HORIBA SEC-Z500X Mass Flow Controller

In order to ensure the accuracy after the change, the core of this function is based on a large database of gas and flow ranges. For example, for N2 gas, the table provides multiple range options from R01 (3-10 SCCM) to R13 (2500-10000 SCCM). Users can select by MR/MG number, and the system can automatically map the valve stroke and sensor linearization curve. For more complex gases such as WF6, the system also provides dedicated numbers corresponding to different ranges such as 750-3000 SCCM.

This feature directly brings two major advantages: firstly, it significantly reduces spare parts inventory, and one MFC model can cover multiple process requirements; The second is to shorten the time for process switching and equipment reconfiguration, reducing hours or even days of modification work to just a few minutes of software operation.

Flexible communication architecture and system integration

In the automation system of modern semiconductor factories, MFC is no longer an isolated terminal, but an intelligent node in the factory host/PLC network. The SEC-Z500X series has proactively designed multiple communication interfaces to adapt to control system architectures of different scales and requirements.

1. Analog communication and RS-485

For traditional renovation projects or simple control systems, this series retains standard analog interfaces and provides them through D-sub 9-pin connectors:

Input: 0-5V DC flow setting signal.

Output: 0-5V DC flow monitoring signal.

Power supply: ± 15V DC power supply.

Meanwhile, the integrated RS-485 digital interface (RJ-45 connector) allows users to use a simple serial communication protocol (F-Net protocol) for parameter reading, writing, and status monitoring.

2. DeviceNet ™  communication

For applications that require moderate data integration, SEC-Z500X supports DeviceNet ™ Open fieldbus standard. There are significant advantages to using this interface:

Cost optimization: No need to additionally configure expensive AD/DA (analog/digital conversion) modules and dedicated I/O (input/output) boards on the PLC rack.

Simplified installation: With just one network cable for daisy chain connection and simple address settings, multiple MFCs can be interconnected with the main control system.

Compatibility guarantee: Compliant with ODVA (Open DeviceNet) ™ The specifications of the Supplier Association have passed consistency testing, ensuring interoperability in a multi vendor environment.

3. EtherCAT ®  communication

EtherCAT is the preferred solution for advanced processes that prioritize high speed and real-time performance. The SEC-Z500X also follows this trend and is equipped with an EtherCAT interface.

Fast data refresh: EtherCAT's "real-time processing" mechanism enables the master station to scan a large number of slave devices at extremely fast intervals, which is crucial for special applications that require fast closed-loop control.

Standard hardware: The main station can be connected using standard Ethernet interfaces, eliminating the need for expensive dedicated hardware and reducing the overall system cost.

Industry certification: Strictly following ETG (EtherCAT) ® The specifications of the technical group, including functional requirements and consistency testing, only certified devices are allowed to use the EtherCAT logo.

By providing complete communication options from traditional simulation to real-time industrial Ethernet, the SEC-Z500X series can seamlessly integrate into any existing or newly built factory control architecture.

Predictive maintenance: eDiagnostic monitoring system

In the semiconductor manufacturing industry that pursues "zero downtime", the passive "failure shutdown repair" mode is no longer acceptable. Engineers hope to receive early warnings at the beginning of equipment performance degradation and arrange maintenance before faults occur. This is precisely where the value of SEC-Z500X's eDiagnostic system lies.

Traditional troubleshooting often relies solely on whether the flow set value matches the feedback value, but this cannot fully reflect the health status of the valve, such as valve seat wear or particulate matter contamination. These faults may not cause significant set/feedback deviations in the early stages, but can affect long-term stability.

The principle of eDiagnostic system is as follows:

It continuously monitors two key parameters inside MFC through digital communication:

Flow control valve position: Real time monitoring of valve opening.

Flow control conditions: Compare the current control output with the theoretical model.

The typical warning scenario is as follows:

Scenario A (filter blockage): The upstream filter is slightly clogged, and in order to maintain a flow rate of 1SLM, the valve has to be opened 5% more than usual. The eDiagnostic system detects that the valve opening deviates from the reference value for a long time and issues a warning to check the gas filter.

Scenario B (valve seat leakage): Despite the valve closing command, there is still a small amount of flow passing through. The system will detect "zero drift" and issue an alarm for "decreased valve sealing".