XP POWER CDX Series 1500W Dual Frequency RF Power Supply

XP POWER CDX Series 1500W Dual Frequency RF Power Supply

Product Overview

Product Name: CDX Series Dual Frequency RF Power Supplies

Core positioning: High power, high-precision power supply equipment designed for industrial scenarios that require dual frequency RF drive, such as semiconductors, plasma processing, etc

Core advantages: flexible dual band selection, high output accuracy and stability, multi communication interface adaptation, compatibility with harsh environments and compliance

Physical and installation characteristics:

Dimensions: 483mm x 133mm x 457mm (19 "W x 5.25" H x 18 "D)

Weight: Maximum 18kg (39lb.)

Installation method: Standard 19 inch EIA rack mounted

Appearance: Full surface painted or galvanized chromate coating, equipped with dual handles at the front end

Warning signs: IEC standard safety signs including dangerous voltage, heavy objects, high temperature, and radio frequency energy

Electrical specification details

(1) Input parameters

Characteristic specification remarks

Input voltage 208/400/480VAC, three-phase without neutral wire, with grounding

Input frequency 50/60Hz nominal value

Input current 7.5A/phase based on 480VAC input, varying with output specifications

(2) Output parameters

Characteristic specification remarks

Single output power up to 1500W continuous forward power, 50 Ω load

Output accuracy/adjustment ± 2W or ± 1.0% (whichever is greater) 10% -100% maximum output range

Short term stability ± 1.0% continuous output for 1 hour, 10% -100% set point

Long term stability ± 3.0% continuous output for 3 years, 10% -100% set point

Rise time<200ms from enable signal front to 90% requested power

Available frequencies (per channel): 400kHz, 2MHz, 13.56MHz, 27.12MHz, 40.68MHz, 60MHz. Any two frequencies can be selected

Frequency stability ± 0.005%-

Zero set point output<1.0W actual power,<1.0W read back power when the set signal is zero or negative

Harmonic signal<-40dBc-

Stray signal<-40dBc-

AM&FM noise<-40dBc at 50kHz offset

Heat dissipation and environmental requirements

(1) Heat dissipation parameters

Detailed remarks on heat dissipation method requirements

Cooling type: mandatory requirement for water cooling, alternative option without air cooling

The minimum inlet flow rate is 8.6L/m (2GPM) and the maximum pressure is 414kPa (60psi)

Inlet water temperature: 5 ° C-25 ° C (40 ° F-77 ° F). Water temperature exceeding the range may affect heat dissipation efficiency

Explanation on no special water quality requirements for cooling medium water

(2) Environmental adaptability

Environmental conditions, work scope, storage/transportation scope

Temperature 10-40 ° C (50-104 ° F) -25-70 ° C

Humidity 5-85% RH (non condensing, non freezing) 5-95% RH (non condensing, non freezing)

Air pressure 86-106kPa 70-106kPa

The maximum intake requirement is 30 ° C (95 ° F)-

Standard Class Temperature/Humidity/Air Pressure Class 3K3 (prEN50178) Temperature Class 1k4, Humidity Class 1k3, Air Pressure Class 1k4

Function and Interface

(1) Core functions

Optional features: Pulse mode operation (single-stage/multi-stage/synchronous/advanced envelope control), frequency agility, automatic frequency tuning (minimizing reflected power), fast shutdown (arc management), common exciter (CEX, multi power synchronous clock)

Safety and status monitoring: Front end LED indicator lights (AC on, RF on, interlock status, fault status), 20 × 2 character alphanumeric display screen (displaying all operating parameters)

(2) Communication and Connection Interface

Interface Type Specification Details Usage

Digital communication DeviceNet (M12 interface), EtherCAT industrial bus control and data transmission

Serial communication RS232 point-to-point serial control

Analog interface, analog signal input/output, analog quantity control, and power feedback

Other interfaces include 15PIN I/O, 10-32 grounding column, HARTING/HAN 40 3PE (power input) expansion I/O, grounding, and power access

Compliance and Certification

Safety compliance: EN 61010-1:2010, UL 61010-1:2012, CSA C22.2 No. 61010-1:2012

Performance compliance: Passed SEMI F47-0200 voltage drop immunity test to meet Samsung Power Vaccine requirements

Certification mark: Compliance system with TUV safety/EMC mark (compliant with the latest international standards)