Welcome to the Industrial Automation website!

NameDescriptionContent
XING-Automation
E-mail  
Password  
  
Forgot password?
  Register
当前位置:

How to unpack and install the Zygo Mark II 4-inch interferometer system?

F: | Au:FAN | DA:2025-10-28 | 951 Br: | 🔊 点击朗读正文 ❚❚ | Share:

Converter installation: Remove the transmission element from the converter, insert its short metal pin into the socket slot of the host accessory, push it in and rotate it to fix it, tighten the locking screw, align the tilt knob of the host accessory socket with the converter, and remove the flat reflector.

Component alignment: Install the transmission component on the converter, use the two tilt knobs at the aperture end of the converter (do not touch the host socket knob), and follow the "Transmission Component Alignment" process; If a transmissive sphere is installed on the converter, additional alignment checks are required: the test piece is placed at the focal point of the converging beam. In "VIEW" mode, if the target center pattern is offset, use the converter socket knob to adjust it. If the aperture is not full of the screen (vignetting), adjust it through the Zygo 3/5-axis bracket X/Y, and optimize the focusing method according to the spherical plane alignment. The final number of stripes is controlled between 0-7.

Interference pattern evaluation and geometric distortion inspection

Interference pattern evaluation: It is necessary to quantify the deviation between the test fringes and the ideal fitting pattern (usually expressed as a fraction of the ideal fringe spacing). It is recommended to refer to the "Interference Pattern Interpretation and Evaluation Manual AB-0001". Zygo provides real-time interference pattern evaluation equipment, and information can be requested as needed.

Geometric distortion inspection: Preheat the equipment for 30 minutes (the roundness change of the image during the preheating period is normal and does not need to be adjusted), remove the accessory socket transmission element, place a reference plane with two axis brackets (4% or 90% reflectivity) 12 inches away from the host, and align it with Quick FAS; Insert vertically arranged parallel thin lines (or adjustable parallelograms provided in the user manual) into the beam near the reference plane, zoom to 6x and restore to 1x, observe the monitor line pattern (which can be photographed by a video printer), and if there is non ideal distortion (such as aspect ratio deviation), refer to Service Manual SP-0038 for correction, or contact Zygo service department; If there is a ZAPP/PC system, the host signal can be directly evaluated (its circular mask should display as a perfect circle, and the host CCTV needs to be adjusted to fill the aperture image with the mask).

(3) Operation precautions

Do not touch the glass surface of optical accessories with bare hands. If touched without professional cleaning experience, do not clean it yourself (soft coating only has a reflectivity of 90% and is easily damaged); When not in use, the optical accessories should be returned to the protective box.

When installing optical accessories, avoid excessive force that may cause strain or damage to the components; When clamping attachments, do not tighten the screws too tightly to prevent deformation of the reference surface.

The accessories are lightly clamped with nylon screws on the two axis bracket. If the bracket tilts backwards, the accessories may fall off, so the bracket should not be moved or tilted when clamping the accessories.

The host needs to be used along the axis defined by the automatic alignment system, and the alignment accuracy must be ensured in the alignment mode, otherwise there may be no stripe display in the observation mode; The intensity of the two interfering beams needs to be close to obtain the best stripe contrast.

The distance between the test piece and the host should be moderate, shortening the optical path length of the last reflector and reducing the cavity length to reduce wavefront distortion caused by unstable air paths.

Maintenance and accessory management

(1) Daily maintenance

Appearance cleaning: clean the blue shell with a soft cloth dipped in a mild furniture polish, and clean the gray painted parts with a mild spray cleaner.

Component lubrication: The spring positioning pin after the socket clip of the host accessory needs to be lubricated with Lubriplate or similar lithium based bearing grease.

Optical component care: The main optical cabin is sealed, and the internal components are dust-proof; The attached optical components should be stored properly in a protective box to reduce the need for cleaning and the risk of damage; Clean only when the components are visibly dirty, prioritize cleaning the local area rather than the entire surface.

Optical cleaning process (to be strictly followed to avoid damage)

Cleaning materials (or equivalent): Orvus WA paste (KWW Warehouse Chemicals), distilled water, spectral grade methanol (Fisher Scientific A-408), spectral grade acetone (Fisher Scientific A-19), Multilith pad (Multigraphics # 200-847), lens paper (Aldine Papers 8 x 9 inches), vinyl gloves (Laminaire # 607).

