ASML 4022.637.22711 Pneumatic Assembly – Controlled Actuation for Wafer Handling and Positioning

The ASML 4022.637.22711, also referenced as PN556781, is a pneumatic assembly designed for ASML lithography systems. This assembly provides controlled pneumatic actuation for wafer handling, clamping, and positioning functions, ensuring reliable and precise operation in semiconductor manufacturing. Its robust construction and precise flow control make it a critical component for maintaining high throughput and process stability.

Overview of the Pneumatic Assembly

The pneumatic assembly integrates valves, actuators, and manifolds into a compact unit that delivers controlled air or vacuum pressure to various subsystems. It is typically used for wafer chuck clamping, lift pin actuation, and other mechanical movements.

Technical Specifications

• Part Number: 4022.637.22711 / PN556781

• Assembly Type: Pneumatic assembly

• Actuation Type: Pneumatic (air/vacuum)

• Pressure Range: 0 – 6 bar (air), 0 – -0.8 bar (vacuum)

• Valve Configuration: 3‑port, 5‑port solenoids

• Response Time: < 50 ms

• Flow Rate: 50 l/min (max)

• Port Size: 1/8 inch NPT

• Seal Material: Viton / PTFE

• Power Supply: 24 VDC (valve coils)

• Operating Temperature: 10 °C to 45 °C

• Dimensions: 200 mm x 150 mm x 80 mm

• Weight: 1.5 kg

Functional Features

The assembly includes integrated flow control and pressure regulation, plus built‑in filtration and quick‑connect fittings.

Application Areas

Used in wafer chucks, lift pins, clamp mechanisms, and alignment actuators in ASML lithography systems.

Installation

Mounting requires clean air supply and electrical connections per system documentation.

Maintenance

Periodic check of seals and filters is recommended. Solenoid coils may require replacement after extended use.

Compliance

Complies with CE, RoHS, and SEMI S2 safety standards.

Conclusion

The ASML 4022.637.22711 pneumatic assembly provides reliable actuation essential for wafer handling and positioning in lithography systems.