Constellation HA Series Vacuum Transmission System Selection Guide

Load Port and Slit Valve: Optional and Maintenance

The standard configuration for each cassette load port includes CLP slit valve and isolated charging. Slit valve is used to achieve vacuum isolation between cassette and transfer chamber.

Selection precautions:

For HA-200/400, there is usually only one load port; For HA-500/600/800, one or two load ports can be selected.

If the process requires frequent replacement of different cassettes, it is recommended to have a dual load port configuration, one of which can be used as a buffer or standby input.

Daily maintenance:

Check the sealing ring (Viton or perfluororubber) of the slide valve for wear or permanent compression deformation. It is recommended to replace it every 6-12 months.

The supply pressure of the valve driven cylinder should be maintained within the specified range (usually 5-7 bar) and ensure that the gas source is dry and filtered.

If there is abnormal noise or stuck valve opening and closing, the valve plate guide rail needs to be disassembled and cleaned, and re lubricated (using vacuum compatible grease).

Power and environmental requirements

The system input power supply is 208 VAC, 20A, single-phase or three-phase (depending on the specific configuration). It is recommended to use UPS or uninterruptible power supply to avoid voltage drops that may cause the robotic arm to lose control or the wafer to fall.

Working temperature upper limit: 100 ℃ (mainly for cavity baking, drivers and controllers should be kept below 40 ℃ at room temperature).

Environmental humidity: Although the relative humidity range is not directly given, as a semiconductor device, it should be controlled within 30% -60% non condensing.

Cleanliness: The system itself is in a vacuum environment, but the peripheral control cabinet and power module should meet ISO Class 6 or better cleanliness requirements.

Reliability Data and Spare Parts Strategy

3.0 × 10 ⁶ MCBF is a numerical value based on a large amount of on-site data statistics, which means that on average, only one fault that may cause downtime occurs every 3 million loading/unloading/transmission operations. For a typical 200mm production line, this is equivalent to several years of continuous operation.

However, in order to truly achieve<2-hour MTTR, the following spare parts strategy must be followed:

Key spare parts inventory: at least one pre calibrated HA-5.0 or HA-3.2 robotic arm complete machine; A HA-50V elevator motor component; Several slide valve sealing ring kits.

Quick exchange tools: Prepare specialized robotic arm alignment fixtures and installation wrenches to reduce calibration time.

Documented calibration data: The zero offset, teaching position, and other parameters of each device should be backed up in the control system or maintenance manual, and can be directly imported after replacing the robotic arm.

Customized options and special applications

Hine Automation emphasizes the ability to customize according to customer needs. Common customization projects:

End effector: Available in SEMI standard or custom shapes (such as forks with edge clamping or ceramic actuators with static elimination function).

Single/Dual End effectors: Dual actuators can transfer two wafers at once, increasing throughput.

25 or 50 wafer boxes: The elevator step parameters need to be adjusted for different slot spacing and height.

High payload option: If the substrate being transported is heavy (such as thick SOI or glass substrates), the drive and braking systems need to be upgraded.

When selecting, the supplier should be clearly informed of the following parameters:

Wafer/substrate material, thickness, weight

Maximum allowable vibration and acceleration

Do you need notch/flatt alignment

Is it compatible with FOUP or FOSB (usually open cassette for 200mm wafers)

Common fault codes and on-site quick repair guide

Although the Constellation system is known for its high reliability, it may still encounter the following types of problems. The following is a quick diagnostic table based on actual on-site experience:

Possible causes of malfunction can be quickly addressed

The robotic arm does not move, and the controller reports "interlock not met". The slide valve is not fully opened or the chamber door is not closed. Check the valve position sensor signal; Reset the gate valve in manual mode

During wafer retrieval, if the wafer is not lifted by the robotic arm and vacuum suction is not established or if the actuator is worn, check if the vacuum pipeline and suction holes are blocked; Replace the suction cup on the actuator

The elevator makes a rattling noise and does not rise properly. The screw lubrication is insufficient or the motor encoder is out of step and power is cut off. Manually rotate the screw and add vacuum grease; Reset zero point

Ethernet communication disconnection and inability to recover IP conflicts or switch port failures using cross line direct connection testing; Check MAC address filtering settings

The system suddenly stops abruptly, unable to reset external EMO pressed or safety relay tripped to reset all EMO buttons. Check if the 24V safety circuit is normal