BRONKHORST ASL‑100F Mass Flow Controller – ASML 4022.666.71411 / 4022.489.75508
The Bronkhorst ASL‑100F is a thermal mass flow controller (MFC) specifically configured for ASML lithography applications, identified by ASML part numbers 4022.666.71411 and 4022.489.75508, as well as valve assembly VLV‑I‑780=8C22. It provides accurate and stable gas flow regulation for processes such as purge, chemical vapor deposition, and chamber pressure stabilization.
Sensor and Valve Technology
The MFC employs a capillary thermal sensor with a platinum resistance bridge, measuring mass flow independent of gas temperature and pressure variations (within stated ranges). The control valve is a normally‑closed proportional solenoid with a stainless steel plunger, offering fast response (time constant < 200 ms) and high repeatability (<0.2% of setpoint).
Flow Specifications
Full‑scale flow range: 100 sccm (N₂ equivalent) – other gases calibrated upon request
Accuracy: ±0.5% of reading + ±0.1% full scale
Repeatability:<0.2% of full scale
Response time: < 1 second to final value
Pressure coefficient: 0.02% / bar (typical)
Electrical and Communication
Power supply: 15‑24V DC, 2.5W max. Analog setpoint 0‑5V or 4‑20 mA (selectable). Analog output 0‑5V for flow measurement. Digital communication: RS‑232 (Modbus) and optional Profibus. Connector: 9‑pin D‑sub (male).
Gas Compatibility and Materials
Wetted materials: stainless steel 316L, Viton® seals, and gold‑plated sensor tube. Suitable for corrosive gases (e.g., Cl₂, NF₃) with appropriate seal upgrades. The unit is leak‑tested to < 1×10⁻⁹ mbar·l/s for helium.
Mechanical Dimensions
Length: 120mm, width: 48mm, height: 95mm (excluding fittings). Inlet/outlet: 1/4" VCR female fittings. Weight: approximately 1.2 kg. Mounting: two M6 threaded holes on the bottom plate.
Integration with ASML Systems
This MFC is factory‑configured with ASML‑specific tuning parameters, including soft‑start ramp and anti‑oscillation damping. It directly replaces older models 4022.666.71409 and 4022.489.75506. The valve assembly (VLV‑I‑780=8C22) includes an integral filter and pressure regulator (set to 2 bar).
Calibration and Adjustment
Each unit is calibrated using NIST‑traceable primary standards for N₂, with correction factors provided for other gases. In‑field zero and span adjustments are possible via the Modbus interface. The MFC stores up to 16 gas calibration curves in non‑volatile memory.
Environmental and Reliability
Operating temperature: 5‑50°C, humidity: 10‑90% RH. The device meets SEMI F47‑0706 voltage sag immunity. MTBF is estimated at 80,000 hours. The front LED indicates power and valve status.
Maintenance Schedule
Clean the inlet filter annually. Recalibration is recommended every 2 years. If flow drifts, check for contamination and perform a zero purge with dry N₂ for 10 minutes.
Conclusion
The Bronkhorst ASL‑100F (ASML 4022.666.71411) offers precise, reliable gas flow control essential for maintaining process consistency and tool availability in semiconductor fabrication.
