MKS Type T3B Butterfly Valve (with DeviceNet Interface)

MKS Type T3B Butterfly Valve (with DeviceNet Interface)

Security Information

Symbol Definition

The symbol "Warning" in the manual indicates a potential danger of injury to personnel; CAUTION "indicates the potential danger of product damage; NOTE "indicates important information that requires special attention.

Symbols on equipment: including power on/off (IEC 417 No.5007/5008), grounding (IEC 417 No.5017/5019/5020/5021), AC/DC (IEC 417 No.5031/5032/5033-a), Class II equipment (IEC 417 No.5172-a), three-phase AC (IEC 617-2 No.020206), hand compression risk (ISO 3864), electric shock risk (ISO 3864 No.B.3.6), etc. The manual provides detailed explanations of the meanings of each symbol in table form.

Safety operation standards

Mechanical safety: Before the valve is fully integrated into the system, there is a risk of injury from moving parts. Keep away from the valve opening and do not insert objects into openings that may come into contact with moving parts; Cut off the electrical and pneumatic power supply of the valve before operation.

Component and modification restrictions: The use of substitute components or unauthorized modification of valves is prohibited. Repairs must be sent to the MKS calibration service center to ensure that safety functions are intact; Only qualified personnel are allowed to perform component replacement and internal adjustments.

Use of hazardous materials: If hazardous materials are used, safety regulations must be followed, and valves must be thoroughly purged if necessary to ensure compatibility between the materials in contact with the valves (including sealing materials); Blowing should be carried out under a fume hood and protective gloves should be worn.

Environmental and pressure requirements: Prohibited for use in explosive environments (unless specifically certified); Use connectors that meet specifications and are compatible, and assemble and tighten them according to the manufacturer's instructions; Check the sealing of vacuum component connections; The operating pressure shall not exceed the rated maximum pressure (refer to product specifications); The pressurized gas source system requires the installation of rupture discs; Prevent pollutants such as dust and metal shavings from entering the equipment; Keep away from valve openings during operation.

Product Overview

Core Composition and Function

Components: T3B butterfly valve consists of a throttle valve (with motor board electronic housing), microprocessor, drive circuit (no separate controller box required), DeviceNet communication interface, and analog output reflecting pressure or valve position. The valve is controlled by digital values sent through the DeviceNet network.

Control principle: Based on digital pressure/position control algorithm, guide the valve to the appropriate position for pressure or position control. The pressure or position setting value can be sent through digital DeviceNet command; Directly read the control pressure signal from the MKS Baratron pressure sensor, and all operation settings are controlled through the DeviceNet protocol.

Data storage and anti-interference: When the power is turned off, the calibration constant is saved in non-volatile memory, and it can run without recalibration after re powering on; Adopting a metal casing, optimized internal design, surge/ESD suppression network, and RFI filtering (all inputs and outputs) to enhance resistance to radio frequency interference and electromagnetic noise; When using fully metal braided shielded cables with both ends correctly grounded, they comply with the EU CE certification testing standards.

key parameters

Power Requirements: Requires 24 VDC @ 3 Amp input voltage (powered through a power connector); If a heating pressure sensor is used and powered by a valve, the sensor power demand needs to be added, and the valve can provide a maximum current of 750 mA (total of high and low sensors) for the heating pressure sensor.

Control range: The pressure control range is 0.5% -100% of the sensor range, and the position control range is 0 ° -90 °; The repeatability of the controller is ± 0.1% of full scale (FS).

control mode

Pressure control: The valve moves to maintain the target pressure (set value), supporting two algorithms: Model Based Control and PID Control.

Model based control: During the control cycle, the algorithm calculates the next valve position based on the current pressure, position, and set value, requiring knowledge of system parameters such as chamber volume and valve conductivity to optimize control; The relationship between chamber pump speed and valve position is obtained through the "LEARN function" (based on actual working conditions such as sensor type and chamber volume), which is usually executed once during initial installation. The process includes setting the chamber volume, selecting the volume estimator switch, configuring the pressure sensor range, setting the learning flow rate, and starting learning (lasting about 45 seconds, maintaining stable flow rate).

PID control: The set value optimizes the response through two parameters, Phase and Gain, and the default value can be adjusted; The response speed of phase control pressure to changes in the set value is too fast, which can lead to slow response or oscillation, and too small, which can cause overshoot and oscillation; Gain enables the controller to track the set value and minimize steady-state error. Excessive gain can cause overshoot, while insufficient gain can result in slow response.