Welcome to the Industrial Automation website!

NameDescriptionContent
HONG  KANG
E-mail  
Password  
  
Forgot password?
  Register
当前位置:

How to unpack and install the Zygo Mark II 4-inch interferometer system?

来源: | 作者:FAN | 发布时间 :2025-10-28 | 15 次浏览: | Share:

Converter installation: Remove the transmission element from the converter, insert its short metal pin into the socket slot of the host accessory, push it in and rotate it to fix it, tighten the locking screw, align the tilt knob of the host accessory socket with the converter, and remove the flat reflector.

Component alignment: Install the transmission component on the converter, use the two tilt knobs at the aperture end of the converter (do not touch the host socket knob), and follow the "Transmission Component Alignment" process; If a transmissive sphere is installed on the converter, additional alignment checks are required: the test piece is placed at the focal point of the converging beam. In "VIEW" mode, if the target center pattern is offset, use the converter socket knob to adjust it. If the aperture is not full of the screen (vignetting), adjust it through the Zygo 3/5-axis bracket X/Y, and optimize the focusing method according to the spherical plane alignment. The final number of stripes is controlled between 0-7.

Interference pattern evaluation and geometric distortion inspection

Interference pattern evaluation: It is necessary to quantify the deviation between the test fringes and the ideal fitting pattern (usually expressed as a fraction of the ideal fringe spacing). It is recommended to refer to the "Interference Pattern Interpretation and Evaluation Manual AB-0001". Zygo provides real-time interference pattern evaluation equipment, and information can be requested as needed.

Geometric distortion inspection: Preheat the equipment for 30 minutes (the roundness change of the image during the preheating period is normal and does not need to be adjusted), remove the accessory socket transmission element, place a reference plane with two axis brackets (4% or 90% reflectivity) 12 inches away from the host, and align it with Quick FAS; Insert vertically arranged parallel thin lines (or adjustable parallelograms provided in the user manual) into the beam near the reference plane, zoom to 6x and restore to 1x, observe the monitor line pattern (which can be photographed by a video printer), and if there is non ideal distortion (such as aspect ratio deviation), refer to Service Manual SP-0038 for correction, or contact Zygo service department; If there is a ZAPP/PC system, the host signal can be directly evaluated (its circular mask should display as a perfect circle, and the host CCTV needs to be adjusted to fill the aperture image with the mask).

(3) Operation precautions

Do not touch the glass surface of optical accessories with bare hands. If touched without professional cleaning experience, do not clean it yourself (soft coating only has a reflectivity of 90% and is easily damaged); When not in use, the optical accessories should be returned to the protective box.

When installing optical accessories, avoid excessive force that may cause strain or damage to the components; When clamping attachments, do not tighten the screws too tightly to prevent deformation of the reference surface.

The accessories are lightly clamped with nylon screws on the two axis bracket. If the bracket tilts backwards, the accessories may fall off, so the bracket should not be moved or tilted when clamping the accessories.

The host needs to be used along the axis defined by the automatic alignment system, and the alignment accuracy must be ensured in the alignment mode, otherwise there may be no stripe display in the observation mode; The intensity of the two interfering beams needs to be close to obtain the best stripe contrast.

The distance between the test piece and the host should be moderate, shortening the optical path length of the last reflector and reducing the cavity length to reduce wavefront distortion caused by unstable air paths.

Maintenance and accessory management

(1) Daily maintenance

Appearance cleaning: clean the blue shell with a soft cloth dipped in a mild furniture polish, and clean the gray painted parts with a mild spray cleaner.

Component lubrication: The spring positioning pin after the socket clip of the host accessory needs to be lubricated with Lubriplate or similar lithium based bearing grease.

Optical component care: The main optical cabin is sealed, and the internal components are dust-proof; The attached optical components should be stored properly in a protective box to reduce the need for cleaning and the risk of damage; Clean only when the components are visibly dirty, prioritize cleaning the local area rather than the entire surface.

Optical cleaning process (to be strictly followed to avoid damage)

Cleaning materials (or equivalent): Orvus WA paste (KWW Warehouse Chemicals), distilled water, spectral grade methanol (Fisher Scientific A-408), spectral grade acetone (Fisher Scientific A-19), Multilith pad (Multigraphics # 200-847), lens paper (Aldine Papers 8 x 9 inches), vinyl gloves (Laminaire # 607).

