HORIBA SEC-Z500X Mass Flow Controller

Step 5: Execute the zero calibration command.

Step 6: Perform final validation using calibration gas (usually N2) to ensure accuracy meets the requirements.

4. Maintenance process based on eDiagnostic

Step 1: Establish a baseline. After the installation and stable operation of the new MFC, record its valve opening under several typical process steps as a health benchmark.

Step 2: Set the threshold. Set alarm thresholds for "valve opening deviation" and "response time delay" in eDiagnostic software.

Step 3: Daily monitoring. Engineers check the status of all MFCs on the software panel daily.

Step 4: Troubleshooting. When an alarm is triggered (such as a valve opening deviation of 10%), perform targeted checks: if the valve needs to be opened larger to maintain flow, mainly check the inlet filter or pressure regulator; If the valve cannot be closed, the main check is the sealing of the valve seat.

Step 5: Maintain validation. After cleaning or replacing the components, re record the valve opening and verify if it has returned to near the reference line.

5. Quick troubleshooting of common problems

Possible causes and solutions for the phenomenon

Set the value to 0, but if the output is greater than 0 due to valve leakage or zero drift, perform automatic zero calibration; Check if the valve seat is contaminated

Slow response or unstable overshoot pressure difference or PID parameter mismatch check upstream and downstream pressure; Re import the correct MR/MG number using configuration software to reset the PID

Check DIP switch address settings for communication failure (DeviceNet), address conflicts, loss of terminal resistance, or wiring errors; Confirm that there is a 120 ohm resistor at both ends of the network; Measure the voltage of CAN_S and CAN_L

Flow output fluctuation, atmospheric phase inlet pressure fluctuation, or upstream sensor pollution, add a stabilizing valve; Perform diagnostic checks on sensor raw signals