ZYGO ZMI 4104C Measurement Electronics Board

ZYGO ZMI 4104C  Measurement Electronics Board

Product core positioning

ZYGO ZMI 4104C is a high-precision measurement electronic board belonging to ZYGO ZMI ™ The series displacement measurement interferometer system is designed specifically for processing interferometer signals and achieving nanoscale displacement measurement. Its core value lies in the conversion of optical measurement accuracy into reliable electrical signal output through signal processing and error compensation technology. It is a key measurement component in the fields of precision manufacturing and scientific research.

Key technical parameters

Measurement accuracy

Position resolution as low as 0.15 nm, with an accuracy (σ) of 0.2 nm at maximum speed

Channel capability

Single board supports 4-axis measurement, modular expansion can achieve up to 64 axis synchronous measurement

Speed performance

Compatible with a maximum movement speed of * * ± 2.55 m/s * *, meeting the requirements of dynamic and static measurement

Optical compatibility

Compatible with ZYGO 7702, 7714, 7724 and other laser heads, with a minimum received optical power of only 0.07 µ W

Interface standards

Adopting VME bus interface, supporting industrial grade data acquisition and control system integration

Environmental adaptability

Support cyclic error compensation to suppress nonlinear errors to the measurement background noise level

Core functions and advantages

1. Sub nanometer measurement capability

Relying on heterodyne interferometry technology (similar to the FM radio carrier principle), this board can capture displacement changes as low as 0.15 nm, far exceeding the performance limit of traditional encoders (such as built-in sensors with a resolution of 10 nm). In the nano locator test of Physik Instrumente (PI), it was combined with the E-712 motion controller to achieve closed-loop control of 0.5 nm steps, fully unleashing the potential of precision actuators.

2. Powerful error suppression

The inherent cyclic error of interferometric measurement is greatly weakened by its compensation algorithm. The native cyclic error of ZYGO system is only about 1 nm, while that of competing systems often reaches 10-20 nm. This advantage is particularly critical in large stroke nanometer precision measurement scenarios, as it can avoid cumulative errors affecting the reliability of the results.

3. Flexible expansion and integration

Modular design: Can be combined with other ZMI series boards to meet complex measurement requirements ranging from single axis to 64 axis, such as synchronous monitoring of multi degree of freedom robotic arms or wafer workbenches.

Software support: Equipped with dedicated data acquisition and analysis software, providing real-time visualization and data export functions, simplifying the measurement process.

Typical application scenarios

1. Industrial manufacturing field

Semiconductor industry: wafer positioning calibration, lithography equipment workbench displacement monitoring, chip packaging accuracy testing.

Precision machinery: high-precision geometric error measurement of machine tools, displacement calibration of coordinate measuring machines (CMM).

2. Research and high-end equipment

Nanotechnology: positioning control of atomic force microscopy (AFM), displacement feedback of nanoindentation instrument.

Optical engineering: laser resonant cavity alignment, astronomical telescope lens fine-tuning, optical component surface morphology measurement.

Vibration analysis: Vibration characterization and isolation system optimization of sensitive experimental platforms.

3. Benchmark application cases

In the N-331 nanometer locator test of PI, the ZMI 4104C board improved the motion control accuracy of the locator from the 10 nm level of the built-in sensor to the 0.5 nm level through closed-loop feedback, verifying its core role in unlocking the performance potential of precision equipment. PI has recommended the system to customers who require the highest accuracy.

System configuration suggestions

A complete measurement system should include:

Laser source: such as ZYGO 7702 laser head (providing stable interference light source);

Optical components: differential interferometer (DPMI) and other optical probes;

Control unit: motion controller adapted to VME bus (such as PI E-712);

Software platform: ZYGO dedicated measurement and analysis software or customized data processing system.