ASML 4022.639.86643 CDA IR1-NIR Solid State Laser – Stable 780nm Illumination for Lithography

The ASML 4022.639.86643 is a CDA IR1‑NIR solid state laser module designed for ASML lithography systems. Operating at a wavelength of 780nm in the near‑infrared spectrum, this laser provides stable and reliable illumination for alignment, metrology, and inspection applications. Its compact design, long‑term stability, and high output power make it an essential component for precision measurements and process control in semiconductor manufacturing.

Overview of the Solid State Laser

The 4022.639.86643 is a diode‑pumped solid state laser (DPSSL) that delivers continuous‑wave output at 780nm. It is designed for integration into the optical alignment and metrology systems of ASML lithography tools. The laser's near‑infrared wavelength is ideal for penetrating certain semiconductor layers and for interferometric measurements where stable coherence is required.

Technical Specifications

• Part Number: 4022.639.86643

• Laser Type: CDA IR1‑NIR solid state laser

• Wavelength: 780 nm

• Output Power: 50 mW (typical)

• Mode: Continuous wave (CW)

• Beam Quality: TEM₀₀, M² < 1.1

• Polarization: Linear, > 100:1

• Linewidth: < 1 MHz

• Power Stability: ±1% over 8 hours

• Power Supply: 24 VDC, 5 VDC, 15 W

• Communication: RS‑232, I²C

• Operating Temperature: 20 °C ± 2 °C

• Dimensions: 120 mm x 60 mm x 40 mm

• Weight: 0.6 kg

Optical Performance

The laser delivers a high‑quality Gaussian beam with excellent pointing stability. The near‑infrared output is suitable for alignment and measurement applications.

Application Areas

Used in ASML alignment systems, metrology modules, and inspection tools.

Installation and Alignment

The laser module is mounted on a precision kinematic mount and aligned using dedicated tools.

Maintenance

Periodic power and wavelength verification is recommended. The laser is designed for long‑term operation without adjustment.

Compliance

Complies with CE, RoHS, and laser safety standards (IEC 60825‑1).

Conclusion

The ASML 4022.639.86643 solid state laser provides stable 780nm illumination essential for precision lithography systems.