ASML 859-0927-007 Lamp Power Compensation PCB Card – Stable Illumination Control for Lithography

The ASML 859-0927-007 is a lamp power compensation printed circuit board card designed for SVG/ASML lithography systems. This PCB provides precise regulation and stabilization of the power supply to the illumination lamp, ensuring consistent light output intensity and spectral stability. By compensating for variations in line voltage and lamp aging, the board contributes to optimal exposure performance and process uniformity.

Overview of the PCB Card

The lamp power compensation card is a dedicated control board that monitors the lamp current and voltage, adjusting the power supply in real time to maintain a constant output. It includes feedback control loops, protection circuits, and diagnostic interfaces. The 859-0927-007 is compatible with the SVG 859-0904-005 power supply system.

Technical Specifications

• Part Number: 859-0927-007

• Related Part: 859-0904-005 (power supply)

• Board Type: Lamp power compensation PCB

• Input Voltage: 100 – 240 VAC

• Output Control: 0 – 100% power regulation

• Control Accuracy: ±0.5% of setpoint

• Response Time: < 100 ms

• Protection Features: Overcurrent, overvoltage, overtemperature

• Communication: Analog, RS‑232

• Operating Temperature: 0 °C to 50 °C

• Dimensions: 180 mm x 120 mm x 2.0 mm

• Weight: 0.25 kg

Functional Principle

The board compares the actual lamp power with the setpoint and adjusts the drive signal accordingly. It uses proportional‑integral control to maintain stability and compensate for disturbances.

Application Areas

Used in SVG/ASML lithography tools for mercury or xenon lamp power control in illumination systems.

Installation and Configuration

The board installs in the power supply chassis. Configuration includes setting current limits and feedback gains.

Maintenance

Inspection of connectors and visual check for component stress is recommended.

Compliance

Complies with CE and RoHS standards.

Conclusion

The ASML 859-0927-007 lamp power compensation PCB card ensures stable illumination essential for consistent lithography exposure.