HORIBA SEC-Z500X Mass Flow Controller

The architecture of this system is fully digital. Each MFC is connected to the workshop level data recording unit via RS-485 or DeviceNet bus. A central server (Surveillance Server) connects these data recording units through LAN (Local Area Network) to collect real-time diagnostic data of all MFCs. Engineers can view the status of all MFCs in the entire plant from the central control room. The log function can replay the valve opening and flow change curves of each MFC before the fault occurred, which is highly valuable for post analysis of the root cause.

In addition, HORIBA provides a dedicated monitoring software that is compatible with F-Net protocol and DeviceNet. This software not only displays all communication parameters, but also automatically outputs alarms when anomalies are detected, truly achieving the transition from "regular maintenance" to "status maintenance".

Technical specifications and selection guide

It is crucial to have a deep understanding of specification parameters to assist engineers in accurately selecting models.

1. Precision definition

The accuracy of this MFC is divided into two situations. When the full-scale is greater than 35%, the set value is ± 1.0%, which is a relative accuracy indicator, meaning that the error varies with the set value. When it is less than 35% of full scale, it is ± 0.35% of full scale, which is an absolute accuracy indicator that ensures that even at extremely low flow rates, the absolute error is controlled within 3.5 thousandths of full scale.

2. Work pressure difference

There are strict regulations on pressure difference for different models. For SEC-Z567MGX with high flow rates (such as 500 SLM), it is recommended to have a working pressure difference of 250-350 kPa. A stable pressure difference is a prerequisite for ensuring the linearity and repeatability of MFC. Engineers need to ensure that the difference between the inlet pressure and the outlet pressure in the gas path design is stable within this range.

3. Flow range

Note that the units SCCM and SLM represent milliliters per minute and liters per minute under standard conditions (0 ° C, 101.3 kPa). For highly corrosive gases such as HBr, detailed MR/MG numbers are provided in the table.

4. Leakage rate

The requirement for external leakage rate is extremely high. According to SEMI (Semiconductor Industry Institute) standards, the helium leakage rate is ≤ 5x10 ⁻¹² Pa · m ³/s. For highly toxic or corrosive gases such as WF6 and HBr, this indicator directly affects factory safety and environmental compliance.

5. Wet materials

All components that come into contact with gas are made of 316L stainless steel and have undergone surface polishing treatment to minimize the adsorption and particle generation of reactive gases such as HBr.

Selection decision matrix:

Recommended Model Series Key Features for Process Requirements

Small flow rate (≤ 50 SCCM), corrosive gas SEC-Z51/52 1/4 inch VCR interface, high precision ± 1.0% F.S

Medium flow rate (10-100 SLM), universal gas SEC-Z53/54 multi gas/multi range, DeviceNet/EtherCAT optional

High flow rate (300-500 SLM), such as N2 blowing SEC-Z55/56/57 1/2-inch VCR interface, fast response, large pressure difference range

DeviceNet fieldbus integration SEC-Z... 4... dedicated DeviceNet communication interface and EDS file support

EtherCAT high-speed real-time control SEC-Z... X... meets ETG standards, high bus efficiency

Installation, Configuration, and Maintenance Practice

1. Mechanical installation

Installation direction: This series is not sensitive to installation direction, but for optimal zero stability, it is recommended to install it in the direction of the factory calibration (usually horizontal installation with the solenoid valve on top).

Interface: Provide 1/4 inch or 1/2 inch VCR (vacuum coupling) compatible connectors according to the model, as well as 1.125 inch or 1.5-inch IGS (integrated gas system) interface options.

Size difference: Please note that the Z53 series (H=126 or 139mm) and Z56 series (H=150 or 158.5mm) have different heights. When designing panel layouts, please refer to the bottom view and size chart.

2. Electrical configuration

Power on sequence: Connect+15V first, then -15V and the common terminal. The power-off sequence is reversed.

Signal type: Distinguish between valve open/close input (Pin1), flow output (Pin2), and set input (Pin6). The SEF (Mass Flow Meter) model has no valve, and its valve open/close input pin defaults to a normally closed state.

DeviceNet wiring: Ensure correct connection of V+, V -, CAN_S, CAN_L, and correctly install terminal resistors at both ends of the network.

EtherCAT wiring: Use an M8 male connector that complies with the ETG5003.2020 standard for power supply (Pin1: V+, Pin3: Power Common).

3. On site configuration (multi gas/multi range operation)

Step 1: Ensure that the MFC is in a closed or no airflow state.

Step 2: Connect the PC with Z500 configuration software to the MFC network via RS-485 or DeviceNet.

Step 3: Select the new gas type and target full-scale in the software.

Step 4: The software will automatically recommend the corresponding MR/MG number. After confirmation, download the parameters to the EEPROM (electrically erasable programmable read-only memory) of MFC.