Preparation: Before cleaning the special coating, check the protective instructions, remove the jewelry on your hands, thoroughly wash your hands, wear gloves, use clean filtered air to blow away loose particles on the optical surface, and check for residual pollutant types.

  • VALMET PMB 2R 16 Slot Backplane PCB Card
  • NELES VALMET A413135 AOU 4 Output Module
  • Metso Valmet A413345 FPU Power Unit
  • VALMET A413171 PIC Module
  • VALMET A413620 Repeater Module
  • Valmet M851521 Memory Card
  • Valmet DIFF-EL 140 M1 Transmitter
  • Valmet A413064 DMU Module
  • Valmet IOP371 I/O Bus Extender Module
  • Valmet Cooking Liquor Measurement 3400 Model 3417H
  • Metso Valmet A413043 CPU Module – Industrial Processor
  • Valmet BIU4 M851221 Binary Input Module
  • Valmet PMB 1S CPU SCU Rack Module
  • Valmet A413248 Controller Module
  • Valmet PDP601 Distributed Processing Unit
  • VALMET M851004 M2 CPU Printed Circuit Board Module
  • Metso Valmet A413045 Ver.05 CPU Module
  • Valmet A413181 Ver.05 PLU1 Board
  • Lyngso Valmet ATB16 Controller Board
  • VALMET AIU 16 Analog Input Unit 545100-3A/3B
  • VALMET PUD 10 B Power Supply PCB Rack Module
  • Valmet MS-50V/120V Bearing Unit
  • Valmet PDP603 Distributed Processing Unit – DPU Module
  • Valmet A413110 TIU Board – Terminal Interface Unit
  • Valmet S420154 I/O Backplane PCB – Printed Circuit Board
  • Valmet A413173 Industrial Control Module
  • Valmet A413044 CPU Module
  • Valmet A4IU1 Analog I/O Module
  • Valmet A413325 IPU Power Unit – PLC Module
  • Valmet M851002 CPU Module – Central Processing Unit
  • Valmet PUD10B Power Supply Board
  • Valmet K00990 Master CPU Electronic Assy
  • Valmet Metso IOP345 Input Module
  • Metso Automation T545215 Board
  • Valmet Metso IOP304 Input Module
  • Valmet 542844-6A SCU Module
  • Metso A413043 Ver.11 Valmet CPU Module
  • Valmet Automation BIU 8A Input Module
  • Metso A413044 Ver05 Valmet CPU Module
  • VALMET 542821-5A Control System Rack Module
  • Metso A413005 Ver.04 Valmet CPU Module
  • Valmet M851207 AIU16 Card
  • Valmet BIU8 Binary Input Unit
  • VALMET 547070-2B CPU Printed Circuit Board Module
  • Valmet Automation A413325 Power Module
  • VALMET AUTOMATION A413135 AOU4 Module
  • VALMET ACU A413165 Model 9 Analog Controller
  • VALMET AUTOMATION A413511-02 Slot Rack with I/O Backplane
  • Valmet A413148 BIE 4 Rev 08 Board
  • Valmet ATB16-4 Controller Board
  • Neles Automation BOR82 A413292 Processor Module
  • Valmet A413015 NCU Module – Network Control Unit
  • Valmet AIU 16 Analog Input Unit – M8512071
  • Metso Valmet A413091 GDU Board
  • Valmet M851565 Damatic Main Keyboard
  • Metso A413082 CPU Module
  • Valmet A403037 GDC – Graphics Display Controller
  • Valmet A413076 FBC Board
  • Valmet A413015 NCU Module – Network Control Unit
  • Valmet A413082 CPU Module
  • VALMET AUTOMATION A413620 Fieldbus Repeater
  • Valmet Metso IOP341R Positioner Module
  • Metso A413082 Ver.04 CPU Module
  • Valmet Metso MCA FT250/10 10 Inch Sensor
  • Valmet N0542 ABMB Printed Circuit Board
  • Valmet A413000 Ver.07 CPU Module
  • Valmet A413061 Ver.05 DMU Module
  • Valmet M851241 M1 BCU Binary Input Module
  • Valmet Automation NCU A413015 Circuit Board
  • Valmet A413046 Ver.06 CPU Module
  • Valmet A651B001 Panel Mount Keyboard
  • Valmet IQ Scanner A418080R Basis Weight Detector Head
