of current, enabling rapid and precise movement of optical elements and fine‑stage mechanisms.
Amplifier Design
Each amplifier employs a fully differential linear topology with MOSFET output stages, achieving a slew rate of 150 V/µs and a bandwidth of 5 kHz (‑3 dB). The input accepts ±10V differential signals from the system controller. An internal current sensor (Hall effect) provides real‑time feedback for closed‑loop force control.
Electrical Specifications (per unit)
Output voltage: 0 to ±450V (bipolar)
Output current: ±20 A continuous, ±30 A peak (1 ms)
Gain: 45 V/V (fixed)
Input impedance: 10 kΩ differential
Power supply: ±600V DC (isolated, external)
Protection: overcurrent, overtemperature, short‑circuit
Thermal and Packaging
Each module is enclosed in a forced‑air cooled aluminum chassis with integrated heat sink fins. A built‑in fan (12V DC, 0.5A) activates above 50°C case temperature. The set of three units is mounted on a common baseplate for synchronized operation, with inter‑unit communication via a ribbon cable for phase‑matched outputs.
Control Interface
A 15‑pin D‑sub connector provides analog input, enable signal, and diagnostic output (voltage/current monitor). The module also includes a digital status line that indicates fault conditions. LED indicators: green (normal), yellow (limit), red (fault).
Performance Characteristics
Linearity:<0.05% of full scale
Output noise:<5 mV RMS (20 Hz – 20 kHz)
Current ripple:<10 mA RMS
Settling time to 0.1%:<100 µs (for step input)
Integration and Compatibility
These PRODRIVE units are designed to replace previous PAAC 400/15 models, offering higher current capability and improved thermal efficiency. They are compatible with the ASML PAS 5000/2500 and NXT series when used with appropriate adapter cables. The set requires a dedicated ±600V DC power supply (not included) rated at 3 kW.
Installation and Safety
Mount the baseplate on a vibration‑damped surface. Ensure at least 50 mm clearance around each unit for airflow. Connect the outputs using high‑voltage shielded cables (rated >600V). Always discharge the output capacitor before handling the load. The enable input must be driven high (5V) to activate the amplifier.
Maintenance and Calibration
Annual offset and gain calibration using a precision voltage divider is recommended. The units store calibration data in an internal EEPROM. Fan filters should be cleaned every 3 months. If a fault LED illuminates, consult the error code table in the service manual.
Conclusion
The ASML PAAC 450/20 PRODRIVE set delivers the high power and speed necessary for dynamic actuation in state‑of‑the‑art lithography, ensuring optimal image quality and overlay performance.