Preparation: Before cleaning the special coating, check the protective instructions, remove the jewelry on your hands, thoroughly wash your hands, wear gloves, use clean filtered air to blow away loose particles on the optical surface, and check for residual pollutant types.

  • ABB DSCS131 57310001-LM DS Communication Board
  • ABB DSBC172 57310001-KD BUS REPEATER
  • ABB DSRF180A 57310255-AV Digital Remote I/O Module
  • ABB DSTC175 57310001-KN Precision Control Module
  • ABB DSSB140 48980001-P Battery Unit Industrial Control Module
  • ABB UAC389AE02 HIEE300888R0002 PCB Board
  • ABB PFTL101B 20KN 3BSE004203R1 DCS Module
  • ABB UFC718AE101 HIEE300936R0101 PCB Circuit Board
  • ABB UNS2880b-P,V2 3BHE014967R0002 Control Board
  • ABB UNS0887A-P 3BHE008128R0001 Communication Module
  • ABB UNS2882A-P,V1 3BHE003855R0001 EGC Board
  • ABB UNS2882A 3BHE003855R0001 Interface Board
  • ABB UNS4881b,V4 3BHE009949R0004 Controller
  • ABB 216EA62 1MRB150083R1/F 1MRB178066R1/F 216EA62 Redundant system modules
  • ABB 216DB61 HESG324063R100/J Controller Module
  • ABB PFSK142 3BSE006505R1 Control board
  • ABB DSAI133A 3BSE018290R1 Analog Input Module
  • ABB PFTL201C-10KN 3BSE007913R0010 Load Cells
  • ABB CI858-1 3BSE018137R1 Industrial Module
  • ABB 5SHY35L4520 5SXE10-0181 AC10272001R0101 Controller
  • ABB TU847 3BSE022462R1 Module Termination Unit
  • ABB 6231BP10910 PLC Analog Output Module
  • ABB 07BR61R1 GJV3074376R1 Distributed I / O Coupler
  • ABB DI93A HESG440355R3 Digital Input Module
  • ABB IC660BBA104 6231BP10910 Industrial Control Module
  • ABB TP858 3BSE018138R1 Module Controller
  • ABB PFEA111-65 3BSE050090R65 Tension Electronics Module
  • ABB DSMB-02C 3AFE64666606 Power Supply Board
  • ABB MC91 HESG440588R4 HESG112714/B Wireless Router Modules
  • ABB PPD113-B03-23-111615 Excitation system controller
  • ABB AB91-1 HESG437479R1 HESG437899 Graphics Expansion Module
  • ABB IT94-3 HESG440310R2 HESG112699/B controller
  • ABB NF93A-2 HESG440280R2 HESG323662R1/HESG216665/K Module Controller
  • ABB IW93-2 HESG440356R1 HESG216678/B I/O module
  • ABB PM861K01 3BSE018105R1 Processor Module
  • ABB RB520 Dummy Module For Submodule Slot
  • ABB SR511 3BSE000863R1 SR511 Regulator 24V/5V
  • ABB DSDP140B 57160001-ACX Counter Board
  • ABB T-1521Z High-Performance Industrial Controller
  • ABB R-2521Z Industrial Control Module
  • ABB COM0002 Industrial Communication Module
  • ABB TAS.580.0550G00 Industrial Controller Module
  • ABB TAS.580.0560G00 Industrial Controller Module
  • ABB SPAJ110C Earth-fault relay
  • ABB TP858 3BSE018138R1 Industrial Control Module
  • ABB SD821 3BSC610037R1 Digital Controller
  • ABB 128877-103 High Precision Industrial Control Module
  • ABB CI853-1 communication interface module
  • ABB PM861K01 3BSE018105R1 Processor Module
  • ABB 5SDF1045H0002 IGBT Silicon Controlled Rectifier
  • ABB TC512V1 3BSE018059R1 Bus Module
  • ABB UCD240A101 Industrial Controller Module
  • ABB TC820-1 Industrial Control Module
  • ABB PM820-2 PLC Pulse Counter Module
  • ABB PM820-1 3BSE010797R1 Processor Module
  • ABB TP830 Industrial Automation Control Module
  • ABB 3ASC25H705/7 control module
  • ABB UAD154A Industrial Automation Module