  • Metso Valmet A413370 ESU Ethernet SCSI Unit
  • Valmet A413340 FPU Power Supply Unit
  • Valmet SKF GE 400/600 Spherical Plain Bearing
  • Valmet SCU PCB Card 542844-7B – System Control Unit
  • Valmet A413075 FBU Fieldbus Controller Module
  • Valmet A413171 PIC Card Binary Output
  • Valmet A413002 Ver.05 CPU
  • Valmet ABMB PCB Card – Industrial Control Board
  • Valmet PMB 2R 542821-4A PCB Card
  • Metso Valmet A413001 CPU Module
  • Metso Valmet A413050 RSU 6 Serial Controller Unit
  • Valmet ABMB MT241 Input Mother Board
  • Valmet DAMATIC M851565 Keyboard
  • Valmet A413075 Ver05 FBC Board
  • VALMET K14891 FLEXI-U Operating Terminal
  • VALMET AUTOMATION MKB2 DAMATIC Keyboard
  • Valmet Metso Consistency Transmitter Smart Pulp M1 RL Blade
  • VALMET AUTOMATION A413230 ECU Module
  • Beckhoff EP9224-0037 - 4-Channel Power Distribution Box EtherCAT
  • Beckhoff CX2900-0026 - Solid State Flash Memory Card 20GB CFast
  • Beckhoff BK7500 - SERCOS Interface Fieldbus Bus Coupler Terminal
  • Beckhoff Ep2328-0002 - 4-Channel Input 4-Channel Output EtherCAT Box IP67
  • Beckhoff CX1020-0111 - Controller Kit Combo Interface Modules
  • B&R X20AI2237 - X20 System Analog Input Interface Module
  • Beckhoff CP2221-0010 - Multi-Touch Built-In Panel PC Touchscreen
  • Beckhoff CX1500-M310 - Fieldbus Master Interface Module 24V
  • Beckhoff CX2100-0904 - Power Charging Module Smart UPS Extension
  • Beckhoff CP3918-0000 - Multi-Touch Control Panel 18.5-Inch Monitor
  • Beckhoff CP2915-0000 - 15-Inch Multi-Touch Built-In Control Panel
  • Beckhoff CP7037-1027 - HMI Industrial Control Panel Built-In PC
  • Beckhoff EL3152 - 2-Channel Analog Input Terminal 4-20mA EtherCAT
  • Beckhoff CP6607-0000-0020 - 5.7-Inch Built-In Panel PC HMI Touch
  • Beckhoff EJ1809-0000 - 16-Channel Digital Input Pluggable Signal Level Terminal
  • Beckhoff AM8563-0N10-0000 - Synchronous Servo Motor
  • Beckhoff AX2006-S60600-520 - Compact Servo Drive Inverter
  • Beckhoff AM8053-0K20-0000 - Servo Motor with Planetary Gearbox AG3210
  • Beckhoff AM8042-0FH1-0000 - Synchronous Servo Motor
  • Rexroth R911338600 - IndraControl V HMI Terminal Beckhoff PCI Card FC9002
  • Beckhoff AX5125-0000 - 3 Phase Industrial Servo Drive 1000Hz
  • Beckhoff EP2328-0002 - 4-Channel Digital Input 4-Channel Output EtherCAT Box
  • B&R 7CP476-02 - System 2005 RTD CPU Module 3IF681.86 Interface
  • Beckhoff AX8620-0000-0000 - Power Supply Module Axis Drive System
  • Beckhoff CX1010-0111 - PLC Module CPU Controller 24V
  • Beckhoff AM8043-0H10-0000 - Synchronous Servo Motor
  • Beckhoff C6240-1009 - Control Cabinet Industrial PC Mainframe
  • Beckhoff BX8000-0000 - Bus Terminal Controller HW 4.4 Standalone
  • Beckhoff CP7721-1089-0020 - 12.1-Inch Touch Screen HMI Panel PC
  • Beckhoff CP7132-0001 - Industrial Built-In Panel PC Screen
  • Beckhoff CP2912-0010 - Multi-Touch Built-In Control Panel Display
  • Beckhoff CP2915-0000 - 15-Inch Multi-Touch Built-In Control Panel
  • Beckhoff AM8532-1EN0-0000 - Synchronous Servo Motor
  • Beckhoff AX5203-0000 - 2-Channel Digital Compact Servo Drive
  • Beckhoff CX2020-0141 - Embedded PC Core CPU Module
  • Beckhoff CP6832-0002-0010 - Built-In Industrial Control Panel Display
  • Beckhoff CX5020-0112 - Embedded PC CPU Control Module
  • Beckhoff CX5140-0175 - 4GB Embedded PC CPU Unit 24V