  • ABB PPD113B01-10-150000 3BHE023784R1023 Controller Module
  • ABB UNS2880B-P V1 Digital I/O Module
  • ABB PFEA112-20 3BSE050091R20 Tension Control amplifier
  • ABB CI810B 3BSE020520R1 AF 100 Fieldbus Communication
  • ABB PPC380AE02 Industrial Control Module
  • ABB NU8976A99 Digital Input Module
  • ABB REF615 Feeder Protection and Control
  • ABB CPU0002 High-Performance Industrial Controller
  • ABB M063B High Performance Control Module
  • ABB XO08R1-B4.0 EXTENSION OUTPUT MODULE
  • ABB VA-MC15-05 Industrial Control Module
  • ABB VA-3180-10 Industrial Controller
  • ABB 72395-4-0399123 High-Performance Industrial Control Module
  • ABB 83SR04C-E Hydraulic Servo Module
  • ABB DTDX991A Digital I/O Module
  • ABB DTCC901B High-Performance Digital Temperature Control
  • ABB UAD206A101 Controller Module
  • ABB UCD224A102 Control Module
  • ABB SNAT602TAC Interface Board
  • ABB UCD224A103 Industrial Control Module
  • ABB PDD205A0121 Terminal Card Module
  • ABB UNS0119A-P V101 3BHE029153R0101 Digital Input Module
  • ABB 15.04.20.05 Control Module
  • ABB FPX86-9329-C High Performance Industrial Controller
  • ABB ARCOL 0346 Industrial Control Module
  • ABB ARCOL 0338 High-Performance Industrial Control Module
  • ABB ARCOL 0339 Industrial Frequency Converter
  • ABB 969-54 Control Module
  • ABB KUC720AE High-Performance Industrial Control Module
  • ABB 5360673-01 Power Supply Module
  • ABB PFCL201C 10KN Industrial Module
  • ABB REF610 Feeder Protection
  • ABB SK616001-A Industrial Controller Module
  • ABB BC25 Controller Module
  • ABB 3HAB8859-1/03A Industrial Control Module
  • ABB 3HAB9271-1/01B Robotic Control Interface Module
  • ABB 3HAC5498-1 High-Performance Control Module
  • ABB 3HAC5518-1 Industrial Control Module
  • ABB 3HAC5497-1 Industrial Control Module
  • ABB 3HAC7344-1 Mains line filter unit
  • ABB 3HAC7681-1 Process Interface Module
  • ABB 3HAC6428-1/04 high-performance control module
  • ABB 3HAC6157-1 Floppy sign/supply cable
  • ABB 3HAC10847-1 Ethernet on front,Harness
  • ABB 3HAC5566-1 Industrial Communication Bus Cable
  • ABB 3HAC9710-1 Heat exchanger unit
  • ABB IMFECI2 Industrial Control Module
  • ABB IMDS014 Digital Slave Output Module
  • ABB INIT03 Control Module
  • ABB 3HAC031683-004 Cable Teach Pendant 30m
  • ABB HAC319AEV1 High-Performance Control Module
  • ABB UFC092BE01 Binary input module
  • ABB DAPC100 3ASC25H203 Industrial Control Board
  • ABB 57160001-KX DSDO 131 Digital Output Unit
  • ABB 3HAC4776-1/1 Industrial Control Module
  • ABB DSTF610 terminal
  • ABB YB560100-EA S3 Industrial Control Module
  • ABB XO16N1-B20 XO16N1-C3.0 High-Performance Industrial Control Module
  • ABB TU804-1 Programmable Logic Controller (PLC) Module
  • ABB TU515 I/O terminal unit
  • ABB TK516 Connection Cable with Contacts
  • ABB SPCJ4D34-AA Industrial Ethernet I/O System Module
  • ABB SPAD346C Integrated Differential Relay
  • ABB 1SAM101904R0003 SK-11 Signal contact 1NO+1NC
  • ABB SE96920414 YPK112A Communication Module
  • ABB SC610 3BSE001552R1 Submodule Carrier
  • ABB SC513 PLC Analog Input Module
  • ABB SAFT110 Advanced Safety Termination Module
  • ABB RVC6-5A Control Module
  • ABB RB520 Linear Motion Controller Module